Claims
- 1. A two-dimensional inspection system comprising: a laser source for projecting a narrow laser beam of light; means for deflecting said laser beam through small angles; a position sensing detector having a plurality of electrically isolated channels, each of said channels having a length; means for imaging light reflected from said laser beam upon said position sensing detector and imaging a light spot at a position along the channel length; each of said channels generating two electrical currents in a ratio proportional to the position of a light spot along said channel length; means for selecting a channel having a current ratio indicating the position of said laser beam reflected from a surface; means for deselecting channels with output generated substantially by localized peaks of stray light; means for converting the current ratio of selected channel into a two-dimensional and a three-dimensional position value indicative of said surface reflecting said laser beam; and means for reporting said two-dimensional and three-dimensional position value.
Parent Case Info
The present application is a continuation of the parent application Ser. No. 310,841, filed Sep. 22, 1994, now U.S. Pat. No. 5,554,858.
US Referenced Citations (7)
Continuations (1)
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Number |
Date |
Country |
Parent |
310841 |
Sep 1994 |
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