Memory devices are electronic devices arranged to store electrical signals. For example, a basic memory element may be a fuse that can either be open or be closed. Open and closed states of the fuse may be used to designate one bit of information corresponding to a value of 1 or 0. A plurality of memory elements can be combined in various arrangements in order to store multiple bits arranged in words or other combinations. Various electronic circuits including semiconductor devices such as transistors are used as memory elements.
Memory elements may be classified in two main categories: volatile and nonvolatile. Volatile memory loses any data as soon as the system is turned off. Thus, it requires constant power to remain viable. Most types of random access memory (RAM) fall into this category. Non-volatile memory does not lose its data when the system or device is turned off. An NVM device may be implemented as a MOS transistor that has a source, a drain, an access or a control gate, and a floating gate. It is structurally different from a standard MOSFET in its floating gate, which is electrically isolated, or “floating”.
A range of considerations including a purpose of the device, power consumption, size, retention capacity and duration may influence design of non-volatile memory devices. For example, some NVM devices may be categorized as floating gate or charge-trapping from a programming perspective.
Non-volatile memory devices may also be implemented as NVM arrays that include a plurality of NVM cells arranged in rows and columns. In general, single-transistor n-channel NVM cells operate as follows. During an erase operation, electrons are removed from a floating gate of the NVM cell, thereby lowering the threshold voltage of the NVM cell. During a program operation, electrons are inserted into the floating gate of the NVM cell, thereby raising the threshold voltage of the NVM cell. Thus, during program and erase operations, the threshold voltages of selected NVM cells are changed. During a read operation, read voltages are applied to selected NVM cells. In response, read currents flow through these selected NVM cells.
An important part of memory manufacturing process is testing the manufactured memory devices. For multiple times programmable devices, the memories may be programmed with test values, then read, and their usability confirmed. Since the devices are multiple times programmable, the tested devices may then be returned to the manufactured batch.
On the other hand, testing one time programmable memories presents a number of challenges. 100% testing is impossible, since any memory programmed for testing becomes unusable for other purposes. Sample testing brings in statistical risk factors as well as a wasted group of memories for each tested batch.
This Summary is provided to introduce a selection of concepts in a simplified form that are further described below in the Detailed Description. This Summary is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used as an aid in determining the scope of the claimed subject matter.
Embodiments are directed to only One Time Programmable (OTP) memory structures and methods of testing those. One or more dedicated memory test cells may be utilized for testing support circuitry associated with a group of regular OTP memory cells. The dedicated memory test cells may be an extra group of cells in an array, randomly selected cells among the regular OTP cells, and the like. During a pretest process, the dedicated test cells are programmed and read. The read values are then compared to the programmed or expected values enabling a determination whether the support circuitry for the associated regular OTP memory cells are usable or not.
This and other features and advantages of the invention will be better understood in view of the Detailed Description and the Drawings, in which:
Non-limiting and non-exhaustive embodiments are described with reference to the following drawings.
Various embodiments will be described in detail with reference to the drawings, where like reference numerals represent like parts and assemblies throughout the several views. Reference to various embodiments does not limit the scope of the invention, which is limited only by the scope of the claims attached hereto. Additionally, any examples set forth in this specification are not intended to be limiting and merely set forth some of the many possible embodiments for the claimed subject matter.
Throughout the specification and claims, the following terms take at least the meanings explicitly associated herein, unless the context clearly dictates otherwise. The meanings identified below are not intended to limit the terms, but merely provide illustrative examples for the terms. The meaning of “a,” “an,” and “the” includes plural reference, the meaning of “in” includes “in” and “on.” The term “connected” means a direct electrical connection between the items connected, without any intermediate devices. The term “coupled” means either a direct electrical connection between the items connected or an indirect connection through one or more passive or active intermediary devices. The term “circuit” means either a single component or a multiplicity of components, either active and/or passive, that are coupled together to provide a desired function. The term “signal” means at least one current, voltage, charge, temperature, data, or other measurable quantity.
