Number | Date | Country | Kind |
---|---|---|---|
2-161239 | Jun 1990 | JPX |
Filing Document | Filing Date | Country | Kind | 102e Date | 371c Date |
---|---|---|---|---|---|
PCT/JP91/00817 | 6/19/1991 | 12/18/1992 | 12/18/1992 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO91/20018 | 12/26/1991 |
Number | Name | Date | Kind |
---|---|---|---|
4360586 | Flanders et al. | Nov 1982 | |
4890309 | Smith et al. | Dec 1989 |
Number | Date | Country |
---|---|---|
62-59296 | Dec 1987 | JPX |
1-147458 | Jun 1989 | JPX |
2-34854A | Feb 1990 | JPX |
Entry |
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M. Levenson et al, "Improving Resolution in Photolithography with a Phase-Shifting Mask", IEEE Transactions on Electron Devices, vol. ED-29, No. 12, Dec. 1982, pp. 1828-1836. |