Alignment for proximity or contact printer

Industry

CPC
G03F9/7038

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F9/00Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces

Current Industry

G03F9/7038Alignment for proximity or contact printer

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Template, imprint apparatus, imprint method and imprint apparatus m...
- Patent number 11,152,218
- Issue date Oct 19, 2021
- TOSHIBA MEMORY CORPORATION
- Manabu Takakuwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Information processing apparatus, storage medium, lithography appar...
- Patent number 11,061,335
- Issue date Jul 13, 2021
- Canon Kabushiki Kaisha
- Shinichiro Koga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detection apparatus, position detection method, imprint ap...
- Patent number 10,989,527
- Issue date Apr 27, 2021
- Canon Kabushiki Kaisha
- Hiroshi Sato
- G01 - MEASURING TESTING
Information Patent Grant
Proximity exposure method
- Patent number 10,768,529
- Issue date Sep 8, 2020
- V Technology Co., Ltd.
- Takumi Togashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus
- Patent number 10,747,106
- Issue date Aug 18, 2020
- Canon Kabushiki Kaisha
- Sentaro Aihara
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Position detector, position detection method, imprint apparatus, an...
- Patent number 10,634,995
- Issue date Apr 28, 2020
- Canon Kabushiki Kaisha
- Ken Minoda
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Position detector, position detection method, imprint apparatus, an...
- Patent number 10,613,434
- Issue date Apr 7, 2020
- Canon Kabushiki Kaisha
- Ken Minoda
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Dual-layer alignment device and method
- Patent number 10,578,986
- Issue date Mar 3, 2020
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Xuchao Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Imprint apparatus, method of manufacturing article, information pro...
- Patent number 10,493,672
- Issue date Dec 3, 2019
- Canon Kabushiki Kaisha
- Sentaro Aihara
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Overlay alignment detection apparatus for display device and exposu...
- Patent number 10,466,600
- Issue date Nov 5, 2019
- BOE Technology Group Co., Ltd.
- Lei Zhang
- G02 - OPTICS
Information Patent Grant
Position detection apparatus, position detection method, imprint ap...
- Patent number 10,337,856
- Issue date Jul 2, 2019
- Canon Kabushiki Kaisha
- Hiroshi Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern forming method and method of manufacturing article
- Patent number 10,303,069
- Issue date May 28, 2019
- Canon Kabushiki Kaisha
- Eiji Sakamoto
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Method of aligning a first article relative to a second article
- Patent number 10,025,207
- Issue date Jul 17, 2018
- Universitat Kassel
- Ivo Rangelow
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Device and method for positioning a photolithography mask by a cont...
- Patent number 9,897,927
- Issue date Feb 20, 2018
- UNITY SEMICONDUCTOR
- Gilles Fresquet
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical image capturing module, alignment method, and observation m...
- Patent number 9,874,807
- Issue date Jan 23, 2018
- Metal Industries Research & Development Centre
- Shi-Wei Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint method, imprint apparatus, and article manufacturing method
- Patent number 9,703,190
- Issue date Jul 11, 2017
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus and method of manufacturing article
- Patent number 9,625,837
- Issue date Apr 18, 2017
- Canon Kabushiki Kaisha
- Ken-ichiro Shinoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus including alignment and overlay measurement
- Patent number 9,616,613
- Issue date Apr 11, 2017
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Detection apparatus, imprint apparatus, and method of manufacturing...
- Patent number 9,595,447
- Issue date Mar 14, 2017
- Canon Kabushiki Kaisha
- Hiroshi Inada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Detection apparatus, lithography apparatus and method of manufactur...
- Patent number 9,594,315
