| Number | Name | Date | Kind |
|---|---|---|---|
| 1671272 | Buckingham | May 1928 | |
| 2873776 | Buttke | Feb 1959 | |
| 2933013 | Baker et al. | Apr 1960 | |
| 3712262 | Kisselmann et al. | Jan 1973 | |
| 3718168 | Berends | Feb 1973 | |
| 3889187 | Kisselmann et al. | Jun 1975 | |
| 4255056 | Peterson | Mar 1981 | |
| 4257164 | Task et al. | Mar 1981 | |
| 4417834 | Jagers | Nov 1983 | |
| 4436126 | Lawson | Mar 1984 | |
| 4986631 | Aoki et al. | Jan 1991 | |
| 5191485 | Kahle | Mar 1993 | |
| 5261349 | Iino et al. | Nov 1993 | |
| 5335114 | Suzuki | Aug 1994 |
| Number | Date | Country |
|---|---|---|
| 1 417 228 | Feb 1996 | FRX |
| 891 926 | Oct 1953 | DEX |
| 154 546 | Aug 1932 | CHX |
| 213962 | Jun 1941 | CHX |
| 320840 | May 1957 | CHX |
| 856178 | Dec 1960 | GBX |
| Entry |
|---|
| F. Schedewie, M. Kallmeyer, B; Solf, D. Wagner: "Ein neues elektrooptisches Kantenfindermikroscop fur die Halbleitertechnologie" Internationale Elektronische Rundschau, vol. 25, Apr. 1971, p. 93 XP002046125 *figure 1*. |