Claims
- 1. A method of forming a polymer on a substrate in a predetermined pattern comprising:
- (a) coating a substrate with a prepolymer which is an ether of the reaction product of dicyclopentadiene with phenol having the formula ##STR6## with R.sub.1, R.sub.2 =H or alkyl of 1-10 carbon atoms;
- R.sub.3 =methyl;
- R.sub.4 =H;
- A=H ##STR7## an alkyl moiety containing 1 to 10 carbon atoms, a cycloalkyl moiety having 5 to 10 carbon atoms, or benzyl, subject to the constraint that at least 50% of all A's are the vinyl benzyl moiety;
- L=Br or Cl;
- a=0, 1, or 2;
- b=0 or 1;
- m, n, s, and t are 0 or an integer, and m+n+s+t=z is an integer from 1-10; and
- R.sub.5 =H, an alkyl moiety of 1-10 carbon atoms, a halogen or alkoxy moiety, or a monovalent aromatic radical.
- (b) irradiating the coated prepolymer of (a) through a masking pattern to selectively crosslink the portion of said coating being irradiated;
- (c) selectively dissolving the non-irradiated part of the prepolymer coating of (a); and
- (d) curing the crosslinked portion of the prepolymer coating by heating at a temperature in the range of 100.degree. C. to 300.degree. C. for a time sufficient to further crosslink said crosslinked coating and to transform the prepolymer to an infusible glassy solid.
- 2. The method of claim 1 wherein R.sub.1 and R.sub.2 are hydrogen.
- 3. The method of claim 1 wherein Z is 3 or 4.
- 4. The method of claim 1 wherein A is para vinyl benzyl.
- 5. The method of claim 1 wherein L is Br.
- 6. The method of claim 1 wherein 70% of A is vinyl benzyl and the remainder is propyl.
- 7. The method of claim 1 wherein the coating of (a) is softbaked before the irradiation of (b).
- 8. The method of claim 1 wherein the coating of (a) includes a photosensitizer of photoinitiator.
- 9. The method of claim 1 wherein the irradiation of (b) has a wavelength of 200 to 500 nm.
- 10. An electronic interconnect structure prepared by the method of claim 1.
- 11. An electronic interconnect structure of claim 10 wherein said structure polymer is adhered to a layer of chromium metal.
Government Interests
U S. Government has rights in this invention under U.S. Air Force Contract F33615-89-C-5603
US Referenced Citations (2)
Number |
Name |
Date |
Kind |
4824920 |
Zupancic et al. |
Apr 1989 |
|
4908096 |
Zupancic |
Mar 1990 |
|