Number | Name | Date | Kind |
---|---|---|---|
5306671 | Ogawa et al. | Apr 1994 | A |
5468342 | Nulty et al. | Nov 1995 | A |
5523258 | Petti et al. | Jun 1996 | A |
5562801 | Nulty | Oct 1996 | A |
5670426 | Kuo et al. | Sep 1997 | A |
5779925 | Hashimoto et al. | Jul 1998 | A |
5817579 | Ko et al. | Oct 1998 | A |
5824234 | Jou et al. | Oct 1998 | A |
5861676 | Yen | Jan 1999 | A |
5920796 | Wang et al. | Jul 1999 | A |
5953614 | Liu et al. | Sep 1999 | A |
5968279 | MacLeish et al. | Oct 1999 | A |
5968846 | Chou et al. | Oct 1999 | A |
6004874 | Cleeves | Dec 1999 | A |
6022805 | Sumi | Feb 2000 | A |
6066555 | Nulty et al. | May 2000 | A |
6235640 | Ebel et al. | May 2001 | B1 |
6277733 | Smith | Aug 2001 | B1 |
6451703 | Liu et al. | Sep 2002 | B1 |
Entry |
---|
H. Sumi et al., “Optimization of Contact Process with Monte Carlo Study for Advanced CMOS Devices”, pp. 3-8, Feb. 1996. |