The present invention relates to non-volatile memory devices, and more particularly to improving the stability of memory cell current during read operations.
Non-volatile memory devices are well known in the art. See for example U.S. Pat. No. 7,868,375, which discloses a four-gate memory cell configuration, and which is incorporated herein by reference for all purposes. Specifically,
Various combinations of voltages are applied to the control gate 22, select gate 24, erase gate 26 and/or source and drain regions 14/16, to program the split gate memory cell 10 (i.e., inject electrons onto the floating gate), to erase the split gate memory cell 10 (i.e., remove electrons from the floating gate), and to read the split gate memory cell 10 (i.e., measure or detect the conductivity of the channel region 18 to determine the programming state of the floating gate 20).
Split gate memory cell 10 can be operated in a digital manner, where the split gate memory cell 10 is set to one of only two possible states: a programmed state and an erased state. The split gate memory cell 10 is erased by placing a high positive voltage on the erase gate 26, and optionally a negative voltage on the control gate 22, to induce tunneling of electrons from the floating gate 20 to the erase gate 26 (leaving the floating gate 20 in a more positively charged state—the erased state). Split gate memory cell 10 can be programmed by placing positive voltages on the control gate 22, erase gate 26, select gate 24 and source region 14, and a current on drain region 16. Electrons will then flow along the channel region 18 from the drain region 16 toward the source region 14, with electrons becoming accelerated and heated whereby some of them are injected onto the floating gate 20 by hot-electron injection (leaving the floating gate 20 in a more negatively charged state—the programmed state). Split gate memory cell 10 can be read by placing positive voltages on the select gate 24 (turning on the portion of channel region 18 under the select gate 24) and drain region 16 (and optionally on the erase gate 26 and/or the control gate 22), and sensing current flow through the channel region 18. If the floating gate 20 is positively charged (i.e. split gate memory cell 10 is erased), the split gate memory cell 10 will turn on, and electrical current will flow from drain region 16 to source region 14 (i.e. the split gate memory cell 10 is sensed to be in its erased “1” state based on sensed current flow). If the floating gate 20 is negatively charged (i.e. split gate memory cell 10 is programmed), the portion of channel region 18 under the floating gate is turned off, thereby preventing appreciable current flow (i.e., the split gate memory cell 10 is sensed to be in its programmed “0” state based on no, or minimal, current flow).
Table 1 provides non-limiting examples of erase, program and read voltages, where Vcc is power supply voltage or another positive voltage such as 2.5 V.
Split gate memory cell 10 can alternately be operated in an analog manner where the memory state (i.e. the amount of charge, such as the number of electrons, on the floating gate 20) of the split gate memory cell 10 can be continuously changed anywhere from a fully erased state (minimum number of electrons on the floating gate 20) to a fully programmed state (maximum number of electrons on the floating gate 20), or just a portion of this range. This means the split gate memory cell 10 storage is analog, which allows for very precise and individual tuning of each split gate memory cell 10 in an array of split gate memory cells 10. Alternatively, the split gate memory cell 10 could be operated as an MLC (multilevel cell) where it is configured to be programmed to one of many discrete values (such as 16 or 64 different values). In the case of analog or MLC programming, the programming voltages are applied for a limited time, or as a series of pulses, until the desired programming state is achieved. In the case of multiple programming pulses, intervening read operations between programming pulses can be used to determine if the desired programming state has been achieved (in which case programming ceases) or has not been achieved (in which case programming continues).
