Number | Date | Country | Kind |
---|---|---|---|
5-274191 | Nov 1993 | JP | |
5-312747 | Nov 1993 | JP | |
6-162028 | Jul 1994 | JP |
This is a continuation of Ser. No. 08/333,320 filed Nov. 2, 1994 and now U.S. Pat. No. 6,033,928.
Number | Name | Date | Kind |
---|---|---|---|
4604637 | R{umlaut over (u)}hle | Aug 1986 | |
5102832 | Tuttle | Apr 1992 | |
5110760 | Hsu | May 1992 | |
5112773 | Tuttle | May 1992 | |
5204280 | Dhong et al. | Apr 1993 | |
5227322 | Ko et al. | Jul 1993 | |
5240558 | Kawasaki et al. | Aug 1993 | |
5244828 | Okada et al. | Sep 1993 | |
5244842 | Cathey et al. | Sep 1993 | |
5256587 | Jun et al. | Oct 1993 | |
5308786 | Lur et al. | May 1994 | |
5427974 | Lur et al. | Jun 1995 | |
5427977 | Yamada et al. | Jun 1995 | |
5466626 | Armacost et al. | Nov 1995 |
Number | Date | Country |
---|---|---|
32 10 086 | Sep 1983 | DE |
43 01 940 | Jul 1993 | DE |
0 544 408 | Jun 1993 | EP |
0 567 748 | Nov 1993 | EP |
57-74720 | Aug 1982 | JP |
58-213482 | Mar 1984 | JP |
59-205774 | Mar 1985 | JP |
4-356977 | Dec 1992 | JP |
5-37013 | Feb 1993 | JP |
5-37012 | Feb 1993 | JP |
5055627 | May 1993 | JP |
5-37000 | Jun 1993 | JP |
5-206514 | Aug 1993 | JP |
5-251725 | Sep 1993 | JP |
9109420 | Jun 1991 | WO |
Entry |
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“Si Columns for Light Emission Study”, by H.I. Liu et al., J. Vac. Sci. Technol, B 10(6) (1992) 2846. |
“A Study of the Morphology . . . of LPCUD Si”, by E. G. Lee et al., J. Mater. Sci., 28 (1993) 6279. |
“ . . . Capacitors with a Rough Electrode”, by Y. Mayashide et al., Jpn. J. Appl. Phys., 29 (12) (1990) L2345. |
“Visible Luminescence From One and Two Dimensional . . . ”, by A.G. Nassiopoulos et al., App. Phys. Lett., 66 (9) (1995) 1114. |
“Silicon Quantum Wires Oxidation and Transport Studies”, by Liu et al., Materials Science and Devices Symposium Proceedings, vol. 283, pp. 57-63, Nov. 1992. |
“GaAs Free-Standing Quantum-Size Wires”, by Hiruma et al., Journal of Applied Physics, vol. 74, No. 5, pp. 3162-3171, Sep. 1993. |
“Hemispherical Grain Silicon for High Density DRAMs”, by Watanabe et el., Solid State Technology, vol. 35, No. 7, pp. 29-33, Jul. 1992. |
“Process Technique—From Two-Dimension to Three-Dimension”, by Integrated Circuit Research of Tokyo Shibaura Denki Ltd. Research Chief of Staff Masahiro Kashiwagi, pp. 75-82. (No date). |
Number | Date | Country | |
---|---|---|---|
Parent | 08/333320 | Nov 1994 | US |
Child | 09/499735 | US |