Patent Application
20250003073
The present disclosure generally relates to a method and apparatus for a valve assembly. More particularly, the present disclosure relates to a valve assembly used in a semiconductor manufacturing tool.
A valve assembly may be used to pulse chemistry and/or an inert gas into a reaction chamber. The valve assembly may also be configured to mix multiple chemistries prior to flowing the chemistry into the reaction chamber. Some thermal ALD (atomic layer deposition) reactions may be limited or difficult to achieve by only thermal means. Accordingly, it may be desired to activate molecules in the chemistry to enhance the reactivity of the chemistry prior to flowing the chemistry into the reaction chamber. It may also be desired to generate OH radicals to enhance active surface sites on the wafer.
Various embodiments of the present technology may provide a valve assembly that activates chemistry using UV light. The valve assembly includes a primary valve manifold connected to secondary valve manifolds. A transparent connector may be disposed between the primary valve manifold and the secondary valve manifold. A UV light may be disposed adjacent to the transparent connector.
According to one aspect, an apparatus comprises: a primary valve manifold, comprising: a main channel; a first sub-channel comprising a first end connected to the main channel at a connection point and a second end; and a second sub-channel comprising a third end connected to the main channel and the first sub-channel at the connection point and a fourth end; a first connector connected to the valve manifold and comprising a first gas channel, wherein the first connector is formed from a transparent material; a first ultraviolet (UV) light source adjacent to the first connector; and a first secondary manifold connected to the first connector and comprising a first plurality of inlets connected to a second gas channel.
In one embodiment of the above apparatus, the first gas channel is connected to the second end of the first sub-channel.
In one embodiment of the above apparatus, the first gas channel is connected to the second gas channel.
In one embodiment, the above apparatus further comprises a second connector connected to the primary valve manifold and comprising a third gas channel, wherein the second connector is formed from a transparent material.
In one embodiment, the above apparatus further comprises a second secondary manifold connected to the second connector and comprising a fourth gas channel connected and a second plurality of inlets connected to the fourth gas channel.
In one embodiment of the above apparatus, an inlet from the first plurality of inlets is configured to couple to a first source vessel containing a first chemistry and an inlet from the second plurality of inlets is configured to couple to a second source vessel containing a second chemistry, wherein the first chemistry is different from the second chemistry.
In one embodiment, the above apparatus further comprises a second UV light source adjacent to the second connector.
In one embodiment of the above apparatus, the second UV light source is positioned to radiate a UV light into the third gas channel.
In one embodiment of the above apparatus, the first UV light source is positioned to radiate a UV light into the first gas channel.
In one embodiment of the above apparatus, the transparent material is one of quartz or sapphire.
An apparatus, comprising: a primary valve manifold, comprising: a main channel; a first sub-channel comprising a first end connected to the main channel at a connection point and a second end; and a second sub-channel comprising a third end connected to the main channel and the first sub-channel at the connection point and a fourth end; a shield formed from a transparent material and disposed adjacent to the connection point; a light source adjacent to the transparent shield and positioned to radiate a light into the connection point; a first connector connected to the valve manifold and comprising a first plurality of inlets connected to the first sub-channel via a first gas channel; and a first secondary manifold connected to the primary valve manifold and comprising a second plurality of inlets connected to the second sub-channel via a second gas channel.
In one embodiment, the above apparatus further comprises a third gas channel connected to the main channel at the connection point and adjacent to the transparent shield.
In one embodiment of the above apparatus, the transparent material is one of quartz or sapphire.
In one embodiment of the above apparatus, the light source comprises an infrared light source.
In one embodiment of the above apparatus, the light source comprises an ultraviolet light source.
An apparatus, comprising, a valve manifold comprising a first gas channel, the first gas channel comprising: a main channel; a first sub-channel comprising a first end connected to the main channel at a connection point and a second end; and a second sub-channel comprising: a third end connected to the main channel and the first sub-channel at the connection point; and a fourth end; a first multi-port valve coupled to the second end of the first sub-channel; a first cell having an interior volume and sidewalls formed from a transparent material and, the first cell comprising: a first inlet; and a first outlet coupled to the first multi-port valve; and a first ultraviolet light source adjacent to the first cell.
In one embodiment of the above apparatus, the transparent material is one of quartz or sapphire.
In one embodiment, the above apparatus further comprises: a second multi-port valve coupled to the fourth end of the second sub-channel; and a second cell formed from the transparent material and comprising: a second inlet; and a second outlet coupled to the second multi-port valve; and a second ultraviolet light source adjacent to the second cell.
In one embodiment of the above apparatus, one port from the first multi-port valve is coupled to an inert gas source; and one port from the second multi-port valve is coupled to the inert gas source.
