Claims
- 1. An optical encoder comprising:
- a light source emitting a light beam;
- a first grating to which said light beam emitted by said light source is directed, an n.sub.1 th order and an n.sub.2 th order diffraction beam being generated at said first grating, where n.sub.1 and n.sub.2 are integers, said n.sub.1 th order diffraction beam being directed to the opposite side, relative to said n.sub.2 th order diffraction beam, of the optical axis of said light beam emitted by said light source;
- a second grating to which said n.sub.1 th order and said n.sub.2 th order diffraction beams exiting from said first grating are directed, an m.sub.1 th order and an m.sub.2 th order diffraction beam being generated from said n.sub.1 th order and said n.sub.2 th order diffraction beams at said second grating, where m.sub.1 and m.sub.2 are integers; and
- displacement information obtaining means for obtaining information on a displacement of one of said first and second gratings, said information being obtained according to a movement of interference fringes formed by said m.sub.1 th order and said m.sub.2 th order diffraction beams exiting from said second grating,
- wherein said second grating comprises a transmission type grating.
- 2. The optical encoder as claimed in claim 1, further comprising reflecting means for reflecting said m.sub.1 th order and said m.sub.2 th order diffraction beams so that said m.sub.1 th order and said m.sub.2 th order diffraction beams return to said first grating by traveling the same paths and diffracted at said first grating twice and said second grating twice, and wherein said displacement information obtaining means obtaining said information in accordance with said m.sub.1 th order and said m.sub.2 th order diffraction beams returned to and exited from said first diffraction grating.
- 3. The optical encoder as claimed in claim 2, wherein said reflecting means comprises a mirror arranged behind said second grating.
- 4. The optical encoder as claimed in claim 1, further comprising reflecting means for reflecting said m.sub.1 th order and said m.sub.2 th order diffraction beams so that said m.sub.1 th order and said m.sub.2 th order diffraction beams return to said first grating by traveling the same paths and diffracted at said first grating twice and said second grating once, and wherein said displacement information obtaining means obtaining said information in accordance with said m.sub.1 th order and said m.sub.2 th order diffraction beams returned to and exited from said first diffraction grating.
- 5. The optical encoder as claimed in claim 4, wherein said reflecting means comprises a reflecting material formed on said second grating.
- 6. The optical encoder as claimed in claim 1, wherein one of said first and second gratings comprises a first area having first lines and a second area having second lines, said first lines being spatially shifted relative to said second lines by a first predetermined value so that said first area forms first interference fringes spatially shifted by a second predetermined value relative to second interference fringes formed by said second area, and said displacement information obtaining means comprises four light-receiving elements so that signals having different phases are obtained in order to obtain said information including displacement and moving direction.
- 7. The optical encoder as claimed in claim 6, wherein when said first grating has said first and second areas, and when the n.sub.1 th order diffraction beam is used at said first area and the n.sub.2 th order diffraction beam is used at said second area, said first predetermined value is equal to 2.pi./(4.vertline.n.sub.1 -n.sub.2 .vertline.).
- 8. The optical encoder as claimed in claim 6, wherein when said second grating has said first and second areas, and when the m.sub.1 th order diffraction beam is used at said first area and the m.sub.2 th order diffraction beam is used at said second area, said first predetermined value is equal to 2.pi./(4.vertline.m.sub.1 -m.sub.2 .vertline.).
- 9. The optical encoder as claimed in claim 6, wherein a first interference fringe area is formed according to said first area, and a second interference fringe area is formed according to said second area, two of said four light-receiving elements being arranged in said first interference fringe area in a direction perpendicular to a direction of extent of the first interference fringe, and the other two of said four light-receiving elements being arranged in said second interference fringe area in a direction perpendicular to the second interference fringe.
- 10. An optical encoder comprising:
- a light source emitting a light beam;
- first grating to which said light beam emitted by said light source is directed, an n.sub.1 th order and an n.sub.2 th order diffraction beam being generated at said first grating, where n.sub.1 and n.sub.2 are integers, said n.sub.1 th order diffraction beam being directed to the opposite side, relative to said n.sub.2 th order diffraction beam, of the optical axis of said light beam emitted by said light source;
- a second grating to which said n.sub.1 th order and said n.sub.2 th order diffraction beams exiting from said first grating are directed, an m.sub.1 th order and an m.sub.2 th order diffraction beam being generated from said n.sub.1 th order and said n.sub.2 th order diffraction beams at said second grating, where m.sub.1 and m.sub.2 are integers;
- displacement information obtaining means for obtaining information on a displacement of one of said first and second gratings, said information being obtained according to a movement of interference fringes formed by said m.sub.1 th order and said m.sub.2 th order diffraction beams exiting from said second grating; and
- reflecting means for reflecting said m.sub.1 th order and said m.sub.2 th order diffraction beams so that said m.sub.1 th order and said m.sub.2 th order diffraction beams return to said first grating by traveling the same paths and diffracted at said first grating twice and said second grating twice, and wherein said displacement information obtaining means obtaining said information in accordance with said m.sub.1 th order and said m.sub.2 th order diffraction beams returned to and exited from said first diffraction grating.