Split gate memory cell 10 operated in an analog manner or as an MLC may be more sensitive to noise and read current instabilities which can adversely affect the accuracy of the split gate memory cell 10. One source of read current instability in analog non-volatile memory devices is the capture and emission of electrons by oxide traps located at the interface and near-interface between the gate oxide and memory cell channel region. The gate oxide is the insulation layer that separates the floating gate 20 from the channel region 18 of substrate 12. When an electron is captured on an interface trap, it reduces the channel conductivity during a read operation, and thus increases the threshold voltage Vt of the split gate memory cell 10 (i.e., the minimum voltage on the control gate 22 needed to turn on the channel region 18 of the split gate memory cell 10 to produce a predetermined target current, 1 μA being an example). When the control gate voltage is at or above the threshold voltage Vt, a conducting path is created between the source region 14 and the drain region 16, and a current of at least the predetermined target current flows. When the control gate voltage is below the threshold voltage Vt, a conducting path is not created, and any current between the source region 14 and the drain region 16 is considered sub-threshold or leakage current. An electron captured on an interface trap can be emitted from the interface trap, which decreases threshold voltage Vt of the memory cell, and thus increases the channel conductivity during a read operation. These single-electron events of electron capture and emission by interface traps appear as read current noise and are referred to as random telegraph noise (RTN). In general, RTN produced by a single interface trap is characterized by two states: a lower Vt state (and higher read current state) when an electron is emitted from the interface trap and a higher Vt state (and lower read current state) when an electron is captured by the interface trap. As described above, the instability of the split gate memory cell 10 during read can be characterized either by the threshold voltage Vt, i.e. the control gate voltage corresponding to the predetermined target current or by memory cell current under given read voltage conditions. The present examples are particularly described in relation to memory cell read instability as threshold voltage Vt, however the use of memory cell current under given read voltages are specifically contemplated.
RTN that occurs during programming can be addressed as part of the program operation. However, one issue with RTN is that electron emission that undesirably decreases the threshold voltage Vt of the memory cell (and therefore undesirably increases channel conductivity during a read operation) can occur after programming of the memory cell is completed. Therefore, there is a need to address RTN in analog and MLC non-volatile memory devices, such as split gate memory cell 10, without limitation, to compensate for post-program RTN.
The aforementioned problems and needs are addressed by a memory device that comprises a plurality of non-volatile memory cells each comprising a first gate, and a control circuitry. The control circuitry is configured to:
A method of programming a selected non-volatile memory cell of a plurality of non-volatile memory cells, wherein each of the plurality of non-volatile memory cells includes a first gate, the method comprising:
Other objects and features will become apparent by a review of the specification, claims and appended figures.
The present examples illustrate a technique for compensating RTN after programming of non-volatile memory cells, such as the split gate memory cell 10 of
The memory cell programming and post-program tuning techniques are implemented as part of the configuration of the control circuitry 66, which controls the various device elements for the memory array, which can be better understood from the architecture of an example memory device as illustrated in
The post-program tuning technique involves the control circuitry 66 implementing memory cell initial programming, followed by post-program tuning for memory cells that exhibit an intolerable level of read current instability after initial programming. Memory cell programming is described first, followed by post-program tuning. Thus, control circuitry 66 may be loaded with software, i.e. non-transitory electronically readable instructions, or firmware, to perform the methods described below in relation to
Memory cell programming involves programming a selected memory cell to an initial programming state using programming voltage pulses, with intervening read operations to measure a threshold voltage parameter (i.e., a minimum voltage applied to the split gate memory cell 10 to achieve a predetermined level of source/drain current, referred to as a target current Itarget) for the memory cell. The threshold voltage parameter is a control gate threshold voltage Vtcg, which is the threshold voltage of the memory cell as viewed from the control gate 22 (also referred to herein as the first gate). Specifically, the control gate threshold voltage Vtcg is the voltage placed on the control gate 22 that results in the channel region 18 being a conducting path, and therefore results in a read current through the channel of the predetermined level of source/drain current, also known as the target current (Itarget) (e.g., 1 μA) to consider the memory cell turned on when the read potentials of a read operation are applied to the select gate 24 and drain region 16. The control gate threshold voltage Vtcg varies as a function of programming state of the split gate memory cell 10, but it is desired that once the split gate memory cell 10 is programmed to a particular programming state, any variation of control gate threshold voltage Vtcg over time be below a predetermined amount.
