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Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C2203/00
Forming micro-structural systems
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B81C2203/0735
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Patents Grants
last 30 patents
Information
Patent Grant
Method and structure for CMOS-MEMS thin film encapsulation
Patent number
12,134,555
Issue date
Nov 5, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Yu-Chia Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing monolithic integration of piezoelectric microm...
Patent number
12,037,239
Issue date
Jul 16, 2024
VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro mechanical system and manufacturing method thereof
Patent number
11,851,321
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Ting-Li Yang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Heterogenous integration of complementary metal-oxide-semiconductor...
Patent number
11,845,653
Issue date
Dec 19, 2023
MERIDIAN INNOVATION PTE LTD
Wan Chia Ang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
CMOS ultrasonic transducers and related apparatus and methods
Patent number
11,833,542
Issue date
Dec 5, 2023
BFLY OPERATIONS, INC.
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Bottom electrode via structures for micromachined ultrasonic transd...
Patent number
11,806,747
Issue date
Nov 7, 2023
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
CMOS ultrasonic transducers and related apparatus and methods
Patent number
11,684,949
Issue date
Jun 27, 2023
BFLY OPERATIONS, INC.
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and structure for CMOS-MEMS thin film encapsulation
Patent number
11,667,517
Issue date
Jun 6, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Chia Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Optical electronics device
Patent number
11,667,523
Issue date
Jun 6, 2023
Texas Instruments Incorporated
Simon Joshua Jacobs
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrated structure of mems microphone and air pressure sensor and...
Patent number
11,516,595
Issue date
Nov 29, 2022
Weifang Goertek Microelectronics Co., Ltd.
Dexin Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Bottom electrode via structures for micromachined ultrasonic transd...
Patent number
11,484,911
Issue date
Nov 1, 2022
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Antenna apparatus
Patent number
11,362,411
Issue date
Jun 14, 2022
SOFANT TECHNOLOGIES LTD
Nakul Raghavanand Haridas
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Device for protecting FEOL element and BEOL element
Patent number
11,345,591
Issue date
May 31, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Ping-Chun Yeh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for integrating complementary metal-oxide-semiconductor (CMO...
Patent number
11,342,266
Issue date
May 24, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Piezoelectric micromachined ultrasonic transducers and methods for...
Patent number
11,329,098
Issue date
May 10, 2022
VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
Patent number
11,261,083
Issue date
Mar 1, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Lee-Chuan Tseng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS package with roughend interface
Patent number
11,192,778
Issue date
Dec 7, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Yu-Jui Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical component and method for producing same
Patent number
11,148,940
Issue date
Oct 19, 2021
Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
Dirk Rudloff
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integration scheme for microelectromechanical systems (MEMS) device...
Patent number
11,078,074
Issue date
Aug 3, 2021
Taiwan Semiconductor Manufacturing Company, Ltd
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Multi-layer sealing film for high seal yield
Patent number
11,034,578
Issue date
Jun 15, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Chih-Chien Yang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Monolithic integration of piezoelectric micromachined ultrasonic tr...
Patent number
10,988,376
Issue date
Apr 27, 2021
VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Support pillar
Patent number
10,961,113
Issue date
Mar 30, 2021
Chien-Chang Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS structure with an etch stop layer buried within inter-dielectr...
Patent number
10,927,000
Issue date
Feb 23, 2021
United Microelectronics Corp.
Li-Che Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Optical electronics device
Patent number
10,894,712
Issue date
Jan 19, 2021
Texas Instruments Incorporated
Simon Joshua Jacobs
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
CMOS ultrasonic transducers and related apparatus and methods
Patent number
10,843,227
Issue date
Nov 24, 2020
Butterfly Network, Inc.
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical system structure and method for fabricating...
Patent number
10,793,426
Issue date
Oct 6, 2020
United Microelectronics Corp.
Chang-Sheng Hsu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for integrating complementary metal-oxide-semiconductor (CMO...
Patent number
10,745,271
Issue date
Aug 18, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Complementary metal oxide semiconductor (CMOS) ultrasonic transduce...
Patent number
10,710,873
Issue date
Jul 14, 2020
Butterfly Network, Inc.
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS package with roughend interface
Patent number
10,710,872
Issue date
Jul 14, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Yu-Jui Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Ultrasonic transducers in complementary metal oxide semiconductor (...
Patent number
10,707,201
Issue date
Jul 7, 2020
Butterfly Network, Inc.
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
HIGHLY SENSITIVE THERMOELECTRIC-BASED INFRARED DETECTOR WITH HIGH C...
Publication number
20240351863
Publication date
Oct 24, 2024
Meridian Innovation Pte Ltd
Wan Chia Ang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CMOS ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND METHODS
Publication number
20240100565
Publication date
Mar 28, 2024
BFLY OPERATIONS, INC.
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
Publication number
20240083742
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ting-Li YANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
BOTTOM ELECTRODE VIA STRUCTURES FOR MICROMACHINED ULTRASONIC TRANSD...
