Number | Date | Country | Kind |
---|---|---|---|
8-273392 | Oct 1996 | JPX | |
8-280827 | Oct 1996 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4554236 | Bentley et al. | Nov 1985 | |
4927739 | Taniguchi et al. | May 1990 | |
4987057 | Kaji et al. | Jan 1991 | |
5153236 | Kaji et al. | Oct 1992 | |
5372907 | Haley et al. | Dec 1994 | |
5691100 | Kudo et al. | Nov 1997 | |
5725994 | Kondo | Mar 1998 | |
5731125 | Yamachika et al. | Mar 1998 | |
5756650 | Kawamonzen et al. | May 1998 |
Number | Date | Country |
---|---|---|
784233 | Jul 1997 | EPX |
Entry |
---|
A. Lamola. et al, Chemically Amplified Resists in Solid State Technology, Aug. 1991, pp. 53-60. |