- Issue date Mar 14, 2017
- Canon Kabushiki Kaisha
- Takafumi Miyaharu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus, imprint method and method of manufacturing an ar...
- Patent number 9,465,308
- Issue date Oct 11, 2016
- Canon Kabushiki Kaisha
- Toshiki Iwai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mark position detector, imprint apparatus, and article manufacturin...
- Patent number 9,366,525
- Issue date Jun 14, 2016
- Canon Kabushiki Kaisha
- Hiroshi Sato
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lithography system and manufacturing method of commodities
- Patent number 9,329,505
- Issue date May 3, 2016
- Canon Kabushiki Kaisha
- Fumiaki Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus using microlens array and optical member
- Patent number 9,304,391
- Issue date Apr 5, 2016
- V Technology Co., Ltd.
- Michinobu Mizumura
- G02 - OPTICS
Information Patent Grant
Position detection apparatus, imprint apparatus, and position detec...
- Patent number 9,283,720
- Issue date Mar 15, 2016
- Canon Kabushiki Kaisha
- Ken Minoda
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Work stage of exposing apparatus, exposing method and method of man...
- Patent number 9,158,210
- Issue date Oct 13, 2015
- Dai Nippon Printing Co., Ltd.
- Eriko Inoue
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for manufacturing mold
- Patent number 8,992,789
- Issue date Mar 31, 2015
- Kabushiki Kaisha Toshiba
- Masato Suzuki
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Mark position detector, imprint apparatus, and article manufacturin...
- Patent number 8,953,175
- Issue date Feb 10, 2015
- Canon Kabushiki Kaisha
- Hiroshi Sato
- G01 - MEASURING TESTING
Information Patent Grant
Electroactive polymers for lithography
- Patent number 8,872,135
- Issue date Oct 28, 2014
- The Invention Science Fund I, LLC
- Roderick A. Hyde
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detection apparatus, imprint apparatus, and position detec...
- Patent number 8,842,294
- Issue date Sep 23, 2014
- Canon Kabushiki Kaisha
- Ken Minoda
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
PROXIMITY EXPOSURE METHOD
- Publication number 20200026192
- Publication date Jan 23, 2020
- V Technology Co., LTD.
- Takumi TOGASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION DETECTION APPARATUS, POSITION DETECTION METHOD, IMPRINT AP...
- Publication number 20190285403
- Publication date Sep 19, 2019
- Canon Kabushiki Kaisha
- Hiroshi Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS, METHOD OF MANUFACTURING ARTICLE, INFORMATION PRO...
- Publication number 20180370091
- Publication date Dec 27, 2018
- Canon Kabushiki Kaisha
- Sentaro Aihara
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
OVERLAY ALIGNMENT DETECTION APPARATUS FOR DISPLAY DEVICE AND EXPOSU...
- Publication number 20180095371
- Publication date Apr 5, 2018
- BOE TECHNOLOGY GROUP CO., LTD.
- Lei Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POSITION DETECTION APPARATUS, IMPRINT APPARATUS, AND POSITION DETEC...
- Publication number 20140346694
- Publication date Nov 27, 2014
- Ken Minoda
- B82 - NANO-TECHNOLOGY
Information Patent Application
OPTICAL IMAGE CAPTURING MODULE, ALIGNMENT METHOD, AND OBSERVATION M...
- Publication number 20140184791
- Publication date Jul 3, 2014
- Metal Industries Research & Development Centre
- SHI-WEI LIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR MANUFACTURING MOLD
- Publication number 20130240480
- Publication date Sep 19, 2013
- Kabushiki Kaisha Toshiba
- Masato SUZUKI
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20130193602
- Publication date Aug 1, 2013
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- B82 - NANO-TECHNOLOGY
Information Patent Application
WORK STAGE OF EXPOSING APPARATUS, EXPOSING METHOD AND METHOD OF MAN...
- Publication number 20130155382
- Publication date Jun 20, 2013
- Eriko INOUE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS USING MICROLENS ARRAY AND OPTICAL MEMBER
- Publication number 20130128253
- Publication date May 23, 2013
- V TECHNOLOGY CO., LTD.
- Michinobu Mizumura
- G02 - OPTICS
Information Patent Application
DETECTOR, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD
