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B24B37/042
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PERFORMING OPERATIONS TRANSPORTING
B24
Grinding technology
B24B
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
B24B37/00
Lapping machines or devices Accessories
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B24B37/042
operating processes therefor
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate polishing apparatus and substrate polishing method
Patent number
12,318,881
Issue date
Jun 3, 2025
Ebara Corporation
Takuya Fujimoto
B24 - GRINDING POLISHING
Information
Patent Grant
Double-sided polishing method for optical lens
Patent number
12,318,884
Issue date
Jun 3, 2025
Dalian University of Technology
Jiang Guo
B24 - GRINDING POLISHING
Information
Patent Grant
Resistivity-based adjustment of thresholds for in-situ monitoring
Patent number
12,320,883
Issue date
Jun 3, 2025
Applied Materials, Inc.
Kun Xu
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Monolithic platen
Patent number
12,311,498
Issue date
May 27, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Tsung-Lung Lai
B24 - GRINDING POLISHING
Information
Patent Grant
Method of double-side polishing work, method of producing work, and...
Patent number
12,311,496
Issue date
May 27, 2025
Sumco Corporation
Kazushige Takaishi
B24 - GRINDING POLISHING
Information
Patent Grant
Pressure signals during motor torque monitoring to provide spatial...
Patent number
12,311,494
Issue date
May 27, 2025
Applied Materials, Inc.
Thomas Li
B24 - GRINDING POLISHING
Information
Patent Grant
System and method for removing debris during chemical mechanical pl...
Patent number
12,311,501
Issue date
May 27, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Wei Hsu
B24 - GRINDING POLISHING
Information
Patent Grant
High throughput polishing modules and modular polishing systems
Patent number
12,308,272
Issue date
May 20, 2025
Applied Materials, Inc.
Jagan Rangarajan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for thinning substrates for semiconductor devices
Patent number
12,290,900
Issue date
May 6, 2025
Qorvo US, Inc.
Krishna Chetry
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer surface chemical distribution sensing system and methods for...
Patent number
12,285,837
Issue date
Apr 29, 2025
SanDisk Technologies, Inc.
Shota Yatsuzuka
B24 - GRINDING POLISHING
Information
Patent Grant
End point detection method, polishing apparatus, and polishing method
Patent number
12,285,836
Issue date
Apr 29, 2025
Ebara Corporation
Taro Takahashi
B24 - GRINDING POLISHING
Information
Patent Grant
Wafer edge asymmetry correction using groove in polishing pad
Patent number
12,285,838
Issue date
Apr 29, 2025
Applied Materials, Inc.
Jimin Zhang
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate polishing apparatus, substrate polishing system including...
Patent number
12,280,466
Issue date
Apr 22, 2025
Samsung Electronics Co., Ltd.
Jaehyug Lee
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus and methods for susceptor deposition material removal
Patent number
12,280,465
Issue date
Apr 22, 2025
Applied Materials, Inc.
Vijayabhaskara Venkatagiriyappa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Mounting press, grinding and/or polishing device, and production li...
Patent number
12,263,548
Issue date
Apr 1, 2025
ATM Qness GmbH
Robert Höll
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Grinding method for workpiece and grinding apparatus
Patent number
12,263,553
Issue date
Apr 1, 2025
Disco Corporation
Keisuke Yamamoto
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical polishing apparatus and method
Patent number
12,251,789
Issue date
Mar 18, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Hsi Huang
B24 - GRINDING POLISHING
Information
Patent Grant
Planarization strategy in nano-sized fabrication
Patent number
12,254,906
Issue date
Mar 18, 2025
Seagate Technology LLC
Cheng Bi
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing system with capacitive shear sensor
Patent number
12,233,505
Issue date
Feb 25, 2025
Applied Materials, Inc.
Nicholas A. Wiswell
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate holding apparatus, substrate suction determination method...
Patent number
12,230,529
Issue date
Feb 18, 2025
Ebara Corporation
Osamu Nabeya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemical mechanical polishing apparatus and method
Patent number
12,208,487
Issue date
Jan 28, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Hsi Huang
B24 - GRINDING POLISHING
Information
Patent Grant
Roller for location-specific wafer polishing
Patent number
12,194,591
Issue date
Jan 14, 2025
Applied Materials, Inc.
