Number | Name | Date | Kind |
---|---|---|---|
3802885 | Lawson | Apr 1974 | |
3869292 | Peters | Mar 1975 | |
4009033 | Bakos et al. | Feb 1977 | |
4108666 | Hayashi et al. | Aug 1978 | |
4115128 | Kita | Sep 1978 | |
4442195 | Yamamoto et al. | Apr 1984 | |
4524121 | Gleim et al. | Jun 1985 | |
4551409 | Gulla et al. | Nov 1985 | |
4564575 | Perreault et al. | Jan 1986 |
Entry |
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DeForest, W. S., "Photoresist Materials and Processes", McGraw-Hill Book Co., 1975, pp. 47-59. |