This application is a continuation-in-part of U.S. patent application Ser. No. 07/845,404, filed Mar. 3, 1992, now abandoned, entitled "Mid and Deep UV Antireflection Coatings and Methods for Use Thereof" (attorney docket no. FI9-90-053).
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Number | Date | Country | |
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Parent | 845404 | Mar 1992 |