Number | Name | Date | Kind |
---|---|---|---|
4204894 | Komeda et al. | May 1980 | |
4209350 | Ho et al. | Jun 1980 | |
4240845 | Esch et al. | Dec 1980 | |
4502202 | Malhi | Mar 1985 | |
4546535 | Shepard | Oct 1985 | |
4597824 | Shinada et al. | Jul 1986 | |
4603468 | Lam | Aug 1986 | |
4628589 | Sundaresan | Dec 1986 | |
4837179 | Foster et al. | Jun 1989 | |
4912061 | Nasr | Mar 1990 | |
4996168 | Ozaki et al. | Feb 1991 | |
5024959 | Pfiester | Jun 1991 | |
5032532 | Mori et al. | Jul 1991 | |
5179034 | Mori et al. | Jan 1993 | |
5262339 | Mori et al. | Nov 1993 | |
5324686 | Tsunashima | Jun 1994 | |
5434444 | Yoshitomi et al. | Jul 1995 |
Number | Date | Country |
---|---|---|
0273918 | Nov 1989 | DEX |
4211999 | Oct 1992 | DEX |
5444482 | Apr 1979 | JPX |
0074681 | Apr 1985 | JPX |
0043477 | Mar 1986 | JPX |
0001939 | Jan 1990 | JPX |
0365327 | Dec 1992 | JPX |
Entry |
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C. S. Oh et al.; "Simultaneous Formation of Shallow-Deep Stepped Source/Drain for Sub-Micron CMOS", 1988. |
Tomohisa Mizuno et al.; "Si.sub.3 N.sub.4 /SiO.sub.2 Spacer Induced High Reliability in LDDMOSFET and Its Simple Degradation Model", 1988 International Electron Devices Meeting, Dec. 1988. |