Claims
- 1. A light-sensitive negative-working resist comprising a binder and a radiation-sensitive compound that, upon exposure to activating radiation, loses a moiety HX and is converted to a colored compound that is less soluble in an aqueous base than in said compound prior to said exposure, wherein X is selected from the group consisting of --CN, halide and --SO.sub.2 R.sup.1 is alkyl comprising from 1 to 5 carbon atoms or aryl comprising from 6 to 10 carbon ring atoms, wherein said compound has the structural formula ##STR19## wherein R.sup.2 and X.sup.1 are individually selected from the group recited for said X, each R.sup.3 is independently H, alkyl of from 1 to 5 carbon atoms, or benzyl, or together the two R.sup.3 moieties form with said N atom, a heterocyclic ring of 5 to 6 ring atoms, or a pair of fused herterocyclic rings of 5 or 6 ring atoms each; n is 1 or 2 and Z is any substituent, or hydrogen, which on exposure to said radiation produces no increase in aqueous-base solubility.
- 2. A method of producing a negative-working image in a light-sensitive resist composition, comprising the steps of
- (a) imagewise-exposing to activating radiation a composition comprising a binder and, as the sole radiaion-sensitive component of the composition, a sensitizer which functions to impart differential solubility to said composition as a result of said exposure and thereby render said composition developable in an aqueous base, said sensitizer comprising a radiation-sensitive compound that, upon exposure to activating radiation, loses a moiety HX and is converted to a colored compound that is less soluble in an aqueous base than is said compound prior to said exposure, wherein X is selected from the group consisting of --CN, halide and --SO.sub.2 R.sup.1 ; and R.sup.1 is alkyl comprising from 1 to 5 carbon atoms or aryl comprising from 6 to 10 carbon ring atoms, and
- (b) developing said exposed composition with an aqueous base so that only the exposed areas remain.
- 3. A method of producing a negative-working image in a light-sensitive resist composition, comprising the steps of
- (a) imagewise-exposing to activating radiation a composition comprising a binder and a radiation-sensitive compound that, upon exposure to activating radiation, loses a moiety HX and is converted to a colored compund that is less soluble in an aqueous base than is said compound prior to said exposure, wherein X is selected from the group consisting of --CN, halide and --SO.sub.2 R.sup.1 ; and R.sup.1 is alkyl comprising from 1 to 5 carbon atoms or aryl comprising from 6 to 10 carbon ring atoms, wherein said compound has the structural formula ##STR20## wherein R.sup.2 and X.sup.1 are individually selected from the group recited for said X, each R.sup.3 is independently H, alkyl of from 1 of 5 carbon atoms, or benzyl, or together the two R.sup.3 moieties form with said N atom, a heterocyclic ring of 5 to 6 ring atoms, or a pair of fused heterocyclic rings of 5 or 6 ring atoms each; n is 1 or 2 and Z is any substituent, or hydrogen, which on exposure to said radiation produces no increase in aqueous-base solubility, and
- (b) developing said exposed composition with an aqueous base so that only the exposed areas remain.
Parent Case Info
This is a continuation of application Ser. No. 734,646, filed May 16, 1985, now abandoned.
US Referenced Citations (6)
Non-Patent Literature Citations (2)
Entry |
"Dosimetry for Lithographic Applications", J. Vac. Sci. Technol., vol. 19, No. 4, Nov./Dec. 1981, pp. 1343-1347, Shaw et al. |
J. of Organic Chemistry of the USSR, vol. 8, pp. 1701-1705, 1973. |
Continuations (1)
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Number |
Date |
Country |
Parent |
734646 |
May 1985 |
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