All of the circuits described in this document may be implemented as circuits in the traditional sense, such as with integrated circuits and the like. All or some of them can also be implemented equivalently by other ways known in the art, such as by using one or more processors, Digital Signal Processing (DSP), a Floating Point Gate Array (FPGA), a general purpose micro processor and the like.
Device 100 includes memory 110 that is adapted to interact with other circuits 102. Individual cells of memory 110 are adapted to store information as a result of “write” operation 104 and provide the stored information as a result of “read” operation 106. The information is stored even during a power-off state of device 100.
“Read” operation 106, which provides the stored information to one or more of the other circuits 102, may occur during a transition from the power-off state to a power-on state for some parts of memory 110. For other parts of memory 110, “read” operation 106 may occur during the power-on state upon being addressed by another circuit (e.g. a controller).
As a result, different circuits of device 100 may receive data for their operation at different states of powering the device. For example, an oscillator circuit may be provided calibration data during the transition from the power-off state from one part of memory 110, while a digital signal processor circuit may be provided programming data after the transition.
The information stored in memory 110 may include analog, digital or other types of data. For example, different parts of memory 110 may provide logic bits, ON/OFF states, latched outputs for trimming analog circuits, and the like.
Memory 210 may include memory core 212 for storing information and support circuitry 218 for operations associated with the memory core 212. Operational component 202 may be one of the other circuits 102 of
Memory core 212 may be an ordinary NVM circuit that is arranged to store data (“1”), a logic or non-logic value, such as an ON/OFF state, in individual cells and provide the data upon being addressed. In one embodiment, memory core may be in an array form comprising cells that are addressable in terms of a row and a column.
In some embodiments, a value for the data may be encoded in an amount of charge stored in a device. In another embodiment, the data may be at least one logical bit, such as a 1 or a zero, stored in a cell. Of course, the data may need more than one cell, and so on.
As mentioned above, support circuitry 218 is for performing operations associated with memory core 212. These operations may include, but are not limited to, providing supply voltage, providing programming voltage, selecting a cell for programming or reading, reading a cell, testing a cell, and the like. In addition, support circuitry 218 may cooperate with other components, such as operational component 202.
Operational component 202 may be adapted to receive the data for processing, calibration, and the like. In
Memory 210 may be implemented with fewer or additional components such as communication circuitry for interaction with other devices.
The memory core 262 of memory 250 includes first type memory 264 and second type memory 266. First type memory 264 and second type memory 266 may include any type of memory circuits such as One Time Programmable (OTP), Multiple Times Programmable (MTP), transistor based memory circuits, fuse-based memory circuits, different formations of arrays, and the like. Each type may be used for a different purpose of operational component (e.g. operational components 252-1 and 252-2).
For example, first type memory 264 may provide a fast output for calibrating operational component 252-1 during a transition to the power-on state, while second type memory 266 may provide programming data to operational component 252-2 in the power-on state upon being addressed by support circuitry 268.
Support circuitry 268 is adapted to interact with both types of memories. The interaction may include programming the memories, addressing individual cells to output their data, and the like.
By integrating first type memory 264 and second type memory 266, and combining at least a portion of the support operations in a single support circuitry, size and power consumption can be optimized.
The memory core of memory 310 includes first type memory 314, which is an OTP memory, second type memory 316, and third type memory 317. These memories are examples of different memory types as described in conjunction with previous figures.
Memory circuits commonly comprise a number of cells (e.g. cells 332, 334, and 336), which store the data to be consumed by operational components. Memory circuits may be implemented in form of a memory array (e.g. an NVM array) comprising cells that are addressable in terms of a row and a column. First type memory 314 and second type memory 316 are examples of NVM arrays, while third type memory 317 illustrates a non-array NVM circuit.
In some embodiments (as illustrated, for example, in
The control capacitor structure 352 is fabricated so that it has much more capacitance than does the tunneling capacitor structure 360 (and assorted stray capacitance between the floating gate 350 and various other nodes of the cell 340). Manipulation of the voltages applied to the first voltage source 356 and second voltage source 364 controls an electric field across the capacitor structure and pFET dielectrics and thus Fowler-Nordheim tunneling of electrons onto and off of the floating gate, thus controlling the charge on the floating gate 350 and the information value stored thereon.
