The present invention is related to a manufacture method for CMOS (Complementary Metal Oxide Semiconductor, CMOS) compatible sensor, it specifically relates to a manufacture method for CMOS compatible sensors for sensing Biological or ions concentration.
CMOS biosensor is to design biosensor with CMOS electronic device on the same chip, which is thus a process that can integrate biosensor and CMOS electronic device. However, the metal and other sensing film commonly used in the biosensor is not frequently used in general CMOS electronic device; therefore, some drawbacks are caused, for example, process design difficulty, process yield drop and process cost increase. For the prior art process of using CMOS device to prepare suspension structure, please refer to U.S. Pat. No. 6,396,368, which uses conductive metal, for example, aluminum copper, as a sacrificial layer. However, some drawbacks can be seen, for example, long etching time for lateral etching metal and the suspension height is fixed since the conductive metal is of fixed thickness. Therefore the movement stroke of suspension arm structure is then fixed and can not be utilized in several ways.
One of the objectives of the present invention is to provide a manufacture method for CMOS biosensor, more specifically, a manufacture method for CMOS sensor having suspension arm structure which allows the formation of biosensor layer needed by the biosensor on silicon dioxide or conductive metal according to the need; in the same process, suspension arm structures of different thicknesses are made according to different design; moreover, process compatible with CMOS device is used to facilitate the electronic circuit integration.
Another objective of the present invention is to provide a manufacture method for CMOS Bio-sensor comprising of: providing a substrate having multiple device structural layer; forming a protection layer to cover the substrate and those device structures; forming a first patterned photo resist layer; performing a first etching process to etch the protection layer to a first etch stop; forming a patterned molecular sensing layer; forming a third patterned photo resist layer; and performing a second etching process to etch the protection layer and the substrate to a second etch stop so as to remove the substrate part underneath part of those sensor structures.
Yet another objective of the present invention is to provide a manufacture method for CMOS sensor wherein the method of forming the patterned molecular sensing layer comprising of: forming in sequence a second patterned photo resist layer and a molecular sensing layer on the substrate; and removing the second patterned photo resist layer and part of the molecular sensing layer on top of it.
Further another objective of the present invention is to provide a manufacturing method for CMOS sensor, wherein the method of forming the patterned molecular sensing layer comprising of: forming in sequence a molecular sensing layer and a second patterned photo resist layer on the substrate; etching the molecular sensing layer; and removing the second patterned photo resist layer.
More another objective of the present invention is to provide a manufacturing method for CMOS sensor, wherein the second etching process comprising of in sequence an anisotropic etching process to etch the protection layer and an isotropic etching process to etch the substrate.
These and other objects, features and advantages of the present invention will become apparent to those skilled in the art upon consideration of the following description of the preferred embodiments of the present invention taken in conjunction with the accompanying drawings, in which:
The present invention will be described in the followings by different embodiments, and the components, arrangements and steps used to describe the content of this embodiment are only examples and are not used to limit this invention. In addition, “and/or” used in the disclosed content is for briefing purpose; the descriptions of “covering” or “above” can include the direct contact and no direct contact.
The substrate used here can be silicon substrate of single crystal, poly crystal or amorphous structure; CMOS structure can be all kinds of currently known semiconductor device or system; biosensor structure can include, for example, sensor devices used to detect Deoxyribonucleic Acid (DNA), Protein, Tissue, Cell, Ion, pH value, etc., or different sensor devices designed and manufactured according to other sensor purposes. Therefore, the structure or material of device structural layers 20, 21, 22, 23, 24, 25, 26, 27, 28 and 29 will have different designs according to the need of semiconductor device or system and biosensor structure, for example, the material could be metallic material or poly crystal material, etc.
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Although the present invention is disclosed above with better embodiment, yet it is not used to limit the present invention, anyone who is familiar with the prior art, without deviating the spirit and scope of this invention, can make any kind of change, modification and trimming; therefore, the protection scope of this invention should be based on what is claimed as state in the following.