Number | Name | Date | Kind |
---|---|---|---|
RE34425 | Schultz | Nov 1993 | |
3137977 | Graves | Jun 1964 | |
3156073 | Strasbaugh | Nov 1964 | |
3170273 | Walsh | Feb 1965 | |
3342652 | Reisman et al. | Sep 1967 | |
3559346 | Paola | Feb 1971 | |
3708921 | Cronkhite et al. | Jan 1973 | |
3748790 | Pizzarello et al. | Jul 1973 | |
3841031 | Walsh | Oct 1974 | |
3906678 | Roth | Dec 1975 | |
3962832 | Strasbaugh | Jun 1976 | |
3978622 | Mazur et al. | Dec 1976 | |
3986433 | Walsh et al. | Oct 1976 | |
4143490 | Wood | Mar 1979 | |
4239567 | Winings | Dec 1980 | |
4256535 | Banks | Mar 1981 | |
4257194 | Cailloux | Mar 1981 | |
4373991 | Banks | Feb 1983 | |
4380412 | Walsh | Apr 1983 | |
4525954 | Larsen | Jul 1985 | |
4653231 | Cronkhite et al. | Mar 1987 | |
4680893 | Cronkhite et al. | Jul 1987 | |
4831784 | Takahashi | May 1989 | |
4839993 | Masuko et al. | Jun 1989 | |
4873792 | Linke et al. | Oct 1989 | |
4918870 | Torbert et al. | Apr 1990 | |
4940507 | Harbarger | Jul 1990 | |
4944836 | Beyer et al. | Jul 1990 | |
4956313 | Cote et al. | Sep 1990 | |
4992135 | Doan | Feb 1991 | |
4996798 | Moore | Mar 1991 | |
5020283 | Tuttle | Jun 1991 | |
5036015 | Sandhu et al. | Jul 1991 | |
5064683 | Poon et al. | Nov 1991 | |
5069002 | Sandhu et al. | Dec 1991 | |
5081796 | Schultz | Jan 1992 | |
5114875 | Baker et al. | May 1992 | |
5169491 | Doan | Dec 1992 | |
5205077 | Wittstock | Apr 1993 | |
5205082 | Shendon et al. | Apr 1993 | |
5209816 | Yu et al. | May 1993 | |
5216843 | Breivogel et al. | May 1993 | |
5222329 | Yu | Jun 1993 | |
5225034 | Yu et al. | Jul 1993 | |
5232875 | Tuttle et al. | Aug 1993 | |
5234867 | Schultz et al. | Aug 1993 | |
5244534 | Yu et al. | Sep 1993 | |
5297364 | Tuttle | Mar 1994 | |
5302233 | Kim et al. | Apr 1994 | |
5333413 | Hashimoto | Aug 1994 |
Number | Date | Country |
---|---|---|
0121707 | Oct 1984 | EPX |
0593057 | Apr 1994 | EPX |
3411120 | Nov 1984 | DEX |
4302067 | Jan 1993 | DEX |
Entry |
---|
Pp. 20 to 24 of EBARA CMP System Brochure. |