Number | Name | Date | Kind |
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4551417 | Suzuki et al. | Nov 1985 |
Entry |
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"Copolymers of Trimethylsilylstyrene with Chloromethylstyrene for a Bi-Layer Resist System", Journal of the Electrochemical Society, vol. 130, No. 9, Sep. 1983, pp. 1962-1964, M. Suzuki et al. |