Ekaterina A. Mikhaylichenko
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for polishing, processing system, and method of polishing
Patent number
12,179,312
Issue date
Dec 31, 2024
Ebara Corporation
Takuya Moriura
B24 - GRINDING POLISHING
Information
Patent Grant
Slurry and polishing method
Patent number
12,173,219
Issue date
Dec 24, 2024
Resonac Corporation
Satoyuki Nomura
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Chemical mechanical planarization tool
Patent number
12,172,263
Issue date
Dec 24, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Michael Yen
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical polishing apparatus using a magnetically couple...
Patent number
12,151,336
Issue date
Nov 26, 2024
Taiwan Semiconductor Manufacturing Company Limited
Wen-Pin Ho
B24 - GRINDING POLISHING
Information
Patent Grant
Automated semiconductor substrate polishing and cleaning
Patent number
12,154,810
Issue date
Nov 26, 2024
GlobalWafers Co., Ltd.
ShinBae Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Containment and exhaust system for substrate polishing components
Patent number
12,145,236
Issue date
Nov 19, 2024
Axus Technology, LLC
Daniel Ray Trojan
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing system apparatus and methods for defect reduction at a su...
Patent number
12,138,732
Issue date
Nov 12, 2024
Applied Materials, Inc.
Asheesh Jain
B24 - GRINDING POLISHING
Information
Patent Grant
Roller for location-specific wafer polishing
Patent number
12,138,733
Issue date
Nov 12, 2024
Applied Materials, Inc.
Ekaterina A. Mikhaylichenko
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
POLISHING PAD, POLISHING PAD MANUFACTURING METHOD, AND WAFER POLISH...
Publication number
20250178154
Publication date
Jun 5, 2025
NORITAKE CO., LIMITED
Ryoma ITO
B24 - GRINDING POLISHING
Information
Patent Application
CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD
Publication number
20250170688
Publication date
May 29, 2025
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Hsi HUANG
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE SUPPORT DEVICE, CLEANING DEVICE, DEVICE AND METHOD FOR CA...
Publication number
20250164977
Publication date
May 22, 2025
EBARA CORPORATION
Michiaki MATSUDA
G05 - CONTROLLING REGULATING
Information
Patent Application
POLISHING PAD WITH IMPROVED SLURRY FLOWABILITY AND PROCESS FOR PREP...
Publication number
20250144764
Publication date
May 8, 2025
SK enpulse Co., Ltd.
Yujin SHIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POLISHING PAD, METHOD FOR PRODUCING POLISHING PAD, AND METHOD FOR P...
Publication number
20250144765
Publication date
May 8, 2025
FUJIBO HOLDINGS, INC.
Yoshihide KAWAMURA
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE HOLDING APPARATUS, SUBSTRATE SUCTION DETERMINATION METHOD...
Publication number
20250140594
Publication date
May 1, 2025
EBARA CORPORATION
Osamu Nabeya
B24 - GRINDING POLISHING
Information
Patent Application
SLURRY, SCREENING METHOD, AND POLISHING METHOD
Publication number
20250129279
Publication date
Apr 24, 2025
Resonac Corporation
Satoyuki NOMURA
C01 - INORGANIC CHEMISTRY
Information
Patent Application
MICROELECTRONIC ASSEMBLY FROM PROCESSED SUBSTRATE
Publication number
20250125196
Publication date
Apr 17, 2025
ADEIA SEMICONDUCTOR BONDING TECHNOLOGIES INC.
Cyprian Emeka Uzoh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
HORIZONTAL PRE-CLEAN 2-STAGE DOWNFORCE MECHANISM WITH FLEXURE
Publication number
20250114902
Publication date
Apr 10, 2025
Applied Materials, Inc.
Avyay Panchapakesan
B24 - GRINDING POLISHING
Information
Patent Application
EDGE AND HOT SPOT COMPENSATION TECHNIQUES IN CHEMICAL MECHANICAL PO...
Publication number
20250114897
Publication date
Apr 10, 2025
Applied Materials, Inc.
Zhize Zhu
B24 - GRINDING POLISHING
Information
Patent Application
GROOVES FOR EDGE AND HOT SPOT COMPENSATION IN CHEMICAL MECHANICAL P...
Publication number
20250114901
Publication date
Apr 10, 2025
Applied Materials, Inc.
Zhize Zhu
B24 - GRINDING POLISHING
Information
Patent Application
RETAINING-RING-LESS CMP PROCESS
Publication number
20250114903
Publication date
Apr 10, 2025
Applied Materials, Inc.
