Claims
- 1. A non-corrosive cleaning composition comprising:
(a) water; and (b) a synergistic combination of at least one tricarboxylic acid and at least one carboxylic acid.
- 2. The composition of claim 1, wherein said composition removes an etch residue from a substrate.
- 3. The composition of claim 2, wherein said etch residue is a plasma etch residue.
- 4. The composition of claim 1, wherein said synergistic combination of said at least one tricarboxylic acid and said at least one carboxylic acid provides an enhanced cleaning composition compared to a cleaning composition having only tricarboxylic acid or carboxylic acid alone.
- 5. The composition of claim 1, wherein said at least one tricarboxylic acid has the formula:
- 6. The composition of claim 5, wherein said at least one tricarboxylic acid having said formula is selected from the group consisting of:
tricarballylic acid, beta-methyltricarballylic acid, citric acid, nitromethanetrispropionic acid, and 2-(carboxylmethylthio) succinic acid.
- 7. The composition of claim 1, wherein said at least one tricarboxylic acid is present in said composition in an amount about 0.01 wt. % to about 10 wt. %.
- 8. The composition of claim 1, wherein said at least one tricarboxylic acid is present in said composition in an amount about 0.05 wt. % to about 3 wt. %.
- 9. The composition of claim 1, wherein said at least one tricarboxylic acid is present in said composition in an amount about 0.1 wt. % to about 2 wt. %.
- 10. The composition of claim 1, wherein said at least one carboxylic acid has a pKa between about 3 to about 6.
- 11. The composition of claim 1, wherein said at least one carboxylic acid has the formula:
- 12. The composition of claim 11, wherein said at least one carboxylic acid having said formula is selected from the group consisting of:
formic, acetic, propionic, butyric, valeric, trimethylacetic, isovaleric, succinic, methylsuccinic, glutaric, suberic, glycolic, lactic, 2-hydroxyisobutyric, 3-hydroxybutyric, malic, citramalic, tartaric, ethoxyacetic, tetrahydro-3-furoic, diglycolic, mercaptosuccinic, thiolactic, cyclohexylacetic, dicyclohexylacetic, and 1,1-cyclohexanediacetic.
- 13. The composition of claim 1, wherein said at least one carboxylic acid is present in said composition in an amount about 0.01 wt. % to about 10 wt. %.
- 14. The composition of claim 1, wherein said at least one carboxylic acid is present in said composition in an amount about 0.05 wt. % to about 3 wt. %.
- 15. The composition of claim 1, wherein said at least one carboxylic acid is present in said composition in an amount about 0.1 wt. % to about 2 wt. %.
- 16. The composition of claim 1, wherein said synergistic combination of said at least one tricarboxylic acid and said at least one carboxylic acid is present in said composition in a weight ratio of about 1:5 to about 5:1.
- 17. The composition of claim 1, wherein said synergistic combination of said at least one tricarboxylic acid and said at least one carboxylic acid is present in said composition in a weight ratio of about 1:3 to about 3:1.
- 18. The composition of claim 1, wherein said synergistic combination of said at least one tricarboxylic acid and said at least one carboxylic acid is present in said composition in a weight ratio of about 1:1.
- 19. The composition of claim 1, further comprising at least one hydroxylammonium compound having the formula:
- 20. The composition of claim 19, wherein said at least one hydroxylammonium compound is at least one selected from the group consisting of: hydroxylammonium salts, hydroxylammonium nitrate, hydroxylammonium sulfate, hydroxylammonium phosphate, hydroxylammonium chloride, hydroxylammonium oxalate, hydroxylammonium citrate, hydroxylammonium fluoride, N,N-diethyl hydroxylammonium sulfate, and N,N-diethylhydroxylammonium nitrate.
- 21. The composition of claim 19, wherein said at least one hydroxylammonium compound, when present in said composition, is present in an amount about 0.001 wt. % to about 10 wt. %.
- 22. The composition of claim 1, further comprising at least one base compound.
- 23. The composition of claim 22, wherein said at least one base compound is selected from the group consisting of: amine, quaternary ammonium hydroxide, and any combinations thereof.
- 24. The composition of claim 22, wherein said at least one base is present in said composition in an amount about 0.001 wt. % to about 1 wt. %.
- 25. The composition of claim 1, further comprising at least one solvent.
- 26. The composition of claim 25, wherein said at least one solvent is selected from the group consisting of: polyol compound, glycol ether, and any combinations thereof.
- 27. The composition of claim 25, wherein said at least one solvent is present in said composition in an amount about 0.1 wt. % to about 30 wt. %.
- 28. The composition of claim 1, further comprising at least one additive selected from the group consisting of: chelating compound, surface active agent, and any combinations thereof.
- 29. The composition of claim 28, wherein said at least one additive is present in said composition in an amount about 0.001 wt. % to about 10 wt. %.
- 30. A non-corrosive cleaning composition for removing plasma etch residue on a substrate comprising: water; and a synergistic combination of lactic acid and citric acid.
- 31. The composition of claim 30, wherein said water is present in said composition in an amount about 90 wt. % to about 99.98 wt. %.
- 32. The composition of claim 30, wherein said synergistic combination of citric acid and lactic acid is present in said composition in a weight ratio of about 3:1 to about 1:3.
- 33. The composition of claim 30, wherein said synergistic combination of citric acid and lactic acid is present in said composition in a weight ratio of about 1:1.
- 34. The composition of claim 30, wherein said lactic acid is present in said composition in an amount about 0.4 wt. % to about 1.5 wt. %.
