Number | Name | Date | Kind |
---|---|---|---|
5378649 | Huang | Jan 1995 | |
5427649 | Kim et al. | Jun 1995 | |
5529953 | Shoda | Jun 1996 | |
5602053 | Zheng et al. | Feb 1997 | |
5602423 | Jain | Feb 1997 | |
5614765 | Avanzino et al. | Mar 1997 | |
5635423 | Huang et al. | Jun 1997 | |
5686354 | Avanzino et al. | Nov 1997 | |
5691238 | Avanzino et al. | Nov 1997 |
Entry |
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S. Wolf et al. "Silicon Processing for the VLSI Era" vol. 1, Lattice Press, Sunset Beach, CA, 1986, p. 443 (No Month). |