Gas plumbing upstream of the reaction chamber

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CPC
C23C16/45561

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45561Gas plumbing upstream of the reaction chamber

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Vapor accumulator for corrosive gases with purging
- Patent number 12,227,842
- Issue date Feb 18, 2025
- Lam Research Corporation
- Gary Bridger Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Capacitive sensor for monitoring gas concentration
- Patent number 12,228,534
- Issue date Feb 18, 2025
- Applied Materials, Inc.
- Xiaopu Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method
- Patent number 12,209,309
- Issue date Jan 28, 2025
- Shin-Etsu Chemical Co., Ltd.
- Takenori Watabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Concentration control using a bubbler
- Patent number 12,209,310
- Issue date Jan 28, 2025
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas-phase reactor system including a gas detector
- Patent number 12,195,855
- Issue date Jan 14, 2025
- ASM IP Holding B.V.
- SungBae Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,195,853
- Issue date Jan 14, 2025
- Kokusai Electric Corporation
- Motonari Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Monolithic modular microwave source with integrated process gas dis...
- Patent number 12,191,118
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- James Carducci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature-controlled chemical delivery system and reactor system...
- Patent number 12,163,225
- Issue date Dec 10, 2024
- ASM IP Holding B.V.
- Carl Louis White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursor container
- Patent number 12,146,218
- Issue date Nov 19, 2024
- Picosun Oy
- Tom Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,148,614
- Issue date Nov 19, 2024
- Kokusai Electric Corporation
- Takuya Joda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Powder-atomic-layer-deposition device with knocker
- Patent number 12,123,092
- Issue date Oct 22, 2024
- SKY TECH INC.
- Jing-Cheng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adjustable fluid inlet assembly for a substrate processing apparatu...
- Patent number 12,110,588
- Issue date Oct 8, 2024
- Picosun Oy
- Timo Malinen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas feeding cup and a gas manifold assembly
- Patent number 12,104,248
- Issue date Oct 1, 2024
- Beneq Oy
- Pekka Soininen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for stabilizing reaction chamber pressure
- Patent number 12,098,460
- Issue date Sep 24, 2024
- ASM IP Holding B.V.
- Eiichiro Shiba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition furnace with a cleaning gas system to pro...
- Patent number 12,077,854
- Issue date Sep 3, 2024
- ASM IP Holding B.V.
- Dieter Pierreux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing device, manufacturing method for semiconductor...
- Patent number 12,062,546
- Issue date Aug 13, 2024
- Kokusai Electric Corporation
- Hidenari Yoshida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing processes to synthesize, functionalize, surface treat...
- Patent number 12,043,893
- Issue date Jul 23, 2024
- Forge Nano, Inc.
- David King
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Film forming method
- Patent number 12,037,683
- Issue date Jul 16, 2024
- Shin-Etsu Chemical Co., Ltd.
- Takenori Watabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas distribution system and reactor system including same
- Patent number 12,024,775
- Issue date Jul 2, 2024
- ASM IP Holding B.V.
- Sonti Sreeram
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for supplying gas and apparatus for processing substrate...
- Patent number 12,024,774
- Issue date Jul 2, 2024
- Jusung Engineering Co., Ltd.
- Ki Bum Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas supply apparatus, gas supply method, and substrate processing a...
- Patent number 12,024,776
- Issue date Jul 2, 2024
- Tokyo Electron Limited
- Yuji Obata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for manufacturing a thin film and a method therefor
- Patent number 12,014,922
- Issue date Jun 18, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tsai-Fu Hsiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursor source arrangement and atomic layer deposition apparatus
- Patent number 12,000,043
- Issue date Jun 4, 2024
- Beneq Oy
- Pekka Soininen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for heating a liquid
- Patent number 11,988,316
- Issue date May 21, 2024
- ASM IP Holding B.V.
- Andrew Michael Yednak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas supply apparatus, gas supply method, and substrate processing a...
- Patent number 11,987,885
- Issue date May 21, 2024
- Tokyo Electron Limited
- Yuji Obata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas supply assembly, components thereof, and reactor system includi...
- Patent number 11,976,359
- Issue date May 7, 2024
- ASM IP Holding B.V.
- Jianqiu Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dynamic precursor dosing for atomic layer deposition
- Patent number 11,970,772
- Issue date Apr 30, 2024
- Lam Research Corporation
- Purushottam Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporizer, substrate processing apparatus and method for manufactur...
- Patent number 11,970,771
- Issue date Apr 30, 2024
- Kokusai Electric Corporation
- Atsushi Morikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sequential infiltration synthesis apparatus
- Patent number 11,970,766
- Issue date Apr 30, 2024
- ASM IP Holding B.V.
- Ivo Johannes Raaijmakers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Capacitive sensor for monitoring gas concentration
- Patent number 11,959,868
- Issue date Apr 16, 2024
- Applied Materials, Inc.
- Xiaopu Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
