This application is a continuation of prior application Ser. No. 08/268,345, filed Jun. 29, 1994, now abandoned.
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5112766 | Fujii et al. | May 1992 | |
5118382 | Cronin et al. | Jun 1992 | |
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5270263 | Kim et al. | Dec 1993 | |
5284549 | Barnes et al. | Feb 1994 | |
5381046 | Cederbaum et al. | Jan 1995 | |
5451543 | Woo et al. | Sep 1995 |
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60-136267 | Jul 1985 | JPX |
62-272571 | Nov 1987 | JPX |
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01244666 | Sep 1989 | JPX |
Entry |
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S. Wolf, "Silicon Processing for the VLSI Era, vol. 1", Lattice Press, pp. 182-185, 191-194, 1986. |
S. Wolf, "Silicon Processing for the VLSI Era, vol. 2", Lattice Press, 1986, pp. 555-556. |
S. Wolf, "Silicon Processing for the VLSI Era, vol. 2", Lattice Press, 1990, pp. 124-125. |
S. Subbanna et al., "A Novel Borderless Contact/Interconnect Technology Using Aluminum Oxide Etch Stop for High Performance SRAM and Logic", IEEE, 1993, pp. 441-444. |
R.D.J. Verhaar et al., "A 25 .mu.m2 Bulk Full CMOS SRAM Cell Technology with Fully Overlapping Contacts", IEEE, 1990, pp. 473-476. |
Number | Date | Country | |
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Parent | 268345 | Jun 1994 |