- 11. An optical encoder comprising:
- a light source emitting a light beam;
- a first grating to which said light beam emitted by said light source is directed, an n.sub.1 th order and an n.sub.2 th order diffraction beam being generated at said first grating, where n.sub.1 and n.sub.2 are integers, said n.sub.1 th order diffraction beam being directed to the opposite side, relative to said n.sub.2 th order diffraction beam, of the optical axis of said light beam emitted by said light source;
- a second grating to which said n.sub.1 th order and said n.sub.2 th order diffraction beams exiting from said first grating are directed, an m.sub.1 th order and an m.sub.2 th order diffraction beam being generated from said n.sub.1 th order and said n.sub.2 th order diffraction beams at said second grating, where m.sub.1 and m.sub.2 are integers;
- displacement information obtaining means for obtaining information on a displacement of one of said first and second gratings, said information being obtained according to a movement of interference fringes formed by said m.sub.1 th order and said m.sub.2 th order diffraction beams exiting from said second grating; and
- reflecting means for reflecting said m.sub.1 th order and said m.sub.2 th order diffraction beams so that said m.sub.1 th order and said m.sub.2 th order diffraction beams return to said first grating by traveling the same paths and diffracted at said first grating twice and said second grating twice, and wherein said displacement information obtaining means obtaining said information in accordance with said m.sub.1 th order and said m.sub.2 th order diffraction beams returned to and exited from said first diffraction grating,
- wherein said reflecting means comprises a mirror arranged behind said second grating.
- 12. An optical encoder comprising:
- a light source emitting a light beam;
- a first grating to which said light beam emitted by said light source is directed, an n.sub.1 th order and an n.sub.2 th order diffraction beam being generated at said first grating, where n.sub.1 and n.sub.2 are integers, said n.sub.1 th order diffraction beam being directed to the opposite side, relative to said n.sub.2 th order diffraction beam, of the optical axis of said light beam emitted by said light source;
- a second grating to which said n.sub.1 th order and said n.sub.2 th order diffraction beams exiting from said first grating are directed, an m.sub.1 th order and an m.sub.2 th order diffraction beam being generated from said n.sub.1 th order and said n.sub.2 th order diffraction beams at said second grating, where m.sub.1 and m.sub.2 are integers; and
- displacement information obtaining means for obtaining information on a displacement of one of said first and second gratings, said information being obtained according to a movement of interference fringes formed by said m.sub.1 th order and said m.sub.2 th order diffraction beams exiting from said second grating,
- wherein one of said first and second gratings comprises a first area having first lines and a second area having second lines, said first lines being spatially shifted relative to said second lines by a first predetermined value so that said first area forms first interference fringes spatially shifted by a second predetermined value relative to second interference fringes formed by said second area, and said displacement information obtaining means comprises four light-receiving elements so that signals having different phases are obtained in order to obtain said information including displacement and moving direction.
- 13. An optical encoder comprising:
- a light source emitting a light beam;
- a first grating to which said light beam emitted by said light source is directed, an n.sub.1 th order and an n.sub.2 th order diffraction beam being generated at said first grating, where n.sub.1 and n.sub.2 are integers, said n.sub.1 th order diffraction beam being directed to the opposite side, relative to said n.sub.2 th order diffraction beam, of the optical axis of said light beam emitted by said light source;
- a second grating to which said n.sub.1 th order and said n.sub.2 th order diffraction beams exiting from said first grating are directed, an m.sub.1 th order and an m.sub.2 th order diffraction beam being generated from said n.sub.1 th order and said n.sub.2 th order diffraction beams at said second grating, where m.sub.1 and m.sub.2 are integers; and
- displacement information obtaining means for obtaining information on a displacement of one of said first and second gratings, said information being obtained according to a movement of interference fringes formed by said m.sub.1 th order and said m.sub.2 th order diffraction beams exiting from said second grating,
- wherein one of said first and second gratings comprises a first area having first lines and a second area having second lines, said first lines being shifted relative to said second lines by a first predetermined value so that said first area forms first interference fringes shifted by a second predetermined value relative to second interference fringes formed by said second area, said displacement information obtaining means comprises four light-receiving elements so that signals having different phases are obtained in order to obtain said information including displacement and moving direction, and when said first grating has said first and second areas and when the n.sub.1 th order diffraction beam is used at said first area and the n.sub.2 th order diffraction beam is used at said second area, said first predetermined value is equal to 2.pi./(4.vertline.n.sub.1 -n.sub.2 .vertline.).
