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Forming the micromechanical structure with a CMOS process

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  • CPC
  • B81C2203/0714
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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2203/00Forming micro-structural systems

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B81C2203/0714Forming the micromechanical structure with a CMOS process
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