Initial memory cell programming is illustrated as Steps 1-4 in
However, if the programmed memory cell exhibits RTN after programming is completed, then electron(s) captured in interface trap(s) contribute to the measured control gate threshold voltage Vtcg of the memory cell as part of programming. If/when the electron(s) are emitted from the interface trap(s) after programming has ended, then the control gate threshold voltage Vtcg could drop by more than ΔVtcgmax below the target control gate threshold voltage Vtcgtarget, where ΔVtcgmax is the maximum tolerable read error in terms of control gate threshold voltage Vtcg variation. A control gate threshold voltage drop by more than ΔVtcgmax is considered to be an intolerable error during subsequent read operations. Therefore, post-program tuning begins with Step 5 in
In Step 6, the split gate memory cell 10 is read (also referred to herein as a first read operation) using a control gate voltage Vcg that is less than the target control gate threshold voltage Vtcgtarget used in Step 2. Specifically, the control gate voltage Vcg used for this read operation is Vtcgtarget−ΔVtcg, where ΔVtcg can be, but need not be, the maximum tolerable deviation of control gate threshold voltage (ΔVtcgmax). As a non-limiting example, ΔVtcg can be, for example, 20 mV. In Step 7, it is determined from the read operation of Step 6 whether or not the read current Lead is greater than the target read current Itarget. Read current Iread for Step 6 is also referred to herein as the first read current. If the memory cell does not exhibit post-program intolerable RTN, then the small decrease in control gate voltage Vcg by ΔVtcg during the read operation of Step 6 should lower the read current Lead below, or further below, Itarget, and the determination of Step 7 should be no, i.e. negative. In that case, the memory cell can be considered properly programmed and no post-program tuning is needed. However, as indicated in optional Step 8, Steps 6 and 7 can be repeated one or more times (where the repeated read operation is also referred to herein as a second read operation), whereby the memory cell will be subjected to another round of programming, as will be described below, if there is a positive determination in Step 7 no matter how many previous negative determinations occurred. Repeating Steps 6-7 even if the result in Step 7 is initially negative is advantageous because an electron may not necessarily be emitted from the trap before the first read, but could be emitted from the trap after the first read, and a yes, or positive, determination in Step 7 can occur in subsequent read operations if there is an electron emission after the first read operation.
If the memory cell does exhibit intolerable RTN, and if before or during this read operation there is interface trap electron emission, then the control gate threshold voltage Vtcg of the memory cell will drop, resulting in a rise in read current Iread. If that rise in current exceeds Itarget, then the determination of Step 7 will be yes, i.e. positive, and the selected split gate memory cell 10 is subjected to another round of programming starting at Step 9, where the maximum control gate program voltage Vcgprogram ram value stored in Step 5, i.e. in RAM 70 (or other memory) is retrieved. The retrieved control gate program voltage Vcgprogram ram value is increased in preparation for use in programming (see Step 10) (e.g., by determining a control gate program voltage Vcgprogram ram of increased value, also referred to herein as the second value), and the determined increased control gate program voltage Vcgprogram ram value is stored in RAM 70 (or other memory) (see Step 11). The memory cell is then programmed in Step 12 (similar to Step 1 described above) using the increased control gate program voltage Vcgprogram ram value. The process then reverts back to Step 6, where the memory cell is once again read as described above with respect to Step 6, followed by the determination of Step 7 as described above. If the subsequent determination in Step 7 is yes, i.e. positive, Steps 9-12 are performed again, followed by another read in Step 6 and determination in Step 7. If the subsequent determination in Step 7 is no, i.e. negative, post program tuning can end, or, steps 6-7 can be repeated one or more times as indicated in optional Step 8, even though Steps 9-12 may have been performed one or more times. There is no limitation on the number of read and determination operations (Steps 6-7) and on the number of rounds of programming (Steps 9-12). The number of times that Steps 6-7 and 9-12 are repeated can be user defined by taking into account desired programming time. The post-programing tuning process can also be repeated at a time after a previous instance of post-programming tuning, in which case the increased control gate program voltage Vcgprogram ram value can be stored in a more permanent memory such as a hard drive or other non-volatile storage, accessible by control circuitry 66, for longer term storage.
The advantage of the above described technique is that if the memory cell exhibits intolerable RTN after programming is initially completed, then it will still end up being more deeply programmed (i.e. exhibit a higher control gate threshold voltage Vtcg) than would otherwise be the case, so that the control gate threshold voltage Vtcg will not vary from the target control gate threshold voltage Vtcgtarget by an undesired amount. By utilizing the above described technique, even if electron emission occurs, it is less likely that the control gate threshold voltage Vtcg of the split gate memory cell 10 will drop below the target control gate threshold voltage Vtcgtarget by an amount exceeding the tolerance level of ΔVtcg. This is because the split gate memory cell 10 is more deeply programmed above Vtcgtarget and future read operations will more accurately reflect the desired programming state of the memory cell within the tolerance level of ΔVtcg variations.
