Number | Date | Country | Kind |
---|---|---|---|
8806369 | May 1988 | FRX |
Number | Name | Date | Kind |
---|---|---|---|
4239819 | Holzl | Dec 1980 | |
4289822 | Shimada et al. | Sep 1981 | |
4443529 | Kanba et al. | Apr 1984 | |
4460669 | Ogawa et al. | Jul 1984 | |
4485146 | Mizuhashi et al. | Nov 1984 | |
4486521 | Misumi et al. | Dec 1984 | |
4489149 | Kawamura et al. | Dec 1984 | |
4490454 | Misumi et al. | Dec 1984 | |
4499331 | Hamakawa et al. | Feb 1985 | |
4546008 | Saitoh et al. | Oct 1985 | |
4547448 | Shirai et al. | Oct 1985 | |
4555464 | Kido et al. | Nov 1985 | |
4632894 | Ohashi et al. | Dec 1986 | |
4645684 | Osada et al. | Feb 1987 | |
4661427 | Kangi | Apr 1987 | |
4666808 | Kawamura et al. | May 1987 | |
4668365 | Foster et al. | May 1987 | |
4721631 | Endo et al. | Jan 1988 | |
4777090 | Oushinsky et al. | Oct 1988 | |
4841328 | Takeuchi et al. | Jun 1989 | |
4847157 | Goodman et al., | Jul 1989 |
Number | Date | Country |
---|---|---|
0110258 | Jun 1984 | EPX |
0230788 | Aug 1987 | EPX |
0289402 | Nov 1988 | EPX |
2071673 | Sep 1981 | GBX |
Entry |
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J. Electrochem Soc., 128, 1555-1563 (Jul. 1981)-Dun et al., "Mechanisms of Plasma-Enhanced Silicon Nitride Desposition Using SiH.sub.4 /N Mixture". |