- 14. An optical encoder comprising:
- a light source emitting a light beam;
- a first grating to which said light beam emitted by said light source is directed, an n.sub.1 th order and an n.sub.2 th order diffraction beam being generated at said first grating, where n.sub.1 and n.sub.2 are integers, said n.sub.1 th order diffraction beam being directed to the opposite side, relative to said n.sub.2 th order diffraction beam, of the optical axis of said light beam emitted by said light source;
- a second grating to which said n.sub.1 th order and said n.sub.2 th order diffraction beams exiting from said first grating are directed, an m.sub.1 th order and an m.sub.2 th order diffraction beam being generated from said n.sub.1 th order and said n.sub.2 th order diffraction beams at said second grating, where m.sub.1 and m.sub.2 are integers; and
- displacement information obtaining means for obtaining information on a displacement of one of said first and second gratings, said information being obtained according to a movement of interference fringes formed by said m.sub.1 th order and said m.sub.2 th order diffraction beams exiting from said second grating,
- wherein one of said first and second gratings comprises a first area having first lines and a second area having second lines, said first lines being shifted relative to said second lines by a first predetermined value so that said first area forms first interference fringes shifted by a second predetermined value relative to second interference fringes formed by said second area, said displacement information obtaining means comprises four light-receiving elements so that signals having different phases are obtained in order to obtain said information including displacement and moving direction, and when said second grating has said first and second areas and when the m.sub.1 th order diffraction beam is used at said first area and the m.sub.2 th order diffraction beam is used at said second area, said first predetermined value is equal to 2.pi./(4.vertline.m.sub.1 -m.sub.2 .vertline.).
- 15. An optical encoder comprising:
- a light source emitting a light beam;
- a first grating to which said light beam emitted by said light source is directed, an n.sub.1 th order and an n.sub.2 th order diffraction beam being generated at said first grating, where n.sub.1 and n.sub.2 are integers, said n.sub.1 th order diffraction beam being directed to the opposite side, relative to said n.sub.2 th order diffraction beam, of the optical axis of said light beam emitted by said light source;
- a second grating to which said n.sub.1 th order and said n.sub.2 th order diffraction beams exiting from said first grating are directed, an m.sub.1 th order and an m.sub.2 th order diffraction beam being generated from said n.sub.1 th order and said n.sub.2 th order diffraction beams at said second grating, where m.sub.1 and m.sub.2 are integers; and
- displacement information obtaining means for obtaining information on a displacement of one of said first and second gratings, said information being obtained according to a movement of interference fringes formed by said m.sub.1 th order and said m.sub.2 th order diffraction beams exiting from said second grating,
- wherein one of said first and second gratings comprises a first area having first lines and a second area having second lines, said first lines being shifted relative to said second lines by a first predetermined value so that said first area forms first interference fringes shifted by a second predetermined value relative to second interference fringes formed by said second area, said displacement information obtaining means comprises four light-receiving elements so that signals having different phases are obtained in order to obtain said information including displacement and moving direction, a first interference fringe area is formed according to said first area, a second interference fringe area is formed according to said second area, two of said four light-receiving elements being arranged in said first interference fringe area in a direction perpendicular to a direction of extent of the first interference fringe, and the other two of said four light-receiving elements being arranged in said second interference fringe area in a direction perpendicular to the second interference fringe.
Priority Claims (3)
Number |
Date |
Country |
Kind |
5-115300 |
Apr 1993 |
JPX |
|
5-353764 |
Dec 1993 |
JPX |
|
6-060097 |
Mar 1994 |
JPX |
|
Parent Case Info
This is Division, of application Ser. No. 08/542,377 filed on Oct. 12, 1995, now U.S. Pat. No. 5,652,426 which is a Continuation of application Ser. No. 08/229,408 filed on Apr. 18, 1994 now abandoned.
US Referenced Citations (8)
Divisions (1)
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Number |
Date |
Country |
Parent |
542377 |
Oct 1995 |
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Continuations (1)
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Number |
Date |
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Parent |
229408 |
Apr 1994 |
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