In one embodiment, the above apparatus further comprises: a first vessel coupled to the first cell, wherein the first vessel is configured to contain a first chemistry; and a second vessel coupled to the second cell, wherein the second cell is configured to contain a second chemistry that is different from the first chemistry.
A more complete understanding of the present technology may be derived by referring to the detailed description when considered in connection with the following illustrative figures. In the following figures, like reference numbers refer to similar elements and steps throughout the figures.
The present technology may be described in terms of functional block components and various processing steps. Such functional blocks may be realized by any number of components configured to perform the specified functions and achieve the various results. For example, the present technology may employ various reaction chambers, susceptors, valves, vessels, precursors, showerhead plate, and delivery lines.
Referring to
The system 100 may further comprise a first vessel 135 configured to contain or hold a first chemistry (e.g., a precursor or a reactant) used in a semiconductor manufacturing process. The first chemistry in the first vessel 135 may be in a solid, liquid, or gas phase initially. In the case of a solid or a liquid chemistry, the solid or liquid may be converted to a gas phase. For example, the first vessel 135 may comprise various devices and/or systems to convert a solid or a liquid to a gas. The conversion to a gas phase may occur within the first vessel 135.
The system 100 may further comprise a second vessel 155 configured to contain or hold a second chemistry (e.g., a precursor or a reactant) used in a semiconductor manufacturing process. The second chemistry may be different from the first chemistry. The second chemistry in the second vessel 155 may be in a solid, liquid, or gas phase initially. In the case of a solid or a liquid chemistry, the solid or liquid may be converted to a gas phase. For example, the second vessel 155 may comprise various devices and/or systems to convert a solid or a liquid to a gas. The conversion to a gas phase may occur within the second vessel 155.
The system 100 may further comprise a third vessel 140 configured to contain or hold an inert gas.
In addition, the system 100 may further comprise a first gas line 145 to transport the gas from the first vessel 135 to the reactor 105 via the valve assembly 115. For example, the gas line 145 may be coupled to the first vessel 135 at a first end and to the valve assembly 115 at a second end.
In addition, the system 100 may further comprise a second gas line 150 to transport the gas from the second vessel 155 to the reactor 105 via the valve assembly 115. For example, the gas line 150 may be coupled to the second vessel 155 at a first end and to the valve assembly 115 at the second end.
In addition, the system 100 may further comprise a third gas line 160 to transport the gas from the third vessel 140 to the reactor 105 via the valve assembly 115. For example, the third gas line 160 may be coupled to the third vessel 140 at a first end and to the valve assembly 115 at the second end.
In various embodiments, the system 100 may further comprise a susceptor 120 disposed within the reaction chamber 110 and configured to support the wafer 125. In some embodiments, the susceptor 120 may be configured to move up and down within the reaction chamber 110. In other embodiments, the susceptor 120 may be stationary.
In various embodiments, the valve assembly 115 may be configured to mix multiple gas sources prior to flowing into the reactor 105. For example, the valve assembly 115 may have multiple inlets. The valve assembly 115 may be coupled directly to the reactor 105 and may be coupled to the first and second gas lines 145, 150 and configured to receive the gas from the first and second vessels 135, 140.
In various embodiments, and referring to
In an exemplary embodiment, the valve assembly 115 may further comprise a first connector 205 comprising a first gas channel 265 extending through the first connector 205. The first connector 205 may be formed from a transparent material, such as quartz, sapphire, or the like. Accordingly, the entire first connector 205 may be completely transparent, thus allowing visibility through the outer walls of the first connector 205 and into the third gas channel 270. The first connector 205 may be connected to the primary valve manifold 280, and the first gas channel 265 may be fluidly connected to the first sub-channel 250.
The valve assembly may further comprise a first secondary manifold 215 comprising a second gas channel 260 and a first plurality of inlets connected to the second gas channel 260. The first secondary manifold 215 may formed from a metal material, such as aluminum, stainless steel, nickel-based alloys, such as Hastelloy-C22, Inconel, and the like. In various embodiments, a first inlet from the first plurality of inlets may be configured to receive a first chemistry (chemistry 1), and a second inlet from the first plurality of inlets may be configured to receive an inert gas. The first secondary manifold 215 may be connected to the first connector 205, and the second gas channel 260 may be fluidly connected to the first gas channel 265.
The valve assembly 115 may further comprise a second connector 210 comprising a third gas channel 270 extending through the second connector 210. The second connector 210 may be formed from a transparent material, such as quartz, sapphire, or the like. Accordingly, the entire second connector 210 may be completely transparent, thus allowing visibility the outer walls of the second connector 210 and into the third gas channel 270. The second connector 210 may be connected to the primary valve manifold 280, and the third gas channel 270 may be fluidly connected to the second sub-channel 255.