- Publication number 20130100459
- Publication date Apr 25, 2013
- Canon Kabushiki Kaisha
- Toshiki Iwai
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINT METHOD, IMPRINT APPARATUS, AND MANUFACTURING METHOD OF SEMI...
- Publication number 20130078821
- Publication date Mar 28, 2013
- Yohko FURUTONO
- B82 - NANO-TECHNOLOGY
Information Patent Application
LITHOGRAPHY SYSTEM AND MANUFACTURING METHOD OF COMMODITIES
- Publication number 20130057839
- Publication date Mar 7, 2013
- Canon Kabushiki Kaisha
- Fumiaki Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION DETECTION APPARATUS, IMPRINT APPARATUS, AND POSITION DETEC...
- Publication number 20120328725
- Publication date Dec 27, 2012
- Canon Kabushiki Kaisha
- Ken Minoda
- B82 - NANO-TECHNOLOGY
Information Patent Application
Plasmon tomography
- Publication number 20120262719
- Publication date Oct 18, 2012
- Searete LLC, a limited liability corporation of the State of Delaware
- Roderick A. Hyde
- G01 - MEASURING TESTING
Information Patent Application
ALIGNMENT METHOD, ALIGNMENT APPARATUS, AND EXPOSURE APPARATUS
- Publication number 20120147343
- Publication date Jun 14, 2012
- Takamitsu IWAMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF ALIGNING A FIRST ARTICLE RELATIVE TO A SECOND ARTICLE AND...
- Publication number 20110219635
- Publication date Sep 15, 2011
- Universitat Kassel
- Ivo Rangelow
- G01 - MEASURING TESTING
Information Patent Application
MARK POSITION DETECTOR, IMPRINT APPARATUS, AND ARTICLE MANUFACTURIN...
- Publication number 20110141489
- Publication date Jun 16, 2011
- Canon Kabushiki Kaisha
- Hiroshi SATO
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Plasmon tomography
- Publication number 20110063627
- Publication date Mar 17, 2011
- Searete LLC, a limited liability corporation of the State of Delaware
- Roderick A. Hyde
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE APPARATUS AND EXPOSURE METHOD
- Publication number 20110027542
- Publication date Feb 3, 2011
- NSK Ltd.
- Shinichirou NAGAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
WORK STAGE OF EXPOSING APPARATUS, EXPOSING METHOD AND METHOD OF MAN...
- Publication number 20100103402
- Publication date Apr 29, 2010
- Dai Nippon Printing Co., Ltd.
- Eriko Inoue
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
NEAR-FIELD EXPOSURE APPARATUS AND NEAR-FIELD EXPOSURE METHOD
- Publication number 20090311631
- Publication date Dec 17, 2009
- Canon Kabushiki Kaisha
- Yasuhisa Inao
- B82 - NANO-TECHNOLOGY
Information Patent Application
Electroactive polymers for lithography
- Publication number 20090242806
- Publication date Oct 1, 2009
- Searete LLC, a limited liability corporation
- Roderick A. Hyde
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Electroactive polymers for lithography
- Publication number 20090244511
- Publication date Oct 1, 2009
- Searete LLC, a limited liability corporation of the State of Delaware
- Roderick A. Hyde
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Multilayer active mask lithography
- Publication number 20090130573
- Publication date May 21, 2009
- Searete LLC, a limited liability corporation of the State of Delaware
- Roderick A. Hyde
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Multilayer active mask lithography
- Publication number 20090117475
- Publication date May 7, 2009
- Searete LLC, a limited liability corporation of the State of Delaware
- Roderick A. Hyde
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND APPARATUS FOR MANU...
- Publication number 20090068765
- Publication date Mar 12, 2009
- Kenichi MUROOKA
- B82 - NANO-TECHNOLOGY
Information Patent Application
Plasmon tomography
- Publication number 20090051920
- Publication date Feb 26, 2009
- Searete LLC
- Roderick A. Hyde
- G01 - MEASURING TESTING
Information Patent Application
Device For Determining the Relative Position Between Two Essentiall...
- Publication number 20080283308
- Publication date Nov 20, 2008
- FRSA GmbH
- Rainer Kurtz
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Alignment for contact lithography
- Publication number 20080090160
- Publication date Apr 17, 2008
- Jason Blackstock
- B82 - NANO-TECHNOLOGY

