Number | Name | Date | Kind |
---|---|---|---|
4375384 | Molina | Mar 1983 | |
4482424 | Katzir et al. | Nov 1984 |
Number | Date | Country |
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0155724 | Sep 1983 | JPX |
Entry |
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IBM Technical Disclosure Bulletin, vol. 24, No. 11B, Apr. 1982, Plasma Etch Evaluation Indicators, Hall et al., pp. 5922-5923. |