The valve assembly 115 may further comprise a second secondary manifold 220 comprising a fourth gas channel 275 and a second plurality of inlets connected to the fourth gas channel 275. The second secondary manifold 220 may formed from a metal material, such as aluminum, stainless steel, nickel-based alloys, such as Hastelloy-C22, Inconel, and the like. In various embodiments, a first inlet from the second plurality of inlets may be configured to receive a second chemistry (chemistry 2), wherein the second chemistry is different from the first chemistry. A second inlet from the second plurality of inlets may be configured to receive the inert gas. The second secondary manifold 220 may be connected to the second connector 210, and the fourth gas channel 275 may be fluidly connected to the third gas channel 270.
In an exemplary embodiment, and referring to
Similarly, the second cell 305 may be connected to the primary valve manifold 280 via a second valve 315. For example, the second cell 305 may comprise an outlet connected to the second valve 315 and the second valve 315 may be connected to the second sub-channel 255. The second valve 315 may comprise a diaphragm valve or any other suitable valve. The second cell 305 may comprise a plurality of inlets, wherein one inlet is configured to receive the second chemistry and another inlet is configured to receive the inert gas. The second cell 305, in particular, the sidewalls, may be formed from a transparent material, such as quartz, sapphire, or the like. Accordingly, the second cell 305 may be transparent, thus allowing visibility through sidewalls and into the interior volume.
In various embodiments, the first and second valves 310, 315 may be responsive to and operated by a controller (not shown), processor, or other suitable control system. Accordingly, the controller may be configured to generate and transmit control signals to the valves 310, 315 to open or close the valve.
In various embodiments, and referring to
In various embodiments, and referring to
In various embodiments, the valve assembly 115 may further comprise a light source, configured to radiate an ultraviolet (UV) light or an infrared (IR) light. Accordingly, the light source may comprise a UV light source or an IR light source. For example, the valve assembly 115 may comprise a first light source 225 and a second light source 230. In one embodiment, and referring to
In an alternative embodiment, and referring to
Similarly, the second light source 230 may be disposed adjacent to the second cell 305 and positioned to radiate light into the second cell 305.
In various embodiments, the valve assembly 115 may further comprise a third light source 240 disposed adjacent to the shield 235 and positioned to radiate light into the connection point 285.
In various embodiments, each light source 225, 230, 240 may be coupled to and controlled according to a controller (not shown), processor, or any other suitable control system. The controller may operate (e.g., turn ON and OFF) the light source. For example, in some operations, one light source may be ON, while the others are OFF. In addition, the controller may be configured to pulse a light source from OFF to ON and back to OFF according to a desired pulsing scheme.
In various embodiments, and referring to
The showerhead plate 405 may be positioned directly above the susceptor 120 or wafer 125 (
In an exemplary embodiment, the lid 400 may be configured to provide UV and/or IR light into the plenum space 410. For example, the lid 400 may comprise a plurality of windows 420 embedded within the lid 400. The windows 420 may be formed from a transparent material, such as quartz, sapphire, or the like.
The showerhead assembly 130 may further comprise a plurality of light sources 415. The light sources 415 may be disposed along an outer surface of the lid 400 that is opposite from the plenum space 410. In some embodiments, the light sources 415 may be adhered to the outer surface of the lid 400. Alternatively, the light sources 415 may be near the outer face of the lid 400. In some embodiments, each light source 415 may be aligned with a respective window 420, such that the light from the light source 415 radiates through the window 420 and into the plenum space 410.
In some embodiments, the lid 400 may further comprise a plurality of channels 425 extending through the lid 400 and in fluid communication with the plenum space 410. The channels 425 may be connected to a gas source (such as the third vessel 140), wherein the gas source delivers an inert gas, such as argon, through the channels 425 and into the plenum space 410. In an exemplary embodiment, the gas channels 425 may be disposed adjacent to a respective window 420.
In operation, and referring to
Similarly, at the same time, or a different time as the first chemistry is flowed, the second chemistry from the second vessel 155 may be flowed into the valve assembly 115 via the second connector 210 and the second secondary manifold 220. As the second chemistry flows through the third gas channel 270 of the second connector 210, the second light source 230 may be turned ON to radiate light into the third gas channel 270 and thus, radiate the flowing second chemistry. The light from the second light source 230 may activate the second chemistry in the same manner as described above. The activated chemistry may then flow through the main channel 245 and into the showerhead assembly 130. Activating the molecules in the chemistry prior to flowing the chemistry into the reaction chamber 110 may enhance the reactivity of the chemistry and/or enhance the active surface sites on the wafer 125, thus providing improved film characteristics on the wafer 125.
