Method of fabricating vertical probe head

Abstract

The present invention relates to a method of fabricating a vertical probe head, whereas the vertical probe head is formed by the combination of at least a probe, a bottom guide plate and a top guide plate having at least a hole matching the probe. The probe is fabricated by a LIGA-like process combining with the processes of photolithography, etching and electroforming, and so on, so that the probe is equipped with comparatively better precision, strength and reliability and yet can be custom-made for satisfying various demands. In addition, both the top and bottom guide plates are made by a means of non-mechanical machining, which respectively is fabricated by processing a substrate using means of photolithography, etching and mask so as to fabricate holes for matching with the aforesaid probe. The vertical probe head of the invention is a breakthrough over the current probe head and thus breaks the bottleneck limiting the process of fabricating the same, such that the method disclosed in the invention enables the probe head to be fabricated by a cheaper and less complicated process with more probes to be arranged in a unit area.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A˜FIG. 1G are schematic diagrams showing successive steps of a method of fabricating a vertical probe head according to a preferred embodiment of the present invention.

FIG. 2A˜FIG. 2D are cross-section of various micro probe made by a fabricating method of the present invention.

FIG. 3A—FIG. 3E are schematic diagrams showing successive steps of a method of fabricating a guide plate adapted for a vertical probe head according to a preferred embodiment of the invention.

FIG. 4A is a schematic diagram showing a top guide plate adapted for a vertical probe head according to a the present invention.

FIG. 4B is a schematic diagram showing a bottom guide plate adapted for a vertical probe head according to a the present invention.

FIG. 5 is a schematic diagram showing a vertical probe head of the present invention.

FIG. 6A˜FIG. 6D, are cross-section of various micro probe made by a fabricating method according to a preferred embodiment of the invention.

Claims

1. A method of fabricating a vertical probe head, comprising steps of: providing a substrate;overlaying a mask on the substrate for defining at least an area;removing a portion of the substrate within each defined area;removing the mask while depositing a seed layer on the substrate;depositing a metal layer on the seed layer by a means of electroforming deposition;polishing the metal layer; andremoving the substrate while forming at least a micro probe, comprised of a first probe, a second probe, and an elastic member sandwiched between the first and the second probes while connecting thereto.

2. The method of claim 1, wherein the substrate is made of silicon or silicon compound.

3. The method of claim 1, wherein the removing of the portion of the substrate is performed by a means of reactive ion etching (RIE).

4. The method of claim 1, wherein the metal layer is made of a material selected from the group consisting of nickel, gold, silver, copper, nickel alloy, gold alloy, copper alloy and silver alloy.

5. The method of claim 1, wherein the cross-section of the micro probe is formed in a shape selected from a polygon, a geometrical shape with rounded angle and a geometrical shape with arc outline.

6. A method of fabricating a guide plate adapted for vertical probe heads, comprising steps of: providing a substrate;overlaying a mask on the;substrate for defining at least an area of through holes utilizing a lithographic process;performing an anisotropic etching, upon each defined area for enabling at least a through hole to be formed therein; andremoving the mask so as to form a guide plate having at least a through hole.

7. The method of claim 6, further comprising a step of: insulating the guide plate.

8. The method of claim 6, wherein the substrate is made of a material selected from the group consisting of a silicon, a metal, a silicon compound.

9. The method of claim 6, wherein the anisotropic etching is performed by a means selected from the group consisting of a means of chemical etching and a means of plasma dry etching.

10. The method of claim 6, wherein the profile of the through hole is formed in a shape selected from a polygon, a geometrical shape with rounded angle and a geometrical shape with arc outline.

11. A method of fabricating a guide plate adapted for vertical probe heads, comprising steps of: providing a substrate;overlaying a mask on the substrate for defining at least an area of through holes utilizing a lithographic process;performing an anisotropic etching upon each defined area for enabling at least a through hole to be formed therein;removing the mask so as to form a guide plate having at least a through hole; andinsulating the guide plate.

12. The method of claim 1, wherein the substrate is made of a material selected from the group consisting, of a silicon, a metal, a silicon compound.

13. The method of claim 11, wherein the anisotropic etching is performed by a means selected from the group consisting of a means of chemical etching and a means of plasma dry etching.

14. The method of claim 11, wherein the profile of the through hole is formed in a shape selected from a polygon, a geometrical shape with rounded angle and a geometrical shape with arc outline.

15. A method of fabricating a vertical probe head, comprising steps of: providing a substrate;overlaying a mask on the substrate for defining at least an area;removing a portion of the substrate within each defined area;removing the mask while depositing a seed layer on the substrate;depositing a metal layer on the seed layer by a means of electroforming deposition;polishing the metal layer;removing the substrate while forming at least a micro probe; andcombining each micro probe with a guide plate having at least a through hole.

16. The method of claim 15, wherein the profile of the through hole is formed in a shape selected from a polygon, a geometrical shape with rounded angle and a geometrical shape with arc outline.

17. The method of claim 15, wherein the guide plate is made by a method comprising steps of: providing a substrate;overlaying a mask on the substrate for defining at least an area of through holes utilizing a lithographic process;performing an anisotropic etching upon each defined area for enabling at least a through hole to be formed therein; andremoving the mask so as to form a guide plate having at least a through hole.

18. The method of claim 17, further comprising a step of: insulating the guide plate.

19. The method of claim 15, wherein the substrate is made of a material selected from the group consisting of a silicon, a metal, a silicon compound.

20. The method of claim 17, wherein the anisotropic etching is performed by a means selected from the group consisting of a means of chemical etching and a mean s of plasma dry etching.