Number | Date | Country | Kind |
---|---|---|---|
62-13324 | May 1987 | JPX | |
62-13326 | May 1987 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
3665483 | Becker et al. | May 1972 | |
3787873 | Sato et al. | Jan 1974 | |
3867217 | Maggs et al. | Feb 1975 | |
3956052 | Koste et al. | May 1976 | |
4037075 | Pugsley et al. | Jul 1977 | |
4046986 | Barker | Sep 1977 | |
4568409 | Caplan | Feb 1986 | |
4713518 | Yamazaki | Dec 1987 |
Entry |
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Bakhru et al., "Inhibiting Adhesion of Silicon Particles to the Surface of a Silicon Semiconductor Wafer During Laser Dicing", IBM Technical Disclosure Bulletin, vol. 15, No. 4, Sep. 1972, p. 1079. |