Number | Name | Date | Kind |
---|---|---|---|
3927225 | Cordes et al. | Dec 1975 | |
3965279 | Levinstein et al. | Jun 1976 | |
3968272 | Anand | Jul 1976 | |
4180596 | Crowder et al. | Dec 1979 | |
4322453 | Miller | Mar 1982 | |
4407710 | Moustakas | Oct 1983 | |
4446168 | Kato | May 1984 |
Number | Date | Country |
---|---|---|
58-96726 | Jun 1983 | JPX |
Entry |
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Matysik et al., "Hydrogen Evolution from Plasma-Deposited Amorphous Silicon Films", J. Vac. Sci. Technol. 15(2), Mar./Apr. 1978, pp. 302-304. |
IBM Technical Disclosure Bulletin, vol. 19, No. 9, Feb. 1977, "Contact Barrier Metallurgy for Mosfet Gate", P. L. Garbarino et al. |