The above and other objects, features and advantages of the present invention will become apparent from the following description of preferred embodiments given in conjunction with the accompanying drawings, in which:
Hereinafter, a preferred embodiment of the present invention is described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiment disclosed below, and it can be embodied in various forms. The described embodiment illustrates the complete scope of the present invention to those skilled in the art.
Referring to
Referring to
In the present invention, the low dielectric layer 109 is formed by spin on dielectric (SOD) deposition or by chemical vapor deposition (CVD) using fluorinated silicate glass having a dielectric constant value of 3.2 to 3.6, hydrogen polysilozane having a dielectric constant value of approximately 3.5, hydrogen silsesquioxane having a dielectric constant value of 2.8 to 3.0, methyl silsesquioxane having a dielectric constant value of approximately 2.7, organo silicate glass having a dielectric constant value of 2.8 to 3.0, or organo aromatic polymers having a dielectric constant value of 2.6 to 2.9. The low dielectric layer has a thickness of 500 Å to 5,000 Å.
In the present invention, the heat treatment process is performed for 30 seconds to 300 seconds at a temperature of 100° C. to 150° C. under an atmosphere of any one of air, argon (Ar), and helium (He).
In the present invention, the ultraviolet (UV) treatment process is performed at a temperature of 300° C. to 400° C., with an ultraviolet electric power of 10 mW/cm2 to 20 mW/cm2, with a wafer-lamp distance of 50 mm to 200 mm, at a pressure of 0.1 Torr to 0.5 Torr, with a process time of 100 seconds to 500 seconds, and with an inflow gas at a rate of 10 cc/min to 100 cc/min. The inflow gas includes nitrogen (N2), oxygen (O2), or mixtures thereof.
In the present invention, the curing process is performed at a temperature of 300° C. to 500° C., under a steam atmosphere including water (H2O) and oxygen (O2), and with a process time of 30 minutes to 120 minutes.
Referring to
Additionally, the ultraviolet treatment process or the curing process can be performed a second time after etching the low dielectric layer 109 to improve the quality of the residual lower dielectric layer 109A. The conditions of the ultraviolet treatment process and the curing process are the same as those previously described.
Referring to
As described above, the present invention can improve the rate of change of the threshold voltage caused by the electrical effect between the cell gate patterns by filling the gaps adjacent the gate patterns in the flash memory cell with the low dielectric material.
Also, in the present invention, the spacer formed for applying the SAC method is a single spacer (i.e., not a dual spacer) formed on one side wall of the gate pattern for the select transistor. Accordingly, the contact area is increased so that the contact resistance can be decreased.
Although the technical spirit of the present invention has been concretely described in connection with the preferred embodiment, the scope of the present invention is not limited by the specific embodiments but should be construed by the appended claims. Further, it should be understood by those skilled in the art that various changes and modifications can be made thereto without departing from the scope of the present invention.
Number | Date | Country | Kind |
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KR 2006-60500 | Jun 2006 | KR | national |
KR2006-113185 | Nov 2006 | KR | national |