| Number | Date | Country | Kind |
|---|---|---|---|
| 1-86222 | Apr 1989 | JPX |
| Number | Name | Date | Kind |
|---|---|---|---|
| 3094417 | Workman | Jun 1963 | |
| 3094619 | Grant | Jun 1963 | |
| 3369933 | Shulman | Feb 1968 | |
| 3767414 | Huffman | Oct 1973 | |
| 4112139 | Shirk et al. | Sep 1978 | |
| 4261800 | Beckenbaugh et al. | Apr 1981 | |
| 4686114 | Halliwell et al. | Aug 1987 | |
| 4830668 | Wundt et al. | May 1989 | |
| 4832989 | Giesecke et al. | May 1989 | |
| 4847139 | Wolf et al. | Jul 1989 | |
| 4882200 | Liu et al. | Nov 1989 | |
| 4913768 | Wolf et al. | Apr 1990 | |
| 4960613 | Cole et al. | Oct 1990 | |
| 5145714 | Reisman et al. | Sep 1992 | |
| 5145715 | Asano et al. | Sep 1992 |
| Entry |
|---|
| Pacansky, J., Formation of Metals by Electron Beams or UV Light From Organic Acid Salt Resists, IBM Technical Disclosure Bulletin, Aug. 1977, vol. 20, No. 3, p. 1180. |