Chen-Wei Chang
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING HEAD WITH DECOUPLED MEMBRANE POSITION CONTROL
Publication number
20250108473
Publication date
Apr 3, 2025
Applied Materials, Inc.
Andrew J. Nagengast
B24 - GRINDING POLISHING
Information
Patent Application
SLURRY AND POLISHING METHOD
Publication number
20250084294
Publication date
Mar 13, 2025
Resonac Corporation
Satoyuki NOMURA
C01 - INORGANIC CHEMISTRY
Information
Patent Application
FREE JOINT STRUCTURE, PUSH-PULL DEVICE, AND SUBSTRATE PROCESSING MO...
Publication number
20250073851
Publication date
Mar 6, 2025
EBARA CORPORATION
MATSUTARO MIYAMOTO
B24 - GRINDING POLISHING
Information
Patent Application
CONTAINMENT AND EXHAUST SYSTEM FOR SUBSTRATE POLISHING COMPONENTS
Publication number
20250065473
Publication date
Feb 27, 2025
AXUS TECHNOLOGY, LLC
Daniel Ray Trojan
B24 - GRINDING POLISHING
Information
Patent Application
AUTOMATED SEMICONDUCTOR SUBSTRATE POLISHING AND CLEANING METHODS
Publication number
20250062148
Publication date
Feb 20, 2025
GLOBALWAFERS CO., LTD.
ShinBae Park
B08 - CLEANING
Information
Patent Application
APPARATUS FOR POLISHING, PROCESSING SYSTEM, AND METHOD OF POLISHING
Publication number
20250058431
Publication date
Feb 20, 2025
EBARA CORPORATION
Takuya MORIURA
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING PAD WITH REDUCED DEFECT AND METHOD OF PREPARING A SEMICON...
Publication number
20250033160
Publication date
Jan 30, 2025
SK enpulse Co., Ltd.
Yujin SHIN
B24 - GRINDING POLISHING
Information
Patent Application
METHOD FOR POLISHING DIAMOND CRYSTAL, AND DIAMOND CRYSTAL
Publication number
20250018524
Publication date
Jan 16, 2025
ORBRAY CO., LTD.
Seongwoo KIM
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING DEVICE, SUBSTRATE TREATING APPARATUS, AND POLISHING METHOD
Publication number
20250018523
Publication date
Jan 16, 2025
SCREEN Holdings Co., Ltd.
Hiroaki ISHII
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING FLUID RECOVERY AND REUSE SYSTEM FOR SEMICONDUCTOR SUBSTRA...
Publication number
20250010431
Publication date
Jan 9, 2025
Applied Materials, Inc.
Jianjun HU
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING DEVICE, POLISHING METHOD, AND MACHINE PART
Publication number
20250010425
Publication date
Jan 9, 2025
NHK Spring Co., Ltd.
Masahiro FUJII
B24 - GRINDING POLISHING
Information
Patent Application
DOUBLE-SIDED POLISHING OF SEMICONDUCTOR WAFERS WITH DYNAMIC CONTROL
Publication number
20250001546
Publication date
Jan 2, 2025
GLOBALWAFERS CO., LTD.
Yung Hsing Chu
B24 - GRINDING POLISHING
Information
Patent Application
SLURRY, SCREENING METHOD, AND POLISHING METHOD
Publication number
20240425737
Publication date
Dec 26, 2024
Resonac Corporation
Satoyuki NOMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POLISHING APPARATUS AND POLISHING METHOD
Publication number
20240399529
Publication date
Dec 5, 2024
Fujikoshi Machinery Corp.
Yuya KANNO
B24 - GRINDING POLISHING
Information
Patent Application
SYSTEM AND METHOD FOR CONTROLLING CHEMICAL MECHANICAL PLANARIZATION
Publication number
20240404894
Publication date
Dec 5, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Wei HSU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
MAINTAINING VALVE COMPONENTS
Publication number
20240399528
Publication date
Dec 5, 2024
Saudi Arabian Oil Company
Hassan Shaker Ali Al-Sinan
B24 - GRINDING POLISHING
Information
Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Publication number
20240391049
Publication date
Nov 28, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yi-Cheng LIN
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING TOOL AND METHOD
Publication number
20240383092
Publication date
Nov 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Te-Chien Hou
B24 - GRINDING POLISHING