High voltage switches 322 and 324 are examples of a series of high voltage switches that are arranged to provide the first and the second voltages for programming and erasing of the memory cells.
NVM controller 326 is arranged to program and address individual cells of the memory circuits to output their data by managing high voltage switches 322, 324, and the like.
Charge pump 328 is an electronic circuit that uses capacitors as energy storage elements to convert low voltages into higher voltage outputs. Charge pump circuits are typically capable of high efficiencies, sometimes as high as 90-95%.
Charge pump 328 may use switches to control a connection of voltages to the capacitor. For example, to generate a higher voltage, a first stage may involve the capacitor being connected across a voltage and charged up. In a second stage, the capacitor is disconnected from the original charging voltage and reconnected with its negative terminal to the original positive charging voltage. Because the capacitor retains the voltage across it (ignoring leakage effects) the positive terminal voltage is added to the original, effectively doubling the voltage. This higher voltage output may then be smoothed by the use of another capacitor.
The examples of
An OTP memory such as the OTP memory array 410 includes a number of OTP memory cells most of which, if not all, are unprogrammed during manufacturing 440. Because the cells are OTP, a test step for confirming whether the cells are usable cannot include programming all cells. Such a test is destructive for this type of memory.
Thus, test step 450 typically includes programming (and reading) of sampled memories 452 from OTP memory array 410. As a result of the test, a group of memories may fail the test (453) and another group pass (“succeeded” 455). While the “succeeded” group included usable memory cells at the beginning of the test, after the test step 450, the memories in that group are wasted (457), because they cannot be used for other purposes any more.
In a typical manufacturing and testing environment for OTP memories, regular programming step 460 does not strictly follow the test step 450, since the testing is done on a sampling of the manufactured memories and provides only an indication of how many memories may ultimately fail, but not which ones.
Hence, when all remaining memories are regularly programmed, a portion still fails (463) and another portion succeeds (465). The manufacturing loss includes not only the failed memories as a result of regular programming, but also all of the sampled memories used for testing.
As discussed before, support circuitry 578-A supports both the regular OTP memory cell and the dedicated memory cell. Support circuitry 578-A may include, but is not limited to, a High Voltage (HV) switch, a charge pump, a controller, a select switch, a voltage regulator, a current source, a sense amplifier, a High Voltage (HV) driver, a bias block, and an Error Correction Circuit (ECC).
Memory devices typically include a plurality of memory cells, which may be configured in rows, columns, or arrays of rows and columns. In such cases, each group of regular OTP memory cells may be associated with one or more dedicated memory cell for testing the support circuitry.
In
Support circuitry 578-B is configured to support all of the regular OTP memory cells in the row as well as the dedicated memory cell. In addition to the above listed examples, support circuitry 578-B may also be a row driver.
Memory 510 of
Thus, the extra row and column of dedicated memory cells may be utilized in pretesting portions of the support circuitry 518 such as row drivers (each dedicated memory cell in the extra column), column multiplexers (each dedicated memory cell in the extra row), and the like.
Memory 510 of
On the other hand, the regular OTP cells are not programmed during the pretest. Thus, the cells are still available for use despite the fact that 100% of the memories may have been tested.
Memory 510 of
The invention also includes methods. Some are methods of determining whether portions of a memory are usable without programming the portions intended to store the information. Others are methods for pretesting support circuitry for a memory device in a memory manufacturing and testing system.
These methods can be implemented in any number of ways, including the structures described in this document. One such way is by machine operations, of devices of the type described in this document.
Another optional way is for one or more of the individual operations of the methods to be performed in conjunction with one or more human operators performing some. These human operators need not be collocated with each other, but each can be only with a machine that performs a portion of the program.
The invention additionally includes programs, and methods of operation of the programs. A program is generally defined as a group of steps or operations leading to a desired result, due to the nature of the elements in the steps and their sequence. A program is usually advantageously implemented as a sequence of steps or operations for a processor, such as the structures described above.
