Claims
- 1. A BCBO-containing polymer of structural formula (VII), (VIII),[m] (IX) or (X): wherein R is alkyl, aryl, haloalkyl, hydroxyalkyl, —CN, —CONH2, —Si(OCH3)3, hydroxyalkyl, cyanoalkyl, epoxyalkyl, alkoxy, ether, ester, acetate; R1 is H or methyl group; R3 is alkylene, arylene, or an ester moiety; n and m are each numbers of 0.1 to 0.9 and [] represents a polymer backbone for pendant groups.
- 2. A BCBO-containing polymer of claim 1, of said structural formula (VII).
- 3. A BCBO-containing polymer of claim 1, of said structural formula (VIII).
- 4. A BCBO-containing polymer of claim 1, of said structural formula (IX).
- 5. A BCBO-containing polymer of claim 1, of said structural formula (X).
- 6. A self-curable polymer comprising a polymer of structural formula (III), (IV), (V), (VI), (VII), (VIII), (IX) or (X): wherein R is alkyl, aryl, haloalkyl, hydroxyalkyl, —CN, —CONH2, —Si(OCH3)3, hydroxyalkyl, cyanoalkyl, epoxyalkyl, alkoxy, ether, ester or acetate; n and m are each numbers of 0.1 to 0.9; [] represents a polymer backbone for pendant groups; andR1 is H or a methyl group, wherein R is alkyl, aryl, haloalkyl, hydroxyalkyl, —CN, —CONH2, —Si(OCH3)3, hydroxyalkyl, cyanoalkyl, epoxyalkyl, alkoxy, ether, ester, acetate; R1 is H or methyl group; R3 is alkylene, arylene, or an ester moiety; n and m are each numbers of 0.1 to 0.9; and [] represents a polymer backbone for pendant groups; as a photoresist material active in the UV wavelength of 220-500 nm.
- 7. A BCBO-containing polymer of structural formula (VI): wherein n is an numbers from 0.1 to 0.9; and [] represents a polymer backbone for pendant BCBO groups.
CROSS REFERENCE TO RELATED APPLICATION
This Application is related to U.S. application Ser. No. 60/201,731, filed May 4, 2000, and the benefit under 35 USC 119(e) of such U.S. Application is claimed.
US Referenced Citations (1)
Number |
Name |
Date |
Kind |
5869693 |
Wang |
Feb 1999 |
A |
Non-Patent Literature Citations (1)
Entry |
Wang et al., Macromolecules (1998) 31(16), 5556-5558. |
Provisional Applications (1)
|
Number |
Date |
Country |
|
60/201731 |
May 2000 |
US |