Wafer Bonding For Silicon-On-Insulator Technologies; J. B. Lasky; Appl. Phys. Lett. 48 (1), 6 Jan. 1986. |
A Field-Assisted Bonding Process For Silicon Dielectric Isolation; Frye et al.; J. Electrochem. Soc.; vol. 133, No. 8; Aug. 1986. |
MBE-Grown Fluoride Films: A New Class of Epitaxial Dielectrics; Farrow et al.; J. Vac. Sci. Technol. 19(3), Sep./Oct. 1981. |
Molecular-Beam Epitaxy of Si On A CaF.sub.2 /Si (100) Structure; Sasaki et al.; J. Appl. Phys. 59 (9), 1 May 1986. |
IEEE Circuits And Devices Magazine; Harry T. Weaver; vol. 3, No. 4; Jul. 1987. |