Performing the steps, instructions, or operations of a program requires manipulation of physical quantities. Usually, though not necessarily, these quantities may be transferred, combined, compared, and otherwise manipulated or processed according to the steps or instructions, and they may also be stored in a computer-readable medium. These quantities include, for example, electrical, magnetic, and electromagnetic charges or particles, states of matter, and in the more general case can include the states of any physical devices or elements. It is convenient at times, principally for reasons of common usage, to refer to information represented by the states of these quantities as bits, data bits, samples, values, symbols, characters, terms, numbers, or the like. It should be borne in mind, however, that all of these and similar terms are associated with the appropriate physical quantities, and that these terms are merely convenient labels applied to these physical quantities, individually or in groups.
The invention furthermore includes storage media. Such media, individually or in combination with others, have stored thereon instructions of a program made to execute the methods according to the invention. A storage medium according to the invention is a computer-readable medium, such as a memory, and is read by a processor of the type mentioned above. If a memory, it can be implemented in a number of ways, such as Read Only Memory (ROM), Random Access Memory (RAM), and the like, some of which are volatile and some non-volatile.
Even though it is said that the program may be stored in a computer-readable medium, it should be clear to a person skilled in the art that it need not be a single memory, or even a single machine. Various portions, modules or features of it may reside in separate memories, or even separate machines. The separate machines may be connected directly, or through a network such as a local access network (LAN) or a global network such as the Internet.
Often, for the sake of convenience only, it is desirable to implement and describe a program as software. The software can be unitary, or thought in terms of various interconnected distinct software modules.
This detailed description is presented largely in terms of flowcharts, algorithms, and symbolic representations of operations on data bits on and/or within at least one medium that allows computational operations, such as a computer with memory. Indeed, such descriptions and representations are the type of convenient labels used by those skilled in programming and/or the data processing arts to effectively convey the substance of their work to others skilled in the art. A person skilled in the art of programming may use these descriptions to readily generate specific instructions for implementing a program according to the present invention.
Embodiments of support circuit pretesting system can be implemented as a combination of hardware and software. It is advantageous to consider such a system as subdivided into components or modules. A person skilled in the art will recognize that some of these components or modules can be implemented as hardware, some as software, some as firmware, and some as a combination.
Methods are now described more particularly according to embodiments.
Process 600 begins at optional operation 610, where an OTP memory is manufactured. Manufacturing process is typically associated with testing of the manufactured memory to some degree.
According to a next optional operation 620, dedicated memory cells within the manufactured memory are selected. The selection and subsequent testing utilizing these cells may be performed by a test device providing instructions to the manufactured memory or by a test program stored within the device enabling the memory to perform a self-test routine.
According to a next operation 630, the support circuit is pretested by programming the dedicated memory cells only and not the regular memory cells. This way, OTP memories with good cells are not wasted during the test process.
According to a next decision operation 640, a determination is made whether the pretesting was successful. If the pretest was indeed successful, the tested memory is designated as “Usable” in the next operation 650.
According to a next optional operation 660, the regular OTP cells of the “Usable” memory are programmed according to manufacturing specifications.
If the determination at decision operation 640 is that the pretest was not successful, the tested memory is designated as “Not-Usable” memory in the next operation 670.
According to a next optional operation 680, the “Not-Usable” designated memories may be discarded.
The pretesting operation 630 of
According to a next operation 634, the programmed dedicated memory cells are read. In some embodiments, the fact that the programmed dedicated memory cells can be read alone may be an indication of successful pretesting of a portion of the support circuitry and the actual read value(s) may not matter.
According to a next optional operation 636, the programmed value(s) of the dedicated memory cells is compared to the read value(s) or expected value(s). The comparison is then used to determine whether the pretest was successful or not.
According to a next optional operation, the unprogrammed regular OTP cells may also be read. Since they are known not to have been programmed, the regular OTP cells should not provide a programmed value in a read operation. If they do, the memory may be designated as “Not-Usable”. In practical implementations, this may indicate a short in the support lines which results in the regular cells also being programmed when the dedicated cells are programmed.
The operations included in processes 600 and 630 are for illustration purposes. Pretesting support circuitry using dedicated memory cells may be implemented by similar processes with fewer or additional steps, as well as in different order of operations using the principles described herein.
