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5693563 | Teong | Dec 1997 | A |
6146988 | Ngo et al. | Nov 2000 | A |
6147000 | You et al. | Nov 2000 | A |
6153523 | Van Ngo et al. | Nov 2000 | A |
6165894 | Pramanick et al. | Dec 2000 | A |
6171960 | Lee | Jan 2001 | B1 |
6174810 | Islam et al. | Jan 2001 | B1 |
6177347 | Liu et al. | Jan 2001 | B1 |
6211084 | Ngo et al. | Apr 2001 | B1 |
6211085 | Liu | Apr 2001 | B1 |
6214731 | Nogami et al. | Apr 2001 | B1 |
Entry |
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“Passivation of copper by formation in dilute silane” S. Hymes and S. P. Muraka—C. Shepard and W. A. Ianford Jan. 25, 1992—pp. 4623-4625. |