Number | Date | Country | Kind |
---|---|---|---|
6-094612 | May 1994 | JPX | |
6-226395 | Sep 1994 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
2183249 | Schering et al. | Dec 1939 | |
2186123 | Rantsch et al. | Jan 1940 | |
2326970 | Rantsch | Aug 1943 | |
2803163 | Ulffers | Aug 1957 | |
2991691 | Schering | Jul 1961 | |
3667832 | Kitano et al. | Jun 1972 | |
4497015 | Konno et al. | Jan 1985 | |
4769750 | Matsumoto et al. | Sep 1988 | |
4949630 | Kikuchi et al. | Jul 1990 | |
4988188 | Ohta | Jan 1991 | |
5237367 | Kudo | Aug 1993 | |
5245384 | Mori | Sep 1993 | |
5418583 | Matsumoto | May 1995 | |
5471345 | Gal et al. | Nov 1995 |
Number | Date | Country |
---|---|---|
4-196513 | Jul 1992 | JPX |
Entry |
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Jere D. Buckley and Charles Karatzas, "Step and scan: A systems overview of a new lithography tool," SPIE vol. 1088 Optical/Laser Microlithography II (1989), pp. 424-433. |