Alignment for proximity or contact printer

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Template, imprint apparatus, imprint method and imprint apparatus m...

Information processing apparatus, storage medium, lithography appar...

Position detection apparatus, position detection method, imprint ap...

Proximity exposure method

Imprint apparatus

Position detector, position detection method, imprint apparatus, an...

Position detector, position detection method, imprint apparatus, an...

Dual-layer alignment device and method

Imprint apparatus, method of manufacturing article, information pro...

Overlay alignment detection apparatus for display device and exposu...

Position detection apparatus, position detection method, imprint ap...

Pattern forming method and method of manufacturing article

Method of aligning a first article relative to a second article

Device and method for positioning a photolithography mask by a cont...

Optical image capturing module, alignment method, and observation m...

Imprint method, imprint apparatus, and article manufacturing method

Imprint apparatus and method of manufacturing article

Imprint apparatus including alignment and overlay measurement

Detection apparatus, imprint apparatus, and method of manufacturing...

Detection apparatus, lithography apparatus and method of manufactur...

Imprint apparatus, imprint method and method of manufacturing an ar...

Mark position detector, imprint apparatus, and article manufacturin...

Lithography system and manufacturing method of commodities

Exposure apparatus using microlens array and optical member

Position detection apparatus, imprint apparatus, and position detec...

Work stage of exposing apparatus, exposing method and method of man...

Method for manufacturing mold

Mark position detector, imprint apparatus, and article manufacturin...

Electroactive polymers for lithography

Position detection apparatus, imprint apparatus, and position detec...

Patents Applicationslast 30 patents

PROXIMITY EXPOSURE METHOD

POSITION DETECTION APPARATUS, POSITION DETECTION METHOD, IMPRINT AP...

IMPRINT APPARATUS, METHOD OF MANUFACTURING ARTICLE, INFORMATION PRO...

OVERLAY ALIGNMENT DETECTION APPARATUS FOR DISPLAY DEVICE AND EXPOSU...

POSITION DETECTION APPARATUS, IMPRINT APPARATUS, AND POSITION DETEC...

OPTICAL IMAGE CAPTURING MODULE, ALIGNMENT METHOD, AND OBSERVATION M...

METHOD FOR MANUFACTURING MOLD

IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE

WORK STAGE OF EXPOSING APPARATUS, EXPOSING METHOD AND METHOD OF MAN...

EXPOSURE APPARATUS USING MICROLENS ARRAY AND OPTICAL MEMBER

DETECTOR, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD

IMPRINT METHOD, IMPRINT APPARATUS, AND MANUFACTURING METHOD OF SEMI...

LITHOGRAPHY SYSTEM AND MANUFACTURING METHOD OF COMMODITIES

POSITION DETECTION APPARATUS, IMPRINT APPARATUS, AND POSITION DETEC...

Plasmon tomography

ALIGNMENT METHOD, ALIGNMENT APPARATUS, AND EXPOSURE APPARATUS

METHOD OF ALIGNING A FIRST ARTICLE RELATIVE TO A SECOND ARTICLE AND...

MARK POSITION DETECTOR, IMPRINT APPARATUS, AND ARTICLE MANUFACTURIN...

Plasmon tomography

EXPOSURE APPARATUS AND EXPOSURE METHOD

WORK STAGE OF EXPOSING APPARATUS, EXPOSING METHOD AND METHOD OF MAN...

NEAR-FIELD EXPOSURE APPARATUS AND NEAR-FIELD EXPOSURE METHOD

Electroactive polymers for lithography

Electroactive polymers for lithography

Multilayer active mask lithography

Multilayer active mask lithography

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND APPARATUS FOR MANU...

Plasmon tomography

Device For Determining the Relative Position Between Two Essentiall...

Alignment for contact lithography