Number | Date | Country | Kind |
---|---|---|---|
196 41 531 | Oct 1996 | DE |
Filing Document | Filing Date | Country | Kind | 102e Date | 371c Date |
---|---|---|---|---|---|
PCT/DE97/02230 | WO | 00 | 10/19/1999 | 10/19/1999 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO98/15676 | 4/16/1998 | WO | A |
Number | Name | Date | Kind |
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5080763 | Baigetsu | Jan 1992 | |
5194402 | Ehrfeld et al. | Mar 1993 | |
5387495 | Lee et al. | Feb 1995 | |
5755947 | McElhanon et al. | May 1998 | |
6030851 | Grandmont et al. | Feb 2000 |
Number | Date | Country |
---|---|---|
39 19 876 | Dec 1990 | DE |
0 206 133 | Dec 1986 | EP |
Entry |
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Minami et al., “Fabrication of Distributed Electronic Micro Actuator (DEMA)”, Journal of Microelectromechanical Systems, Bd. 2, Nr. 3, pp. 121-127. |