Number | Date | Country | Kind |
---|---|---|---|
1-300529 | Nov 1989 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
RE31220 | Ernsberger | Apr 1983 |
Number | Date | Country |
---|---|---|
63-3417 | Jan 1988 | JPX |
63-288017 | Nov 1988 | JPX |
Entry |
---|
Blum et al., "A study of the Effect of Key Processing Variables on the Lithographic Performance of Microposit SAL601-ER7 Resist," J. Vac. Sci. Technol. B 6(6), Nov./Dec. 1988, pp. 2280-2285. |