Number | Name | Date | Kind |
---|---|---|---|
2619414 | Heidenreich | Nov 1952 | |
3156596 | Sullivan | Nov 1964 | |
3262825 | Fuller | Jul 1966 | |
3577286 | Berkenblit et al. | May 1971 | |
3629023 | Strehlow | Dec 1971 | |
3869324 | Basi et al. | Mar 1975 | |
3969164 | Cho | Jul 1976 | |
4184908 | Lackner et al. | Jan 1980 |
Entry |
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RCA Review, vol. 39, Jun. 1978, Chemical Etching of Silicon, Germanium, Gallium Arsenide, and Gallium Phosphide by W. Kern, pp. 278-308. |
Journal of the Electrochemical Society, vol. 123, No. 12, Dec. 1976, Chemical Etching of Silicon by B. Schwartz et al., pp. 1903-1909. |