Number | Date | Country | Kind |
---|---|---|---|
1-86222 | Apr 1989 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
3094417 | Workman | Jun 1963 | |
3094619 | Grant | Jun 1963 | |
3369933 | Shulman | Feb 1968 | |
3767414 | Huffman | Oct 1973 | |
4112139 | Shirk et al. | Sep 1978 | |
4261800 | Beckenbaugh et al. | Apr 1981 | |
4686114 | Halliwell et al. | Aug 1987 | |
4830668 | Wundt et al. | May 1989 | |
4832989 | Giesecke et al. | May 1989 | |
4847139 | Wolf et al. | Jul 1989 | |
4882200 | Liu et al. | Nov 1989 | |
4913768 | Wolf et al. | Apr 1990 | |
4960613 | Cole et al. | Oct 1990 | |
5145714 | Reisman et al. | Sep 1992 | |
5145715 | Asano et al. | Sep 1992 |
Entry |
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Pacansky, J., Formation of Metals by Electron Beams or UV Light From Organic Acid Salt Resists, IBM Technical Disclosure Bulletin, Aug. 1977, vol. 20, No. 3, p. 1180. |