An example memory 710 during manufacturing 740 includes regular unprogrammed OTP memory cells and dedicated unprogrammed memory cells associated with groups of the regular OTP memory cells.
During the pretest step 750, the dedicated memory cells of all or a sampled group of memories are programmed (752). As a result of the pretest step 750, a portion of the memories may fail the test and designated “Unusable” (753).
Subsequently, any untested memories and the “Usable” memories (755) that successfully pass the pretest are regularly programmed during the regular programming step 760. Thus, no memories are wasted in testing (757).
During the regular programming the regular OTP memory cells of all memories are programmed (762). Still, a portion of the memories may fail the regular programming (763) and be discarded, but their percentage is likely to be smaller due to the pretest step resulting in an increase in the successfully programmed memories 765 and no wasted memories in pretesting.
In
In
Finally,
The multi-array memory device 970 of
According to some embodiments, each of the arrays may include a row (an extra row) of dedicated memory test cells for pretesting the column logic 976, while the row logic 972 shared by all arrays may be pretested by a single extra column of dedicated memory test cells (971) in the last array.
Other configurations of multi-array memory devices in light of the different configurations shown in
In this description, numerous details have been set forth in order to provide a thorough understanding. In other instances, well-known features have not been described in detail in order to not obscure unnecessarily the description.
A person skilled in the art will be able to practice the embodiments in view of this description, which is to be taken as a whole. The specific embodiments as disclosed and illustrated herein are not to be considered in a limiting sense. Indeed, it should be readily apparent to those skilled in the art that what is described herein may be modified in numerous ways. Such ways can include equivalents to what is described herein.
The following claims define certain combinations and sub-combinations of elements, features, steps, and/or functions, which are regarded as novel and non-obvious. Additional claims for other combinations and sub-combinations may be presented in this or a related document.
This utility patent application claims the benefit of U.S. Provisional Application Ser. No. 60/837,679 filed on Aug. 15, 2006, which is hereby claimed under 35 U.S.C. §119(e). The provisional application is incorporated herein by reference.
| Number | Name | Date | Kind |
|---|---|---|---|
| 4158239 | Bertin | Jun 1979 | A |
| 4384288 | Walton | May 1983 | A |
| 4388524 | Walton | Jun 1983 | A |
| 4541073 | Brice et al. | Sep 1985 | A |
| 4546241 | Walton | Oct 1985 | A |
| 4571704 | Bohac, Jr. | Feb 1986 | A |
| 4580041 | Walton | Apr 1986 | A |
