Pattern transfer method and pattern transfer apparatus

Abstract

A pattern transfer method includes performing positioning between a transfer position of a pattern forming surface of a transfer original plate on which a pattern to be transferred is formed and a transferred position of a transferred surface of a transferred substrate to which the pattern is to be transferred; contacting the pattern forming surface with the transferred surface; and partly correcting the positional deviation between the transfer position of the pattern forming surface and the transferred position of the transferred surface in the in-plane direction, after the positioning is performed.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a constructional view showing a pattern transfer apparatus according to the first embodiment of the present invention;

FIG. 2A is a diagram showing a principle of a correction in the pattern transfer apparatus according to the first embodiment;

FIG. 2B is a view showing an area A in FIG. 2A as enlarged;

FIG. 3A is a diagram showing a principle of a correction in the pattern transfer apparatus according to the first embodiment;

FIG. 3B is a view showing an area B in FIG. 3A as enlarged;

FIG. 4 is a flowchart for explaining a process flow of a pattern transfer method according to the first embodiment;

FIG. 5 is a flowchart for explaining a process flow of a pattern transfer method according to the second embodiment;

FIG. 6A is a flowchart for explaining a process flow of a pattern transfer method according to the third embodiment;

FIG. 6B is a flowchart for explaining a process flow of a pattern transfer method according to the third embodiment;

FIG. 7 is a constructional view showing a pattern transfer apparatus according to the fourth embodiment;

FIG. 8 is an equivalent circuit diagram showing a structure of a mask substrate of the pattern transfer apparatus according to the fourth embodiment;

FIG. 9 is a flowchart for explaining a process flow of a pattern transfer method according to the fourth embodiment;

FIG. 10 is a flowchart for explaining a process flow of a pattern transfer method according to the fifth embodiment;

FIG. 11A is a flowchart for explaining a process flow of a pattern transfer method according to the sixth embodiment; and

FIG. 11B is a flowchart for explaining a process flow of a pattern transfer method according to the sixth embodiment.

Claims

1. A pattern transfer method comprising: performing positioning between a transfer position of a pattern forming surface of a transfer original plate on which a pattern to be transferred is formed and a transferred position of a transferred surface of a transferred substrate to which the pattern is to be transferred;contacting the pattern forming surface with the transferred surface; andpartly correcting the positional deviation between the transfer position of the pattern forming surface and the transferred position of the transferred surface in the in-plane direction, after the positioning is performed.

2. The method according to claim 1, wherein the positional deviation is partly corrected by partly correcting the transferred position of the transferred surface in the in-plane direction, after the positioning is performed.

3. The method according to claim 2, wherein the distortion in the in-plane direction at the transferred position of the transferred surface is partly adjusted through the adjustment in part of the height of a part of the transferred position of the transferred surface, thereby correcting the partial positional deviation at the transferred position in the in-plane direction.

4. The method according to claim 3, wherein the adjustment in part of the height of the part of the transferred position is performed by pressing partly a surface of the transferred substrate which is opposed to the transferred surface.

5. The method according to claim 2, further comprising: forming positional deviation distribution information by measuring the positional deviation between the transfer position of the pattern forming surface and the transferred position of the transferred surface in the in-plane direction, after the positioning is performed,wherein the positional deviation is partly corrected by partly correcting the transferred position of the transferred surface in the in-plane direction based on the positional deviation distribution information.

6. The method according to claim 1, wherein the positional deviation is partly corrected by partly correcting the transfer position of the pattern forming surface in the in-plane direction, after the positioning is performed.

7. The method according to claim 6, further comprising: forming positional deviation distribution information by measuring the positional deviation between the transfer position of the pattern forming surface and the transferred position of the transferred surface in the in-plane direction, after the positioning is performed,wherein the positional deviation is partly corrected by partly correcting the transfer position of the pattern forming surface in the in-plane direction based on the positional deviation distribution information.

8. The method according to claim 6, wherein the positional deviation is partly corrected by partly correcting the transfer position on the pattern forming surface in the in-plane direction using the distortion generated by a material having a piezoelectric effect.

9. The method according to claim 1, wherein the pattern on the pattern forming surface is transferred onto the transferred surface by a lithography technique, after the positional deviation is partly corrected.

10. A pattern transfer apparatus comprising: a press-contact unit that presses a pattern forming surface of a transfer original plate on which a pattern to be transferred is formed and a transferred surface of a transferred substrate to which a resist film is to be applied and the pattern is to be transferred, thereby bringing the pattern forming surface and the transferred surface into contact with each other;a positioning unit that positions the transfer position of the pattern forming surface and the transferred position of the transferred surface;a positional deviation correcting unit that partly corrects the positional deviation in the in-plane direction between the transfer position of the pattern forming surface and the transferred position of the transferred surface at the contact surface of the pattern forming surface and the transferred surface; anda light source that irradiates light to expose the resist film on the transferred substrate.

11. The apparatus according to claim 10, wherein the positional deviation correcting unit partly corrects the positional deviation by partly correcting the transferred position of the transferred surface in the in-plane direction at the contact surface.

12. The apparatus according to claim 11, wherein the positional deviation correcting unit partly corrects the positional deviation by partly adjusting the height of a part of the transferred position at the contact surface.

13. The apparatus according to claim 12, wherein the positional deviation correcting unit presses partly a surface of the transferred substrate which is opposed to the transferred surface so as to partly adjust the height of the part of the transferred position.

14. The apparatus according to claim 10, wherein the positional deviation correcting unit partly corrects the positional deviation by partly correcting the transfer position of the pattern forming surface in the in-plane direction at the contact surface.