VALVE SYSTEMS FOR BALANCING GAS FLOW TO MULTIPLE STATIONS OF A SUBS...
- Publication number 20250043421
- Publication date Feb 6, 2025
- LAM RESEARCH CORPORATION
- Michael Philip ROBERTS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DISTRIBUTION BODY FOR DISTRIBUTING A PROCESS GAS FOR TREATING A SUB...
- Publication number 20250034709
- Publication date Jan 30, 2025
- Semsysco GmbH
- Andreas Gleissner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-SUBSTRATE PROCESSING SYSTEM
- Publication number 20250034708
- Publication date Jan 30, 2025
- Applied Materials, Inc.
- Ala MORADIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR CHEMICAL PRECURSOR WITH GAS PASSAGES
- Publication number 20250027199
- Publication date Jan 23, 2025
- Applied Materials, Inc.
- David Marquardt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20250022708
- Publication date Jan 16, 2025
- Kokusai Electric Corporation
- Takuya JODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS INJECTION SYSTEM AND A WAFER PROCESSING APPARATUS USING THE SAME
- Publication number 20250019828
- Publication date Jan 16, 2025
- ASM IP HOLDING B.V.
- Vivek Upadhaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Substrate Processing Method, Method...
- Publication number 20250011930
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Kentaro GOSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
- Publication number 20250011931
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Shun MATSUI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
- Publication number 20250011929
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH PURITY MOLYBDENUM-CONTAINING PRECURSORS AND RELATED SYSTEMS AN...
- Publication number 20250003072
- Publication date Jan 2, 2025
- Entegris, Inc.
- Joseph E. Reynolds
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR A VALVE ASSEMBLY
- Publication number 20250003073
- Publication date Jan 2, 2025
- ASM IP HOLDING B.V.
- Anirudhan Chandrasekaran
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD
- Publication number 20240425981
- Publication date Dec 26, 2024
- Shin-Etsu Chemical Co., Ltd.
- Takenori WATABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS INJECTION SYSTEM FOR USE IN A PROCESSING CHAMBER
- Publication number 20240425986
- Publication date Dec 26, 2024
- ASM IP HOLDING B.V.
- Junwei Su
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MATERIAL MONITORING SYSTEM, PROCESSING APPARATUS, METHOD OF MANUFAC...
- Publication number 20240421007
- Publication date Dec 19, 2024
- Kokusai Electric Corporation
- Kentaro GOSHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BALANCING GAS FLOW TO MULTIPLE STATIONS USING HEATERS UPSTREAM OF F...
- Publication number 20240401202
- Publication date Dec 5, 2024
- LAM RESEARCH CORPORATION
- Brian RATLIFF
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOTE SOLID REFILL CHAMBER
- Publication number 20240401192
- Publication date Dec 5, 2024
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR DEPOSITION FURNACE WITH A CLEANING GAS SYSTEM TO PRO...
- Publication number 20240392435
- Publication date Nov 28, 2024
- ASM IP HOLDING B.V.
- Dieter Pierreux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM DEPOSITION WITH IMPROVED CONTROL OF PRECURSOR
- Publication number 20240384417
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Hao Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE AND METHOD FOR DISPENSING A GAS PHASE OF A SOLID PRECURSOR
- Publication number 20240368758
- Publication date Nov 7, 2024
- Air Liquide Electronics Systems
- Sonia PLAZA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATING MODULE AND PROGRAM CONTROL METHOD FOR PUMPING LINE OF SEMIC...
- Publication number 20240360551
- Publication date Oct 31, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
- Sheng-chun Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITING APPARATUS AND ATOMIC LAYER DEPOSITING METHO...
- Publication number 20240352581
- Publication date Oct 24, 2024
- NEXUSBE CO., LTD
- Hag Young CHOI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE AND SEMICONDUCTOR...
- Publication number 20240327980
- Publication date Oct 3, 2024
- Suzhou Everbright Photonics Co., Ltd.
- Yang CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND GAS SUPPLY METHOD THEREOF
- Publication number 20240309504
- Publication date Sep 19, 2024
- TES CO., LTD.
- Yeong-Been KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR HEATING A LIQUID
- Publication number 20240301980
- Publication date Sep 12, 2024
- ASM IP HOLDING B.V.
- Andrew Michael Yednak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK AND METHOD OF MANUFACTURING THE SAME
- Publication number 20240279810
- Publication date Aug 22, 2024
- TOTO LTD.
- Shunya MIYAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY SYSTEM
- Publication number 20240279808
- Publication date Aug 22, 2024
- Samsung Electronics Co., Ltd.
- Minsoo PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM PROCESSING SYSTEM AND PROCESS CONTROL
- Publication number 20240279812
- Publication date Aug 22, 2024
- VAT HOLDING AG
- Frantisek BALON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR SUPPLY APPARATUS
- Publication number 20240254623
- Publication date Aug 1, 2024
- Samsung Electronics Co., Ltd.
- Changhwan Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSOR DELIVERY SYSTEM FOR SEMICONDUCTOR DEVICE FORMATION
- Publication number 20240247374
- Publication date Jul 25, 2024
- Applied Materials, Inc.
- Shashidhara Patel H B
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBLIMATION GAS SUPPLY SYSTEM AND SUBLIMATION GAS SUPPLY METHOD WIT...
- Publication number 20240247372
- Publication date Jul 25, 2024
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Xingyong ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Gas plumbing upstream of the reaction chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Vapor accumulator for corrosive gases with purging