- 35. The composition of claim 30, wherein said citric acid is present in said composition in an amount about 0.5 wt. % to about 1.6 wt. %.
- 36. The composition of claim 30, further comprising at least one hydroxylammonium compound present in said composition in an amount about 0.001 wt. % to about 10 wt. %.
- 37. The composition of claim 36, wherein said at least one hydroxylammonium compound is hydroxylammonium sulfate.
- 38. The composition of claim 37, further comprising at least one base compound in an amount about 0.001 wt. % to about 1 wt. %.
- 39. The composition of claim 38, wherein said at least one base compound is tetramethylammonium hydroxide.
- 40. A method for removing residue from a substrate comprising the step of contacting said substrate with a cleaning composition comprising water; and a synergistic combination of at least one tricarboxylic acid and at least one carboxylic acid, wherein said residue is removed from said substrate.
- 41. The method of claim 40, wherein said substrate is a fresh substrate or an aged substrate.
- 42. The method of claim 40, wherein said cleaning composition has a temperature of about 20° C. to about 60° C.
- 43. The method of claim 40, wherein said method has a cleaning time of about 10 seconds to about 30 minutes.
- 44. The method of claim 40, wherein said substrate is contacted with said cleaning composition by a means selected from the group consisting of: immersion, spray rinsing, streaming, and any combinations thereof.
- 45. The method of claim 40, wherein said method is conducted in combination with at least one photoresist stripping process selected from the group consisting of: dry stripping, O2 plasma ashing, ozone gas phase treatment, fluorine plasma treatment, hot H2 gas treatment, and any combinations thereof.
- 46. The method of claim 40, wherein said method is conducted in combination with at least one organic wet stripping process.
- 47. The method of claim 46, wherein said at least one organic wet stripping process is treatment with ozonated water.
- 48. The composition of claim 40, wherein said synergistic combination of said at least one tricarboxylic acid and said at least one carboxylic acid provides enhanced cleaning of said substrate compared to a cleaning composition having only tricarboxylic acid or carboxylic acid alone.
- 49. The composition of claim 40, wherein said at least one tricarboxylic acid has the formula:
- 50. The composition of claim 49, wherein said at least one tricarboxylic acid having said formula is selected from the group consisting of:
tricarballylic acid, beta-methyltricarballylic acid, citric acid, nitromethanetrispropionic acid, and 2-(carboxylmethylthio) succinic acid.
- 51. The composition of claim 40, wherein said at least one tricarboxylic acid is present in said composition in an amount about 0.01 wt. % to about 10 wt. %.
- 52. The composition of claim 40, wherein said at least one tricarboxylic acid is present in said composition in an amount about 0.05 wt. % to about 3 wt. %.
- 53. The composition of claim 40, wherein said at least one tricarboxylic acid is present in said composition in an amount about 0.1 wt. % to about 2 wt. %.
- 54. The composition of claim 40, wherein said at least one carboxylic acid has a pKa between about 3 to about 6.
- 55. The composition of claim 40, wherein said at least one carboxylic acid has the formula:
- 56. The composition of claim 55, wherein said at least one carboxylic acid having said formula is selected from the group consisting of:
formic, acetic, propionic, butyric, valeric, trimethylacetic, isovaleric, succinic, methylsuccinic, glutaric, suberic, glycolic, lactic, 2-hydroxyisobutyric, 3-hydroxybutyric, malic, citramalic, tartaric, ethoxyacetic, tetrahydro-3-furoic, diglycolic, mercaptosuccinic, thiolactic, cyclohexylacetic, dicyclohexylacetic, and 1,1-cyclohexanediacetic.
- 57. The composition of claim 40, wherein said at least one carboxylic acid is present in said composition in an amount about 0.01 wt. % to about 10 wt. %.
- 58. The composition of claim 40, wherein said at least one at least one carboxylic acid is present in said composition in an amount about 0.05 wt. % to about 3 wt. %.
- 59. The composition of claim 40, wherein said at least one carboxylic acid is present in said composition in an amount about 0.1 wt. % to about 2 wt. %.
- 60. The composition of claim 40, wherein said synergistic combination of at least one tricarboxylic acid and said at least one carboxylic acid is present in said composition in a weight ratio of about 1:5 to about 5:1.
- 61. The composition of claim 40, wherein said synergistic combination of at least one tricarboxylic acid and said at least one carboxylic acid is present in said composition in a weight ratio of about 1:3 to about 3:1.
- 62. The composition of claim 40, wherein said synergistic combination of at least one tricarboxylic acid and said at least one carboxylic acid is present in said composition in a weight ratio of about 1:1.
- 63. The composition of claim 40, further comprising at least one hydroxylammonium compound having the formula:
- 64. The composition of claim 63, wherein said at least one hydroxylammonium compound is at least one selected from the group consisting of: hydroxylammonium salts, hydroxylammonium nitrate, hydroxylammonium sulfate, hydroxylammonium phosphate, hydroxylammonium chloride, hydroxylammonium oxalate, hydroxylammonium citrate, hydroxylammonium fluoride, N,N-diethylhydroxylammonium sulfate, and N,N-diethylhydroxylammonium nitrate.
- 65. The composition of claim 63, wherein said at least one hydroxylammonium compound, when present in said composition, is present in an amount about 0.001 wt. % to about 10 wt. %.
RELATED APPLICATION
[0001] This application claims priority from Provisional Patent Application Serial No. 60/375,613, filed on Apr. 25, 2002.
Provisional Applications (1)
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Number |
Date |
Country |
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60375613 |
Apr 2002 |
US |