Number | Date | Country | Kind |
---|---|---|---|
59-32830 | Feb 1984 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
3330696 | Ullery et al. | Jul 1967 | |
3584183 | Chiaretta et al. | Jun 1971 | |
3649806 | Konig | Mar 1972 | |
4217570 | Holmes | Aug 1980 | |
4288776 | Holmes | Sep 1981 | |
4413020 | McKee et al. | Nov 1983 | |
4462150 | Nishimura et al. | Jul 1984 | |
4503315 | Kamioka et al. | Mar 1985 | |
4523372 | Balda et al. | Jun 1985 |
Number | Date | Country |
---|---|---|
0025347 | Mar 1981 | EPX |
0083211 | Jul 1983 | EPX |
58-47596 | Oct 1983 | JPX |
2098300 | Nov 1982 | GBX |
Entry |
---|
Kristoff et al., "Process for Ething Self-Aligned Concentric Vial Contact Holes", IBM Tech. Disc. Bull., vol. 22, No. 12, May 1980, pp. 5321-5322. |
Braslav et al., "Laser Engineering Change Capability for Microcircuit Metallurgy", IBM Tech. Disc. Bull., vol. 21, No. 9, Feb. 1979, pp. 3838-3839. |
IBM Technical Disclosure Bulletin, vol. 23, No. 10, Mar. 1981. |