| 4758869 | Eitan et al. | Jul 1988 | A |
| 4935702 | Mead et al. | Jun 1990 | A |
| 4953928 | Anderson et al. | Sep 1990 | A |
| 5018102 | Houston | May 1991 | A |
| 5068622 | Mead et al. | Nov 1991 | A |
| 5086331 | Hartgring et al. | Feb 1992 | A |
| 5124568 | Chen et al. | Jun 1992 | A |
| 5146106 | Anderson et al. | Sep 1992 | A |
| 5272368 | Turner et al. | Dec 1993 | A |
| 5301150 | Sullivan et al. | Apr 1994 | A |
| 5323066 | Feddeler et al. | Jun 1994 | A |
| 5361001 | Stolfa | Nov 1994 | A |
| 5384727 | Moyal et al. | Jan 1995 | A |
| 5394367 | Downs et al. | Feb 1995 | A |
| 5412594 | Moyal et al. | May 1995 | A |
| 5430670 | Rosenthal | Jul 1995 | A |
| 5438542 | Atsumi et al. | Aug 1995 | A |
| 5463348 | Sarpeshkar et al. | Oct 1995 | A |
| 5504707 | Koizumi | Apr 1996 | A |
| 5517044 | Koyama | May 1996 | A |
| 5541878 | LeMoncheck et al. | Jul 1996 | A |
| 5596524 | Lin et al. | Jan 1997 | A |
| 5598369 | Chen et al. | Jan 1997 | A |
| 5616942 | Song | Apr 1997 | A |
| 5617358 | Kodama | Apr 1997 | A |
| 5623442 | Gotou et al. | Apr 1997 | A |
| 5627392 | Diorio | May 1997 | A |
| 5633518 | Broze | May 1997 | A |
| 5650966 | Cleveland et al. | Jul 1997 | A |
| 5657271 | Mori | Aug 1997 | A |
| 5659498 | Pascucci et al. | Aug 1997 | A |
| 5666307 | Chang | Sep 1997 | A |
| 5677917 | Wheelus et al. | Oct 1997 | A |
| 5687118 | Chang | Nov 1997 | A |
| 5691939 | Chang et al. | Nov 1997 | A |
| 5706227 | Chang et al. | Jan 1998 | A |
| 5717636 | Dallabora et al. | Feb 1998 | A |
| 5729155 | Kobatake | Mar 1998 | A |
| 5731716 | Pascucci | Mar 1998 | A |
| 5736764 | Chang | Apr 1998 | A |
| 5754471 | Peng et al. | May 1998 | A |
| 5761121 | Chang | Jun 1998 | A |
| 5763912 | Parat et al. | Jun 1998 | A |
| 5777361 | Parris et al. | Jul 1998 | A |
| 5777926 | Trinh et al. | Jul 1998 | A |
| 5784327 | Hazani | Jul 1998 | A |
| 5786617 | Merrill et al. | Jul 1998 | A |
| 5790060 | Tesch | Aug 1998 | A |
| 5796656 | Kowshik et al. | Aug 1998 | A |
| 5798967 | Sarin et al. | Aug 1998 | A |
| 5801994 | Chang et al. | Sep 1998 | A |
| 5822714 | Cato | Oct 1998 | A |
| 5825063 | Diorio et al. | Oct 1998 | A |
| 5835402 | Rao et al. | Nov 1998 | A |
| 5841165 | Chang et al. | Nov 1998 | A |
| 5844300 | Alavi et al. | Dec 1998 | A |
| 5854762 | Pascucci | Dec 1998 | A |
| 5875126 | Minch et al. | Feb 1999 | A |
| 5886566 | Park et al. | Mar 1999 | A |
| 5890199 | Downs | Mar 1999 | A |
| 5892709 | Parris et al. | Apr 1999 | A |
| 5892712 | Hirose et al. | Apr 1999 | A |
| 5898613 | Diorio et al. | Apr 1999 | A |
| 5901084 | Ohnakado | May 1999 | A |
| 5912841 | Kim | Jun 1999 | A |
| 5912842 | Chang et al. | Jun 1999 | A |
| 5912937 | Goetting et al. | Jun 1999 | A |
| 5914894 | Diorio et al. | Jun 1999 | A |
| 5939945 | Thewes et al. | Aug 1999 | A |
| 5966329 | Hsu et al. | Oct 1999 | A |
| 5969987 | Blyth et al. | Oct 1999 | A |
| 5972804 | Tobin et al. | Oct 1999 | A |
| 5982669 | Kalnitsky et al. | Nov 1999 | A |