It is to be understood that the above is not limited to the examples(s) described above and illustrated herein but encompasses any and all variations falling within the scope of any claims. For example, any references to the examples or invention herein are not intended to limit the scope of any claim or claim term, but instead merely relate to one or more features that may be covered by one or more of the claims. Materials, processes and numerical examples described above are examples only, and should not be deemed to limit the claims. Further, as is apparent from any claims and the specification, not all method steps need be performed in the exact order illustrated or claimed unless specified. The example of threshold voltage Vtcg used in the above described techniques is the threshold voltage of the memory cell as viewed from the control gate 22. However, the above described techniques could be implemented with respect to threshold voltage Vt as viewed from any one or more gates in the split gate memory cell 10 that is not floating. Additionally, the descriptions above could be implemented in an array of memory cells with fewer gates than those in
This application claims the benefit of U.S. Provisional Application No. 63/196,130, filed Jun. 2, 2021, and which is incorporated herein by reference.
Number | Name | Date | Kind |
---|---|---|---|
5029130 | Yeh | Jul 1991 | A |
6747310 | Fan et al. | Jun 2004 | B2 |
6855980 | Wang et al. | Feb 2005 | B2 |
7315056 | Klinger | Jan 2008 | B2 |
7868375 | Liu et al. | Jan 2011 | B2 |
8711636 | Do et al. | Apr 2014 | B2 |
8908441 | Dutta et al. | Dec 2014 | B1 |
20020036925 | Tanzawa | Mar 2002 | A1 |
20040246798 | Guterman | Dec 2004 | A1 |
20050083735 | Chen et al. | Apr 2005 | A1 |
20080175055 | Kim | Jul 2008 | A1 |
20090296471 | Goda | Dec 2009 | A1 |
20100259979 | Jia | Oct 2010 | A1 |
20120008389 | Kim | Jan 2012 | A1 |
20120113714 | Choy | May 2012 | A1 |
20120269004 | Kim et al. | Oct 2012 | A1 |
20130039130 | Lee | Feb 2013 | A1 |
20140082440 | Ho | Mar 2014 | A1 |
20160019948 | Pang et al. | Jan 2016 | A1 |
20160077912 | Mateescu | Mar 2016 | A1 |
20160293271 | Won | Oct 2016 | A1 |
20170206981 | Nafziger | Jul 2017 | A1 |
20170337466 | Bayat | Nov 2017 | A1 |
20190139602 | Tiwari | May 2019 | A1 |
20200065023 | Markov et al. | Feb 2020 | A1 |
20210019608 | Tran et al. | Jan 2021 | A1 |
20210065837 | Markov et al. | Mar 2021 | A1 |
20220051739 | Hwang | Feb 2022 | A1 |
Number | Date | Country |
---|---|---|
2003187588 | Jul 2003 | JP |
Entry |
---|
U.S. Appl. No. 16/915,289, filed Jun. 29, 2020 entitled “Method of Improving Read Current Stability in Analog Non-Volatile Memory by Program Adjustment for Memory Cells Exhibiting Random Telegraph Noise,” Markov, et al. |
Negative bias temperature instability: What do we understand? by Dieter K. Schroder, in Microelectronics Reliability 47 (2007) 841-852, Department of Electrical Engineering and Center for Solid State Electronics Research, Arizona State University, Tempe, AZ 85287-5706, USA. |
PCT Search Report and Written Opinion dated May 3, 2021for PCT Patent Application No. US 2021/017007 filed on Feb. 8, 2021. |
Taiwanese Office Action mailed on May 31, 2023 corresponding to the related Taiwanese Patent Application No. 111119037. |
Number | Date | Country | |
---|---|---|---|
20220392543 A1 | Dec 2022 | US |
Number | Date | Country | |
---|---|---|---|
63196130 | Jun 2021 | US |