Publication number
20240024917
Publication date
Jan 25, 2024
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method and Structure for CMOS-MEMS Thin Film Encapsulation
Publication number
20230278856
Publication date
Sep 7, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Yu-Chia Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
BOTTOM ELECTRODE VIA STRUCTURES FOR MICROMACHINED ULTRASONIC TRANSD...
Publication number
20230017034
Publication date
Jan 19, 2023
BFLY Operations, Inc
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DEVICE FOR PROTECTING FEOL ELEMENT AND BEOL ELEMENT
Publication number
20220289564
Publication date
Sep 15, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Ping-Chun YEH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
Publication number
20220274827
Publication date
Sep 1, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Ting-Li YANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ANTENNA APPARATUS
Publication number
20220271416
Publication date
Aug 25, 2022
SOFANT TECHNOLOGIES LTD.
Nakul Raghavanand HARIDAS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
HETEROGENOUS INTEGRATION OF COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR...
Publication number
20220162062
Publication date
May 26, 2022
Meridian Innovation Pte Ltd
Wan Chia Ang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INTERCONNECTION FOR MONOLITHICALLY INTEGRATED STACKED DEVICES AND M...
Publication number
20210260623
Publication date
Aug 26, 2021
GLOBALFOUNDRIES SINGAPORE PTE. LTD.
You QIAN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
OPTICAL ELECTRONICS DEVICE
Publication number
20210139320
Publication date
May 13, 2021
TEXAS INSTRUMENTS INCORPORATED
Simon Joshua Jacobs
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CMOS ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND METHODS
Publication number
20210114060
Publication date
Apr 22, 2021
Butterfly Network, Inc.
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INTEGRATED STRUCTURE OF MEMS MICROPHONE AND AIR PRESSURE SENSOR AND...
Publication number
20210021937
Publication date
Jan 21, 2021
WEIFANG GOERTEK MICROELECTRONICS CO., LTD.
Dexin WANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR INTEGRATING COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR (CMO...
Publication number
20200346925
Publication date
Nov 5, 2020
Taiwan Semiconductor Manufacturing Co., LTD
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS PACKAGE WITH ROUGHEND INTERFACE
Publication number
20200339413
Publication date
Oct 29, 2020
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Yu-Jui Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
BOTTOM ELECTRODE VIA STRUCTURES FOR MICROMACHINED ULTRASONIC TRANSD...
Publication number
20200324319
Publication date
Oct 15, 2020
Butterfly Network, Inc.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method and Structure for CMOS-MEMS Thin Film Encapsulation
Publication number
20200317506
Publication date
Oct 8, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Yu-Chia Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MULTI-LAYER SEALING FILM FOR HIGH SEAL YIELD
Publication number
20200270121
Publication date
Aug 27, 2020
Taiwan Semiconductor Manufacturing Co., LTD
Chih-Chien Yang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME
Publication number
20200239303
Publication date
Jul 30, 2020
Fraunhofer-Gesellschaft zur foerderung der Angewandten Forschung e.V.
Dirk RUDLOFF
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DEVICE FOR PROTECTING FEOL ELEMENT AND BEOL ELEMENT
Publication number
20200115223
Publication date
Apr 16, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Ping-Chun YEH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INTEGRATION SCHEME FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICE...
Publication number
20200115222
Publication date
Apr 16, 2020
Taiwan Semiconductor Manufacturing Co., LTD
Chun-Wen CHENG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTRICALLY CONTROLLABLE INTEGRATED SWITCH
Publication number
20200083011
Publication date
Mar 12, 2020
STMicroelectronics (Rousset) SAS
Christian Rivero
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR INTEGRATING COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR (CMO...
Publication number
20200024135
Publication date
Jan 23, 2020
Taiwan Semiconductor Manufacturing Co., LTD
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CMOS ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND METHODS
Publication number
20190388935
Publication date
Dec 26, 2019
Butterfly Network, Inc.
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ANTENNA APPARATUS
Publication number
20190372199
Publication date
Dec 5, 2019
SOFANT TECHNOLOGIES LTD.
Nakul Raghavanand HARIDAS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR FABRICATING MEMS DEVICE INTEGRATED WITH A SEMICONDUCTOR...
Publication number
20190345029
Publication date
Nov 14, 2019
UNITED MICROELECTRONICS CORP.
Tsong-Lin Shen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CMOS ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND METHODS
Publication number
20190283081
Publication date
Sep 19, 2019
Butterfly Network, Inc.
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
COMPLEMENTARY METAL OXIDE SEMICONDUCTOR (CMOS) ULTRASONIC TRANSDUCE...
Publication number
20190210869
Publication date
Jul 11, 2019
Butterfly Network, Inc.
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MONOLITHIC INTEGRATION OF PIEZOELECTRIC MICROMACHINED ULTRASONIC TR...
Publication number
20190177160
Publication date
Jun 13, 2019
GLOBALFOUNDRIES SINGAPORE PTE. LTD.
You QIAN
H01 - BASIC ELECTRIC ELEMENTS