Number | Name | Date | Kind |
---|---|---|---|
4333794 | Beyer et al. | Jun 1982 | |
4366613 | Ogura et al. | Jan 1983 | |
4463493 | Momose | Aug 1984 | |
4465532 | Fukano | Aug 1984 | |
4478655 | Nagakubo et al. | Oct 1984 | |
4502914 | Trumpp et al. | Mar 1985 | |
4551911 | Sasaki et al. | Nov 1985 | |
4650544 | Erb et al. | Mar 1987 |
Entry |
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R. D. Rung; "Trench Isolation Prospects for Application in CMOS VLSI", International Electron Devices Meeting Technical Digest, Dec. 1984, pp. 574-577. |