Number | Name | Date | Kind |
---|---|---|---|
4646435 | Owens et al. | Mar 1987 | |
4816883 | Baldi | Mar 1989 | |
5198380 | Harari | Mar 1993 | |
5506803 | Jex | Apr 1996 | |
5506816 | Hirose et al. | Apr 1996 | |
5616942 | Song | Apr 1997 |
Entry |
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Wolf, "Silicon Processing for the VLSI Era vol. 2: Process Integration", Lattice Press, pp. 387-389, 1990. |