Capacitive sensor for monitoring gas concentration

Film forming method

Concentration control using a bubbler

Gas-phase reactor system including a gas detector

Substrate processing apparatus, method of manufacturing semiconduct...

Monolithic modular microwave source with integrated process gas dis...

Temperature-controlled chemical delivery system and reactor system...

Precursor container

Method of manufacturing semiconductor device, substrate processing...

Powder-atomic-layer-deposition device with knocker

Adjustable fluid inlet assembly for a substrate processing apparatu...

Gas feeding cup and a gas manifold assembly

Systems and methods for stabilizing reaction chamber pressure

Chemical vapor deposition furnace with a cleaning gas system to pro...

Substrate processing device, manufacturing method for semiconductor...

Manufacturing processes to synthesize, functionalize, surface treat...

Film forming method

Gas distribution system and reactor system including same

Apparatus for supplying gas and apparatus for processing substrate...

Gas supply apparatus, gas supply method, and substrate processing a...

Apparatus for manufacturing a thin film and a method therefor

Precursor source arrangement and atomic layer deposition apparatus

Methods and apparatus for heating a liquid

Gas supply apparatus, gas supply method, and substrate processing a...

Gas supply assembly, components thereof, and reactor system includi...

Dynamic precursor dosing for atomic layer deposition

Vaporizer, substrate processing apparatus and method for manufactur...

Sequential infiltration synthesis apparatus

Capacitive sensor for monitoring gas concentration

Patents Applicationslast 30 patents

VALVE SYSTEMS FOR BALANCING GAS FLOW TO MULTIPLE STATIONS OF A SUBS...

DISTRIBUTION BODY FOR DISTRIBUTING A PROCESS GAS FOR TREATING A SUB...

MULTI-SUBSTRATE PROCESSING SYSTEM

SEMICONDUCTOR CHEMICAL PRECURSOR WITH GAS PASSAGES

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

GAS INJECTION SYSTEM AND A WAFER PROCESSING APPARATUS USING THE SAME

Substrate Processing Apparatus, Substrate Processing Method, Method...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...

HIGH PURITY MOLYBDENUM-CONTAINING PRECURSORS AND RELATED SYSTEMS AN...

METHODS AND APPARATUS FOR A VALVE ASSEMBLY

FILM FORMING METHOD

GAS INJECTION SYSTEM FOR USE IN A PROCESSING CHAMBER

MATERIAL MONITORING SYSTEM, PROCESSING APPARATUS, METHOD OF MANUFAC...

BALANCING GAS FLOW TO MULTIPLE STATIONS USING HEATERS UPSTREAM OF F...

REMOTE SOLID REFILL CHAMBER

CHEMICAL VAPOR DEPOSITION FURNACE WITH A CLEANING GAS SYSTEM TO PRO...

THIN FILM DEPOSITION WITH IMPROVED CONTROL OF PRECURSOR

DEVICE AND METHOD FOR DISPENSING A GAS PHASE OF A SOLID PRECURSOR

HEATING MODULE AND PROGRAM CONTROL METHOD FOR PUMPING LINE OF SEMIC...

ATOMIC LAYER DEPOSITING APPARATUS AND ATOMIC LAYER DEPOSITING METHO...

METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE AND SEMICONDUCTOR...

SUBSTRATE PROCESSING APPARATUS AND GAS SUPPLY METHOD THEREOF

METHODS AND APPARATUS FOR HEATING A LIQUID

ELECTROSTATIC CHUCK AND METHOD OF MANUFACTURING THE SAME

GAS SUPPLY SYSTEM

VACUUM PROCESSING SYSTEM AND PROCESS CONTROL

VAPOR SUPPLY APPARATUS

PRECURSOR DELIVERY SYSTEM FOR SEMICONDUCTOR DEVICE FORMATION

SUBLIMATION GAS SUPPLY SYSTEM AND SUBLIMATION GAS SUPPLY METHOD WIT...