Claims
- 1. In an apparatus for measuring the specific force and angular rotation rate of a moving body, a micromachined structure comprising:
- a) a monolithic substrate having first and second substantially planar surfaces disposed substantially parallel to each other;
- b) a first accelerometer formed of said substrate for producing a first output signal indicative of the acceleration applied to the moving body;
- c) a second accelerometer formed of said substrate for producing a second output signal indicative of the acceleration applied to the moving body;
- d) mounting means formed of said substrate for mounting said first and second accelerometers to move said first and second accelerometers along a vibration axis substantially parallel to said first and second planar surfaces;
- e) a link connected between said first and second accelerometers, said link imparting a substantially equal and opposite motion to said one of said first and second accelerometers when the other of said first and second accelerometers is moved; and
- f) means for dithering each of said first and second accelerometers along said vibration axis to enable measurement of said specific force and angular rotation rate of said moving body.
- 2. The measuring apparatus as claimed in claim 1, wherein said first accelerometer further comprises a first force sensing axis for producing said first output signal which is indicative of the acceleration of the moving body along said first force sensing axis.
- 3. The measuring apparatus as claimed in claim 2, wherein said second accelerometer further comprises a second force sensing axis for producing said first output signal which is indicative of the acceleration of the moving body along said second force sensing axis.
- 4. The measuring apparatus as claimed in claim 3, wherein said first force sensing axis extends in a direction substantially opposite to the direction of said second force sensing axis.
Parent Case Info
This is a Divisional of U.S. application Ser. No. 08/522,812, filed Sep. 1, 1995, now U.S. Pat. No. 5,627,314, U.S. application Ser. No. 08/522,812 is a Divisional of U.S. application Ser. No. 08/207,328 filed Mar. 7, 1994, now U.S. Pat. No. 5,557, 046 which is a Divisional of U.S. application Ser. No. 08/073,818, filed Jun. 8, 1993, now U.S. Pat. No. 5,331,854, which is a Divisional of U.S. application Ser. No. 07/653,533, filed Feb. 8, 1991, now U.S. Pat. No. 5,241,861.
US Referenced Citations (84)
Foreign Referenced Citations (1)
Number |
Date |
Country |
8800350 |
Jan 1988 |
WOX |
Non-Patent Literature Citations (5)
Entry |
Pisano, Albert P., "Resonant-Structure Micromotors," Micro Electro Mechanical Systems, Feb. 20-22, 1989, IEEE Catalog No. 89THO249-3, pp. 44-48. |
Tang, William C., et al, "Laterally Driven Polysilicon Resonant Microstructures," Micro Electro-Mechanical Systems, Feb. 20-22, 1989 IEEE Catalog No. 89THO249-3, pp. 53-59. |
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Divisions (4)
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Number |
Date |
Country |
Parent |
522812 |
Sep 1995 |
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Parent |
207328 |
Mar 1994 |
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Parent |
073818 |
Jun 1993 |
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Parent |
653533 |
Feb 1991 |
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