Alternatively, the first and second chemistries may be flowed at the same time and thus mix together at the connection point 285. As both chemistries are flowed together, the third light source 240 may be turned ON to radiate light through the shield 235 and into the gas channels and connection point 285 and thus, radiate the flowing chemistries. In the present case, the first and second lights 225, 230 may be OFF while the first and second chemistries are flowing. The activated chemistry may then flow through the main channel 245 and into the showerhead assembly 130.
Alternatively, the first and second chemistries may be activated by multiple light sources. For example, as the first and second chemistries are flowed, the first and second lights 225, 230 may be ON to activate the respective chemistry as it flows through the first and second connectors 205, 210, respectively. In addition, the third light 240 may also be ON to activate the combination of the chemistries. The activated chemistry may then flow through the main channel 245 and into the showerhead assembly 130.
In yet another operation, and referring to
Similarly, the second chemistry may be flowed into and contained within the second cell 305. Inert gas may also be flowed at the same or a different time as the first chemistry into the second cell 305. Once the second cell 305 is filled with the second chemistry (gas) to a desired pressure or amount, the second light source 230 may be turned ON. Alternatively, the second light source 230 may be ON while the second cell 305 is filling with chemistry. The light from the second light source 230 may activate the second chemistry. In particular, the light may trigger a chemical reaction, such as photodissociation, photolysis, photodecomposition, wherein the molecules of the chemical compound interact with photons to create highly reactive radicals/molecules and/or simpler molecules/fragments that are more reactive. Activating the molecules in the chemistry prior to flowing the chemistry into the reaction chamber 110 may enhance the reactivity of the chemistry and/or enhance the active surface sites on the wafer 125, thus providing improved film characteristics on the wafer 125. Once the chemistry is activated, the second valve 315 may be opened to allow the chemistry to flow into the primary valve manifold 280 via the first sub-channel 250. For example, the controller (not shown) may transmit a signal or otherwise operate the second valve 315 to open it. The chemistry may be further activated and/or combined with the first chemistry once it reaches the connection point 285. For example, the third light source 240 may be turned ON.
In yet another operation, and referring to
In the foregoing description, the technology has been described with reference to specific exemplary embodiments. The particular implementations shown and described are illustrative of the technology and its best mode and are not intended to otherwise limit the scope of the present technology in any way. Indeed, for the sake of brevity, conventional manufacturing, connection, preparation, and other functional aspects of the method and system may not be described in detail. Furthermore, the connecting lines shown in the various figures are intended to represent exemplary functional relationships and/or steps between the various elements. Many alternative or additional functional relationships or physical connections may be present in a practical system.
The technology has been described with reference to specific exemplary embodiments. Various modifications and changes, however, may be made without departing from the scope of the present technology. The description and figures are to be regarded in an illustrative manner, rather than a restrictive one and all such modifications are intended to be included within the scope of the present technology. Accordingly, the scope of the technology should be determined by the generic embodiments described and their legal equivalents rather than by merely the specific examples described above. For example, the steps recited in any method or process embodiment may be executed in any order, unless otherwise expressly specified, and are not limited to the explicit order presented in the specific examples. Additionally, the components and/or elements recited in any apparatus embodiment may be assembled or otherwise operationally configured in a variety of permutations to produce substantially the same result as the present technology and are accordingly not limited to the specific configuration recited in the specific examples.
Benefits, other advantages and solutions to problems have been described above with regard to particular embodiments. Any benefit, advantage, solution to problems or any element that may cause any particular benefit, advantage or solution to occur or to become more pronounced, however, is not to be construed as a critical, required or essential feature or component.
The terms “comprises”, “comprising”, or any variation thereof, are intended to reference a non-exclusive inclusion, such that a process, method, article, composition or apparatus that comprises a list of elements does not include only those elements recited, but may also include other elements not expressly listed or inherent to such process, method, article, composition or apparatus. Other combinations and/or modifications of the above-described structures, arrangements, applications, proportions, elements, materials or components used in the practice of the present technology, in addition to those not specifically recited, may be varied or otherwise particularly adapted to specific environments, manufacturing specifications, design parameters or other operating requirements without departing from the general principles of the same.
The present technology has been described above with reference to an exemplary embodiment. However, changes and modifications may be made to the exemplary embodiment without departing from the scope of the present technology. These and other changes or modifications are intended to be included within the scope of the present technology, as expressed in the following claims.
This application is a nonprovisional of, and claims priority to and the benefit of, U.S. Provisional Patent Application No. 63/523,972, filed Jun. 29, 2023 and entitled “METHODS AND APPARATUS FOR A VALVE ASSEMBLY,” which is hereby incorporated by reference herein.
| Number | Date | Country | |
|---|---|---|---|
| 63523972 | Jun 2023 | US |
