Number | Name | Date | Kind |
---|---|---|---|
3436819 | Lunine | Sep 1965 | |
3567849 | Kremar | Jun 1969 | |
4225900 | Ciccio et al. | Sep 1980 | |
4318954 | Jensen | Mar 1982 | |
4851614 | Duncan Jr. | Jul 1989 | |
4893216 | Hagner | Jan 1990 | |
5083188 | Yamagata | Jan 1992 | |
5098533 | Duke et al. | Mar 1992 | |
5117277 | Yuyama et al. | May 1992 | |
5126819 | Abe et al. | Jun 1992 | |
5200579 | Takeuchi | Apr 1993 | |
5342999 | Frei et al. | Aug 1994 | |
5446246 | Desai et al. | Aug 1995 |
Entry |
---|
Semiconductor Lithography Principles, Practices, and Materials by Wayne M. Moreau, 1988 Plenum Press, New York, pp. 7-10 and 27. |