Number | Name | Date | Kind |
---|---|---|---|
4639288 | Price et al. | Jan 1987 | |
5231058 | Maeda et al. | Jul 1993 | |
5270267 | Ouellet | Dec 1993 | |
5286681 | Maeda et al. | Feb 1994 | |
5306671 | Ogawa | Apr 1994 | |
5312781 | Gregor et al. | May 1994 | |
5387546 | Maeda et al. | Feb 1995 | |
5393702 | Yang | Feb 1995 | |
5413963 | Yen | May 1995 | |
5472913 | Havemann | Dec 1995 | |
5494854 | Jain | Feb 1996 | |
5643407 | Chang | Jul 1997 | |
5759906 | Lou | Jun 1998 | |
5763010 | Guo et al. | Jun 1998 | |
5861345 | Chou | Jan 1999 | |
5883014 | Chen | Mar 1999 | |
5943261 | Lee | Aug 1999 | |
5970376 | Chen | Oct 1999 | |
6001747 | Annaparagada | Dec 1999 | |
6034418 | Matsuura | Mar 2000 |
Entry |
---|
Hawleys Condensed Chemical Dictionary, 12th ed., Van Nostrand Reinhold company, New York, No month 1993. |
Lee Hong, Fundamentals of Microelectronic processing, McGraw Hill, p424 (1990) No month. |