Claims
- 1. A method of manufacturing a magnetic pattern comprising the steps of:
- coating a substrate selectively with a metal film by photoetching;
- forming a plurality of grooves in said substrate by dry etching, said grooves being arranged in accordance with predetermined patterns;
- filling said grooves with a magnetic substance; and
- magnetizing all of said magnetic substance by a magnetic field covering all the magnetic substance after said filling step.
Priority Claims (3)
Number |
Date |
Country |
Kind |
3-34935 |
Mar 1991 |
JPX |
|
3-99354 |
May 1991 |
JPX |
|
3-99355 |
May 1991 |
JPX |
|
Parent Case Info
This is a continuation of application Ser. No. 08/136,288, filed Oct. 15, 1993, now abandoned, which is a division of application Ser. No. 08/011,791, filed Feb. 1, 1993, now U.S. Pat. No. 5,336,586, which is a division of application Ser. No. 07/842,057, filed Feb. 26, 1992 now U.S. Pat. No. 5,350,618.
US Referenced Citations (8)
Foreign Referenced Citations (6)
Number |
Date |
Country |
0120990 |
Oct 1984 |
EPX |
61-00910 |
May 1986 |
JPX |
61-087206 |
May 1986 |
JPX |
63-298705 |
Dec 1988 |
JPX |
63-298705 |
Dec 1988 |
JPX |
8809979 |
Dec 1988 |
WOX |
Non-Patent Literature Citations (5)
Entry |
Extended Abstracts, vol. 82, No. 2, "Magneto Resistive Ni.sub.80 Fe.sub.20 Sensor Made by R.I.E. and sputtering Techniques", van de Hoek et al. (Oct. 1982). |
Abstract of JP 59-188519, "Magnetism Developing Body", Kawakami et al, Oct. 1984. |
Patent Abstracts of Japan, vol. 10, No. 217 (E-423) (2273) Jul. 1986, Abstract of JP 61-054857. |
English Language Abstract of JP 61-100910, "Manufacture of Permanent Magnet", Yamada (May 1986). |
Patent Abstracts of Japan, vol. 10, No. 279 (E-439) (2335) 20 Sep. 1986. |
Divisions (2)
|
Number |
Date |
Country |
Parent |
11791 |
Feb 1993 |
|
Parent |
842057 |
Feb 1992 |
|
Continuations (1)
|
Number |
Date |
Country |
Parent |
136288 |
Oct 1993 |
|