Claims
- 1. A method of mitigating electrostatic discharges occurring during cleaning of a substrate when solid CO.sub.2 particles are directed against a major surface of the substrate wherein the improvement comprises the steps of:
- placing the substrate a moisture-containing atmosphere; and
- chilling the substrate prior to directing the solid CO.sub.2 particles thereat to cause moisture in the moisture-containing atmosphere to condense on the major surface of the substrate to form a substantially continuous film of water directing the solid CO.sub.2 particles against the major surface of the substrate, reacting the CO.sub.2 particles with the water film to form carbonic acid (H.sub.2 CO.sub.3), wherein said carbonic acid dissociates into free ions that neutralize the electrostatic charges on the solid CO.sub.2 particles.
- 2. The method according to claim 1 wherein the substrate is chilled by placement within an enclosure containing solid CO.sub.2.
- 3. The method according to claim 1 wherein the substrate is chilled by directing a chilled gas at said substrate.
- 4. The method according to claim 1 wherein the substrate is chilled by refrigerating said substrate.
Parent Case Info
This application is a continuation of application Ser. No. 08/349,275, filed on Dec. 5, 1994 now abandoned.
US Referenced Citations (6)
Number |
Name |
Date |
Kind |
4535576 |
Shukla et al. |
Aug 1985 |
|
5081068 |
Endo et al. |
Jan 1992 |
|
5147466 |
Ohmori et al. |
Sep 1992 |
|
5288332 |
Pustilnik et al. |
Feb 1994 |
|
5354384 |
Sneed et al. |
Oct 1994 |
|
5409418 |
Krone-Schmidt et al. |
Apr 1995 |
|
Non-Patent Literature Citations (1)
Entry |
G. Carter, "Streaming Potential ESD Shifts during Post Dicing High Pressure Spray Rinse Operations," 1991 EOS/ESD Symposium Proceedings, pp. 50-58. |
Continuations (1)
|
Number |
Date |
Country |
Parent |
349275 |
Dec 1994 |
|