This is a division of application Ser. No. 08/292,897 filed Aug. 19, 1994, now U.S. Pat. No. 5,596,194.
Number | Name | Date | Kind |
---|---|---|---|
4275286 | Hackett | Jun 1981 | |
4724318 | Binning | Feb 1988 | |
4806755 | Duerig et al. | Feb 1989 | |
5085070 | Miller et al. | Feb 1992 | |
5140164 | Talbot et al. | Aug 1992 | |
5209117 | Bennett | May 1993 | |
5241862 | Abbink et al. | Sep 1993 | |
5265470 | Kaiser et al. | Nov 1993 | |
5275047 | Zabler et al. | Jan 1994 | |
5285686 | Peters | Feb 1994 | |
5290102 | Kaiser et al. | Mar 1994 | |
5293781 | Kaiser et al. | Mar 1994 | |
5315247 | Kaiser et al. | May 1994 | |
5377545 | Norling et al. | Jan 1995 | |
5431051 | Biebl et al. | Jul 1995 | |
5438870 | Zabler et al. | Aug 1995 |
Number | Date | Country |
---|---|---|
03 101127 | Apr 1991 | EPX |
0 619 494 | Oct 1994 | EPX |
40 32 559 | Apr 1992 | DEX |
59-171141 | Jan 1985 | JPX |
4-369418 | Dec 1992 | JPX |
Entry |
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Kobayashi et al, "An Integrated Lateral Tunneling Unit", Micro Electro Mechanical Systems, US, New York, IEEE, Feb. 4-7 1992, pp. 214-219. |
T. W. Kenny, et al., "Micromachined tunneling displacement transducers for physical sensors", Journal of Vacuum Science & Technology, Jul./Aug., 1993, pp. 797-802. |
W. J. Kaiser, et al. "Tunnel-Effect Displacement Sensor", NTIS Tech Notes, Apr., 1990. |
T. W. Kenney et al., "Micromachined silicon tunnel sensor for motion detection," Applied Phys. Lett 58 (1), 7 Jan. 1991, pp. 100-102. |
Number | Date | Country | |
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Parent | 292897 | Aug 1994 |