| 5986927 | Minch et al. | Nov 1999 | A |
| 5990512 | Diorio et al. | Nov 1999 | A |
| 6011425 | Oh et al. | Jan 2000 | A |
| 6028789 | Mehta et al. | Feb 2000 | A |
| 6041000 | McClure et al. | Mar 2000 | A |
| 6049229 | Manohar et al. | Apr 2000 | A |
| 6055185 | Kalnitsky et al. | Apr 2000 | A |
| 6060919 | Wilson et al. | May 2000 | A |
| 6081451 | Kalnitsky et al. | Jun 2000 | A |
| 6111785 | Hirano | Aug 2000 | A |
| 6125053 | Diorio et al. | Sep 2000 | A |
| 6137721 | Kalnitsky et al. | Oct 2000 | A |
| 6137722 | Kalnitsky et al. | Oct 2000 | A |
| 6137723 | Bergemont et al. | Oct 2000 | A |
| 6137724 | Kalnitsky et al. | Oct 2000 | A |
| 6141247 | Roohparvar et al. | Oct 2000 | A |
| 6143607 | Chi | Nov 2000 | A |
| 6144581 | Diorio et al. | Nov 2000 | A |
| 6151238 | Smit et al. | Nov 2000 | A |
| 6166954 | Chern | Dec 2000 | A |
| 6166978 | Goto | Dec 2000 | A |
| 6181601 | Chi | Jan 2001 | B1 |
| 6190968 | Kalnitsky et al. | Feb 2001 | B1 |
| 6208557 | Bergemont et al. | Mar 2001 | B1 |
| 6214666 | Mehta | Apr 2001 | B1 |
| 6222765 | Nojima | Apr 2001 | B1 |
| 6222771 | Tang et al. | Apr 2001 | B1 |
| 6236223 | Brady et al. | May 2001 | B1 |
| 6294427 | Furuhata et al. | Sep 2001 | B1 |
| 6294810 | Li et al. | Sep 2001 | B1 |
| 6294997 | Paratore et al. | Sep 2001 | B1 |
| 6320788 | Sansbury et al. | Nov 2001 | B1 |
| 6331949 | Hirano | Dec 2001 | B1 |
| 6363006 | Naffziger et al. | Mar 2002 | B2 |
| 6363011 | Hirose et al. | Mar 2002 | B1 |
| 6373771 | Fifield et al. | Apr 2002 | B1 |
| 6384451 | Caywood | May 2002 | B1 |
| 6385000 | Ottesen et al. | May 2002 | B1 |
| 6385090 | Kitazaki | May 2002 | B1 |
| 6400622 | Fujiwara | Jun 2002 | B1 |
| 6407953 | Cleeves | Jun 2002 | B1 |
| 6411545 | Caywood | Jun 2002 | B1 |
| 6442074 | Hamilton et al. | Aug 2002 | B1 |
| 6452835 | Diorio et al. | Sep 2002 | B1 |
| 6456992 | Shibata et al. | Sep 2002 | B1 |
| 6469930 | Murray | Oct 2002 | B1 |
| 6469937 | Fuchigami et al. | Oct 2002 | B2 |
| 6477103 | Nguyen et al. | Nov 2002 | B1 |
| 6477672 | Satoh | Nov 2002 | B1 |
| 6479863 | Caywood | Nov 2002 | B2 |
| 6510086 | Kato et al. | Jan 2003 | B2 |
| 6515919 | Lee | Feb 2003 | B1 |
| 6529407 | Shukuri | Mar 2003 | B2 |
| 6534816 | Caywood | Mar 2003 | B1 |
| 6538468 | Moore | Mar 2003 | B1 |
| 6563731 | Bergemont | May 2003 | B1 |
| 6573765 | Bales et al. | Jun 2003 | B2 |
| 6590825 | Tran et al. | Jul 2003 | B2 |
| 6611463 | Mehta et al. | Aug 2003 | B1 |
| 6633188 | Jia et al. | Oct 2003 | B1 |
| 6641050 | Kelley et al. | Nov 2003 | B2 |
| 6646919 | Madurawe et al. | Nov 2003 | B1 |
| 6654272 | Santin et al. | Nov 2003 | B2 |
| 6661278 | Gilliland | Dec 2003 | B1 |
| 6664909 | Hyde et al. | Dec 2003 | B1 |
| 6678190 | Yang et al. | Jan 2004 | B2 |
| 6693819 | Smith et al. | Feb 2004 | B2 |
| 6724657 | Shukuri | Apr 2004 | B2 |
| 6741500 | DeShazo et al. | May 2004 | B2 |
| 6781881 | Chih | Aug 2004 | B2 |
| 6822894 | Costello et al. | Nov 2004 | B1 |
| 6845029 | Santin et al. | Jan 2005 | B2 |
| 6853583 | Diorio et al. | Feb 2005 | B2 |
| 6898123 | Owen | May 2005 | B2 |
| 6903436 | Luo et al. | Jun 2005 | B1 |
| 6909389 | Hyde et al. | Jun 2005 | B1 |
| 6946892 | Mitarashi | Sep 2005 | B2 |
| 6950342 | Lindhorst et al. | Sep 2005 | B2 |
| 7046549 | Lee et al. | May 2006 | B2 |
| 7106642 | Hojo | Sep 2006 | B2 |
| 7177182 | Diorio et al. | Feb 2007 | B2 |
| 7221596 | Pesavento et al. | May 2007 | B2 |
| 7283390 | Pesavento | Oct 2007 | B2 |
| 7307534 | Pesavento | Dec 2007 | B2 |
| 7388420 | Diorio et al. | Jun 2008 | B2 |
| 7474568 | Horch | Jan 2009 | B2 |
| 7486537 | Scheuerlein et al. | Feb 2009 | B2 |
| 7508719 | Horch | Mar 2009 | B2 |
| 7573749 | Diorio et al. | Aug 2009 | B2 |
| 20010035216 | Kyle | Nov 2001 | A1 |
| 20010035816 | Beigel et al. | Nov 2001 | A1 |
| 20020008271 | Hsu et al. | Jan 2002 | A1 |
| 20020020871 | Forbes | Feb 2002 | A1 |
| 20020027233 | Yamaki et al. | Mar 2002 | A1 |
| 20020122331 | Santin et al. | Sep 2002 | A1 |
| 20020159298 | Hirano | Oct 2002 | A1 |
| 20030123276 | Yokozeki | Jul 2003 | A1 |
| 20030183871 | Dugger et al. | Oct 2003 | A1 |
| 20030206437 | Diorio et al. | Nov 2003 | A1 |
| 20030218925 | Torjussen et al. | Nov 2003 | A1 |
| 20040004861 | Srinivas et al. | Jan 2004 | A1 |
| 20040017295 | Dishongh et al. | Jan 2004 | A1 |
| 20040021166 | Hyde et al. | Feb 2004 | A1 |
| 20040021170 | Caywood | Feb 2004 | A1 |
| 20040037127 | Lindhorst et al. | Feb 2004 | A1 |
| 20040052113 | Diorio et al. | Mar 2004 | A1 |
| 20040080982 | Roizin | Apr 2004 | A1 |
| 20040136245 | Makamura et al. | Jul 2004 | A1 |
| 20040195593 | Diorio et al. | Oct 2004 | A1 |
| 20040206999 | Hyde et al. | Oct 2004 | A1 |
| 20040263319 | Huomo | Dec 2004 | A1 |
| 20050063235 | Pesavento et al. | Mar 2005 | A1 |
| 20050105331 | Lee et al. | May 2005 | A1 |
| 20050149896 | Madurawe | Jul 2005 | A1 |
| 20050219931 | Diorio et al. | Oct 2005 | A1 |
| 20050251617 | Sinclair et al. | Nov 2005 | A1 |
| 20060123186 | Loh et al. | Jun 2006 | A1 |
| 20060133140 | Gutnik et al. | Jun 2006 | A1 |
| 20060133175 | Gutnik et al. | Jun 2006 | A1 |
| 20060221715 | Ma et al. | Oct 2006 | A1 |
| 20070140023 | Helfer et al. | Jun 2007 | A1 |
| 20070263456 | Wang et al. | Nov 2007 | A1 |
| 20080007284 | Balog | Jan 2008 | A1 |
| 20080023790 | Scheuerlein | Jan 2008 | A1 |
| 20080049519 | Horch | Feb 2008 | A1 |
| 20080056010 | Horch | Mar 2008 | A1 |
| 20080112238 | Kim et al. | May 2008 | A1 |
| 20080205150 | Pesavento | Aug 2008 | A1 |
| 20080279013 | Horch et al. | Nov 2008 | A1 |
| Number | Date | Country |
|---|---|---|
| 0326883 | Aug 1989 | EP |
| 0336500 | Oct 1989 | EP |
| 0298618 | Oct 1993 | EP |
| 0756379 | Jan 1997 | EP |
| 0776049 | Aug 2000 | EP |
| 0778623 | Jul 2001 | EP |
| 1327993 | Jul 2003 | EP |
| WO 2005106893 | Nov 2005 | WO |
| WO 2005109516 | Nov 2005 | WO |
| Number | Date | Country | |
|---|---|---|---|
| 60837679 | Aug 2006 | US |